Abstract: A positive photosensitive resin composition containing a polymer compound obtained in the presence of an acid catalyst by condensation of at least a siloxane compound shown by formula (1), a phenol compounds shown by formula (2) and/or formula (3), and aldehydes and ketones shown by formula (4), a photosensitive material capable of generating an acid by light and increasing a dissolution rate in an aqueous alkaline solution, a crosslinker, and a solvent. There can be provided a positive photosensitive resin composition that can remedy the problem of delamination generated on metal wiring, electrode, and substrate such as Cu and Al, especially on substrate SiN, and can form fine pattern having forward tapered shape without generating scum and footing profile in the pattern bottom and on the substrate when the widely used 2.38% TMAH aqueous solution is used as a developer.

Abstract: A silicone structure-bearing polymer having a crosslinking group within the molecule, containing an isocyanurate structure bonded within the molecule, and having a Mw of 3,000-500,000 is provided. The polymer overcomes the stripping problem that a coating is stripped from metal wirings of Cu or Al, electrodes, and SiN substrates.

Abstract: A silicone structure-bearing polymer having a crosslinking group within the molecule, containing an isocyanurate structure bonded within the molecule, and having a Mw of 3,000-500,000 is provided. The polymer overcomes the stripping problem that a coating is stripped from metal wirings of Cu or Al, electrodes, and SiN substrates.

Abstract: A negative resist composition containing as base resin a novolak resin having repeating unit “a”, wherein R1 represents a hydrogen atom, a hydroxy group, or any of a linear, a branched, or a cyclic alkyl group, alkoxy group, acyl group, acyloxy group, and alkoxy carbonyl group, these groups having 1 to 6 carbon atoms; and R2 represents a hydrogen atom, any of a linear, a branched, or cyclic alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 10 carbon atoms, aryl group having 6 to 10 carbon atoms, which may contain a hydroxy group, an alkoxy group, an ether group, a thioether group, a carboxyl group, an alkoxy carbonyl group, and an acyloxy group. “A” is within the range of 0<a?1. A negative resist composition, a chemically amplified resist composition, having a high resolution, pattern profile after exposure, and high durability as a permanent film.

Abstract: A polymer compound has a carboxyl group and a siloxane chain and is obtained in the presence of an acid catalyst by condensation of at least; (I) a siloxane compound having phenol groups at both terminals, as shown by formula (1), (II) phenols shown by formula (2) and/or phenols shown by formula (3), and (III) one or more kinds of aldehydes and ketones shown by the following general formula (4). A polymer compound can be used suitably as a base resin of a chemically amplified negative resist composition with which the problem of delamination generated on metal wires, an electrode, and a substrate, can be improved, and with which a fine pattern can be formed without generating a scum and a footing profile in the pattern bottom and on the substrate, using a widely used aqueous 2.38% TMAH solution as a developer.

Abstract: A chemically amplified negative resist composition is provided comprising (A) a resin having a crosslinking group, (B) a crosslinker, (C) a photoacid generator capable of generating an acid upon exposure to light of wavelength 190-500 nm, (D) a solvent, and (E) an isocyanuric acid. The resist composition overcomes the stripping problem that the film is stripped from metal wirings of Cu or Al, electrodes, and SiN substrates.

Abstract: A biphenyl derivative having formula (1) is provided wherein Ar1 and Ar2 denote a benzene or naphthalene ring, and x and z each are 0 or 1. A material comprising the biphenyl derivative or a polymer comprising recurring units of the biphenyl derivative is spin coated and heat treated to form a resist bottom layer having improved properties, optimum values of n and k, step coverage, etch resistance, heat resistance, solvent resistance, and minimized outgassing.

Abstract: A thermal crosslinking accelerator of a polysiloxane compound is shown by the following general formula (A-1), wherein R11, R12, R13, and R14 each represents a hydrogen atom, a halogen atom, a linear, a branched, a cyclic alkyl group having 1 to 20 carbon atoms, an optionally substituted aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 20 carbon atoms, wherein some or all of the hydrogen atoms in these groups may be substituted by an alkoxy group. “a”, “b”, “c”, and “d” represent an integer of 0 to 5; in the case that “a”, “b”, “c”, and “d” are 2 or more, R11, R12, R13, and R14 may form a cyclic structure.

