Abstract: A magnet chuck has a piston assembly including a tube shaped permanent magnet and a core yoke able to move on the interior of a cylinder tube. The permanent magnet is provided on the outer periphery of the core yoke, is magnetized in the radial direction, and a magnetic sensor is attached to the side surface of the cylinder tube.

Abstract: A first diaphragm and a second diaphragm are disposed between a valve element and a body, a diaphragm chamber is formed between the first diaphragm and the second diaphragm, the first diaphragm separates a valve chamber from the diaphragm chamber, and the second diaphragm separates the diaphragm chamber from a back pressure chamber. The diaphragm chamber communicates with an output port, the valve chamber and the back pressure chamber communicate with an input port. A difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in a valve seat.

Abstract: A magnetic chuck has a piston assembly that contains a cylindrical permanent magnet and a core yoke. The piston assembly is movable inside a cylinder tube. The permanent magnet is provided on the outer periphery of the core yoke and is magnetized in the radial direction.

Abstract: A first diaphragm and a second diaphragm are disposed between a valve element and a body, a diaphragm chamber is formed between the first diaphragm and the second diaphragm, the first diaphragm separates a valve chamber from the diaphragm chamber, and the second diaphragm separates the diaphragm chamber from a back pressure chamber. The diaphragm chamber communicates with an output port, the valve chamber and the back pressure chamber communicate with an input port. A difference between an effective pressure receiving area of the first diaphragm and an effective pressure receiving area of the second diaphragm is equivalent to a passage area in a valve seat.

Abstract: A first flow path area at a position where one of multiple openings of a sleeve and one of multiple grooves of a spool overlap with each other is different in size from a second flow path area at a position where another one of the openings of the sleeve and another one of the grooves of the spool overlap with each other. The one opening and the one groove form a flow path for connecting one of one pressure chamber and the other pressure chamber to a fluid supply source, due to displacement of the spool. The other opening and the other groove form a flow path for connecting another one of the other pressure chamber and the one pressure chamber to a fluid discharge port, due to the displacement of the spool.

Abstract: A control method of controlling a chuck device in a drive system for driving the chuck device, comprising opening or closing fingers by opening a switching valve at a first degree of valve opening to supply the fluid to a first cylinder chamber of the chuck device and to discharge the fluid from a second cylinder chamber of the chuck device so that a piston moves in one direction, and stopping the fingers in an intermediate position between a fully open position and a fully closed position by opening the switching valve at a second degree of valve opening to stop supplying the fluid to the first cylinder chamber and to stop discharging the fluid from the second cylinder chamber when the axial position of the piston reaches a target position set in advance while the fingers are being opened or closed.

Abstract: A drive system for driving a chuck device including a piston and a pair of fingers to be opened and closed according to the displacement of the piston, includes a controller, a detection sensor to detect an axial position of the piston, and three-port servo valves to switch a state of supply of the fluid to the chuck device. A degree of valve opening is controllable based on a control signal input from the controller, and an amount of displacement of the piston and an amount of opening and closing of the fingers are controlled by changing the degree of valve opening. One of the 3-port servo valves is connected to a first cylinder chamber of the chuck device, and another of the 3-port servo valves is connected to a second cylinder chamber of the chuck device.

Abstract: A drive system for driving a chuck device includes a controller and a switching valve, which is a 5-port servo valve, switching the state of supply of compressed air to the chuck device based on a valve command signal from the controller. During switching of first and second fingers from a closed position to an open position, when the axial position of a piston reaches a switch point, which is a predetermined distance short of a target position corresponding to a freely selected intermediate position of the first and second fingers, the switching valve is opened at a third opening for a predetermined period and then switched to be opened at a fourth opening so that supply and discharge of compressed air are stopped. As a result, the first and second fingers stop in the intermediate position.

Abstract: A drive device for driving a fluid pressure cylinder has an air supply source which supplies air, a switching valve which switches between the supply and discharge of the air to and from the fluid pressure cylinder, bypass piping which connects the head-side cylinder chamber and rod-side cylinder chamber of the fluid pressure cylinder, and a bypass switching valve which switches between the states of flow of air through the bypass piping. Air in the head-side cylinder chamber is supplied to the rod-side cylinder chamber through the bypass piping by setting the bypass switching valve to an open state in a return stroke of the fluid pressure cylinder.

Abstract: A servo valve has a movable element disposed inside a body, and a drive unit to slide the movable element in the axial direction. A first elastic portion on one end portion side of the body has a first elastic force to press the movable element toward the drive unit connected to another end portion of the body; a second elastic portion on another end portion side of the body has a second elastic force to press the movable element toward the one end portion side of the body. A connecting portion is connected to the second elastic portion, wherein at a neutral position of the movable element, the connecting portion abuts against an inner peripheral surface of the body and against the movable element. An end of one of the first and second elastic portions is fixed directly to the movable element, and an end of the other of the first and second elastic portions is connected to the connecting portion.

