Patents by Inventor Hisaaki Suga

Hisaaki Suga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of gettering unintentional mobile impurities in silicon wafer by using a damaged layer exposed to the reverse surface thereof
    Patent number: 5130260
    Abstract: A method of gettering unintentional mobile impurities starts with production of an damaged portion on the reverse side of a silicon wafer, and the silicon wafer is placed in a high temperature vacuum ambience so that the unintentional mobile impurities are firstly trapped by the damaged portion and, then, evacuated to the high temperature vacuum ambience.
    Type: Grant
    Filed: July 12, 1991
    Date of Patent: July 14, 1992
    Assignees: Mitsubishi Materials Corporation, Nippon Silicon Kabushiki Kaisha
    Inventors: Hisaaki Suga, Yoshinobu Nakada, Kazuhiro Akiyama, Shunji Ishibashi