Abstract: In forming a TiN film on a base material (10) by a MOCVD method, a space between a showerhead (3) and a trapping member (5) is heated by a heater (2) up to a temperature at which TDMAT is thermally decomposed, or higher. Next, source gas containing TDMAT, and so on are emitted from the showerhead (3) into a chamber (1). As a result, the TDMAT emitted into the chamber (1) is thermally decomposed into TiN, carbon, and hydrocarbon by the heater (2) in the space between the showerhead (3) and the trapping member (5). Then, the TiN, carbon, and hydrocarbon move toward the base material (10). Then, the carbon and hydrocarbon are trapped by the trapping member (5). On the other hand, the TiN passes through the trapping member (5) without being trapped to reach the base material (10). As a result, a TiN film containing neither carbon nor hydrocarbon grows on a surface of the base material (10).

Abstract: The package (2) has an inner case (7) having a box body (6) with an open end (22) in an upper portion and a lid (4) that is connected to a first side edge of the open end (22) and turns about a lid hinge (24) to open/close the open end (22); and an outer slider (8) that is slidably fitted in a periphery of the inner case (7), the outer slider (8) having a contact flap (48) extending towards the inside of the outer slider (8) in an upper edge (50) of a first side wall (44) corresponding to the lid hinge (24). The inner case (7) includes a band-like member (34), which is connected to the lid (4) at the upper end thereof and has a folded flap (38) engageable with the contact flap (48) of the outer slider (8) in a lower end thereof. When the outer slider (8) is slid down in relation to the inner case (7), the folded flap (38) is engaged with the contact flap (48) and opens the lid (4).

Abstract: The package (2) has an inner case (7) having a box body (6) with an open end (22) in an upper portion and a lid (4) that is connected to a first side edge of the open end (22) and turns about a lid hinge (24) to open/close the open end (22); and an outer slider (8) that is slidably fitted in a periphery of the inner case (7), the outer slider (8) having a contact flap (48) extending towards the inside of the outer slider (8) in an upper edge (50) of a first side wall (44) corresponding to the lid hinge (24). The inner case (7) includes a band-like member (34), which is connected to the lid (4) at the upper end thereof and has a folded flap (38) engageable with the contact flap (48) of the outer slider (8) in a lower end thereof. When the outer slider (8) is slid down in relation to the inner case (7), the folded flap (38) is engaged with the contact flap (48) and opens the lid (4).

Abstract: In forming a TiN film on a base material (10) by a MOCVD method, a space between a showerhead (3) and a trapping member (5) is heated by a heater (2) up to a temperature at which TDMAT is thermally decomposed, or higher. Next, source gas containing TDMAT, and so on are emitted from the showerhead (3) into a chamber (1). As a result, the TDMAT emitted into the chamber (1) is thermally decomposed into TiN, carbon, and hydrocarbon by the heater (2) in the space between the showerhead (3) and the trapping member (5). Then, the TiN, carbon, and hydrocarbon move toward the base material (10). Then, the carbon and hydrocarbon are trapped by the trapping member (5). On the other hand, the TiN passes through the trapping member (5) without being trapped to reach the base material (10). As a result, a TiN film containing neither carbon nor hydrocarbon grows on a surface of the base material (10).

Abstract: A radio base station apparatus according to the invention includes an information monitoring section 2, and transmitter sections 11, 12 to 1n. Each of the transmitter sections 11 to in includes a delay control section 3, a data control section 4, a delay adjustment section 5, and an RF section 6. The information monitoring section 2 monitors the operation status of the data control section of each of the transmitter sections 11 to 1n. The information monitoring section 2 controls the data control section 4 according to the operation status monitored. The data control section 4 generates a multiplexed signal of a spread delay adjustment signal and a spread main signal. The multiplexed signal goes through the delay adjustment section and RF section, and is outputted via an antenna element.

Abstract: A radio base station apparatus according to the invention includes an information monitoring section 2, and transmitter sections 11, 12 to 1n. Each of the transmitter sections 11 to in includes a delay control section 3, a data control section 4, a delay adjustment section 5, and an RF section 6. The information monitoring section 2 monitors the operation status of the data control section of each of the transmitter sections 11 to 1n. The information monitoring section 2 controls the data control section 4 according to the operation status monitored. The data control section 4 generates a multiplexed signal of a spread delay adjustment signal and a spread main signal. The multiplexed signal goes through the delay adjustment section and RF section, and is outputted via an antenna element.

Abstract: Discrete data of a base-band signal obtained by a control unit is multiplied by data equivalent to a time constant of a wave detector unit, thus enabling the deterioration in a detection voltage generated during detection of a modulation wave having a marked variation in amplitudes such as CDMA. It is possible to obtain a stable power outputted by an RF unit. Accordingly, the stable automatic gain control can be performed in consideration of the variation in the detection voltages due to the type of signals inputted to the wave detector unit, irrespective of the type of inputted signals.

Abstract: Discrete data of a base-band signal obtained by a control unit is multiplied by data equivalent to a time constant of a wave detector unit, thus enabling the deterioration in a detection voltage generated during detection of a modulation wave having a marked variation in amplitudes such as CDMA. It is possible to obtain a stable power outputted by an RF unit. Accordingly, the stable automatic gain control can be performed in consideration of the variation in the detection voltages due to the type of signals inputted to the wave detector unit, irrespective of the type of inputted signals.

Abstract: An RF signal received from an antenna is supplied to an RF portion. The RF portion mixes down the RF signal to an IF signal. An RSSI circuit of an automatic gain controlling circuit portion converts the received RF signal into a DC component and detects the electric field intensity of the received signal. A level determining unit has two threshold values of the input level. The level determining unit controls the variable amount of a gain varying unit corresponding to the input level. An averaging process circuit averages a digital signal in a predetermined time period T and controls the variable amount of the gain varying unit 3 so that the average value converges at a digital value with n bits that represent a predetermined amplitude level. A BB portion demodulates the digital signal that has been modulated on the transmitting side to original information.

Abstract: A method of manufacturing a semiconductor device including the steps of: preparing a semiconductor substrate having convexities and concavities on the surface thereof; and generating plasma by using organic silicon having silazane bonding and oxidant and depositing a planarized insulating film on the semiconductor substrate by plasma chemical vapor deposition. The organic silicon may be HMCTSZ and the substrate temperature during deposition is preferably not higher than about 100.degree. C., e.g. 50.degree. C.