Abstract: A drive device for driving a fluid pressure cylinder has an air supply source which supplies air, a switching valve which switches between the supply and discharge of the air to and from the fluid pressure cylinder, bypass piping which connects the head-side cylinder chamber and rod-side cylinder chamber of the fluid pressure cylinder, and a bypass switching valve which switches between the states of flow of air through the bypass piping. Air in the head-side cylinder chamber is supplied to the rod-side cylinder chamber through the bypass piping by setting the bypass switching valve to an open state in a return stroke of the fluid pressure cylinder.

Abstract: A magnet chuck has a piston assembly including a tube shaped permanent magnet and a core yoke able to move on the interior of a cylinder tube. The permanent magnet is provided on the outer periphery of the core yoke, is magnetized in the radial direction, and a magnetic sensor is attached to the side surface of the cylinder tube.

Abstract: A first flow path area at a position where one of multiple openings of a sleeve and one of multiple grooves of a spool overlap with each other is different in size from a second flow path area at a position where another one of the openings of the sleeve and another one of the grooves of the spool overlap with each other. The one opening and the one groove form a flow path for connecting one of one pressure chamber and the other pressure chamber to a fluid supply source, due to displacement of the spool. The other opening and the other groove form a flow path for connecting another one of the other pressure chamber and the one pressure chamber to a fluid discharge port, due to the displacement of the spool.

Abstract: A magnetic chuck has a piston assembly that contains a cylindrical permanent magnet and a core yoke. The piston assembly is movable inside a cylinder tube. The permanent magnet is provided on the outer periphery of the core yoke and is magnetized in the radial direction.

Abstract: A drive system for driving a chuck device includes a controller and a switching valve, which is a 5-port servo valve, switching the state of supply of compressed air to the chuck device based on a valve command signal from the controller. During switching of first and second fingers from a closed position to an open position, when the axial position of a piston reaches a switch point, which is a predetermined distance short of a target position corresponding to a freely selected intermediate position of the first and second fingers, the switching valve is opened at a third opening for a predetermined period and then switched to be opened at a fourth opening so that supply and discharge of compressed air are stopped. As a result, the first and second fingers stop in the intermediate position.

Abstract: A servo valve is provided with a first elastic portion, a second elastic portion, and a connecting portion. The first elastic portion extends in an X direction inside a valve body and has a first elastic force exerted on a movable element toward an X2 direction. The second elastic portion extends in the X direction inside the valve body and has a second elastic force exerted on the movable element toward an X1 direction. The connecting portion is connected to the first elastic portion and the second elastic portion inside the valve body, and is in abutment against a step portion of the valve body and a spool of the movable element at a neutral position of the movable element.

Abstract: A servo valve is provided with a first elastic portion, a second elastic portion, and a connecting portion. The first elastic portion extends in an X direction inside a valve body and has a first elastic force exerted on a movable element toward an X2 direction. The second elastic portion extends in the X direction inside the valve body and has a second elastic force exerted on the movable element toward an X1 direction. The connecting portion is connected to the first elastic portion and the second elastic portion inside the valve body, and is in abutment against a step portion of the valve body and a spool of the movable element at a neutral position of the movable element.

Abstract: A servo valve is provided with a first elastic portion, a second elastic portion, and a connecting portion. The first elastic portion extends in an X direction inside a valve body and has a first elastic force exerted on a movable element toward an X2 direction. The second elastic portion extends in the X direction inside the valve body and has a second elastic force exerted on the movable element toward an X1 direction. The connecting portion is connected to the first elastic portion and the second elastic portion inside the valve body, and is in abutment against a step portion of the valve body and a spool of the movable element at a neutral position of the movable element.

Abstract: A magnet chuck includes a piston that is displaced inside a second sliding hole of a cylinder tube. One end surface of the piston abuts against a plate member when the piston reaches one displacement end point, whereas another end surface of the piston abuts against an entry member of a head cover when the piston reaches another displacement end point. At least one, and preferably both, of a first damper on the one end surface, and the second damper on the other end surface are disposed on the plate member.

Abstract: A magnet chuck includes, for example, four permanent magnets of a first permanent magnet through a fourth permanent magnet, serving as an attracting and retaining member for attracting and retaining a workpiece. In the first permanent magnet and the third permanent magnet, the magnetic polarity of a workpiece magnetic attracting surface facing the workpiece is of an N-polarity. On the other hand, in the second permanent magnet and the fourth permanent magnet, the magnetic polarity of a workpiece magnetic attracting surface is of an S-polarity. More specifically, in this case, combinations of the N-pole and the S-pole on the workpiece magnet attracting surface are formed in two pairs, and the N-pole and the S-pole, which are of different polarities, are adjacent to one another.