Abstract: A rolling bearing assembly includes a rolling bearing which includes a plurality of rolling elements interposed between an inner ring and an outer ring thereof and retained by a cage, the cage being in a sliding contact with a guiding surface provided on an inner periphery of the outer ring and a lubrication device for supplying a lubricant to the rolling bearing. The lubrication device includes an annular groove extending along the inner periphery of the outer ring in adjoining relation with the guiding surface of the outer ring and storing a grease therein and an annular grease reservoir member disposed in proximity to the annular groove and storing a grease therein. The grease stored in the grease reservoir member and the grease stored in the annular groove are interconnected by the grease present between the reservoir and the annular groove.

Abstract: A biphenyl derivative having formula (1) is provided wherein Ar1 and Ar2 denote a benzene or naphthalene ring, and x and z each are 0 or 1. A material comprising the biphenyl derivative or a polymer comprising recurring units of the biphenyl derivative is spin coated and heat treated to form a resist bottom layer having improved properties, optimum values of n and k, step coverage, etch resistance, heat resistance, solvent resistance, and minimized outgassing.

Abstract: The invention provides a rolling bearing assembly adapted to prevent a cage from sustaining burn-out on a guided surface thereof even when a rolling bearing is rotated at high speed, and a method of forming a lubrication device for use in the same. An annular groove 8 for storing a grease G therein is provided in adjoining relation with a guiding surface 7 of an outer ring 2, the guiding surface 7 guiding the rotation of a cage 4. An annular grease reservoir member 30, 40 storing a grease G therein is provided in proximity to the annular groove 8. The grease G stored in the grease reservoir member 30, 40 and the grease G stored in the annular groove 8 are interconnected by means of the grease G present therebetween, so as to supply a base oil contained in the grease G to a space between the guiding surface 7 and a guided surface 6. The grease is packed in an oil groove 33a, 43a of the grease reservoir member 30, 40 and the annular groove 8 of a rolling bearing A.

Abstract: A groove is formed on one end face side of a cage including a plurality of pockets for holding individually rolling elements which extends circumferentially along a full circumference of the cage about a rotational center thereof and has a bottom portion which communicates individually with the plurality of pockets, and a distal end portion of a nozzle of an oil supply unit is inserted into the groove, whereby the generation of disturbance to airflow and negative pressure in the vicinity of an opening of the nozzle is suppressed when a rolling bearing rotates, so that lubricating oil supplied from the nozzle is allowed to reach the rolling elements in an ensured fashion.

Abstract: A groove is formed on one end face side of a cage including a plurality of pockets for holding individually rolling elements which extends circumferentially along a full circumference of the cage about a rotational center thereof and has a bottom portion which communicates individually with the plurality of pockets, and a distal end portion of a nozzle of an oil supply unit is inserted into the groove, whereby the generation of disturbance to airflow and negative pressure in the vicinity of an opening of the nozzle is suppressed when a rolling bearing rotates, so that lubricating oil supplied from the nozzle is allowed to reach the rolling elements in an ensured fashion.

Abstract: In a rolling bearing including a cage arranged in an annular space between an outer ring and an inner ring, a plurality of rolling elements held by the cage, and a solid lubricating agent provided in the cage, the cage has a plurality of rolling element receiving pockets in a circumferential direction, and has recess portions between the rolling element receiving pockets in a circumferential direction, and each of the rolling elements is received in each of the rolling element receiving pockets. The solid lubricating agent is attached to the recess portions in such a manner as to be in a slidable contact with a rolling element raceway surface.

Abstract: In a rolling bearing including a cage arranged in an annular space between an outer ring and an inner ring, a plurality of rolling elements held by the cage, and a solid lubricating agent provided in the cage, the cage has a plurality of rolling element receiving pockets in a circumferential direction, and has recess portions between the rolling element receiving pockets in a circumferential direction, and each of the rolling elements is received in each of the rolling element receiving pockets. The solid lubricating agent is attached to the recess portions in such a manner as to be in a slidable contact with a rolling element raceway surface.