Abstract: A dustproof seal structure includes a rotor assembly and a stator assembly rotatably supporting the rotor assembly. The stator assembly forms a horizontal thrust aerostatic bearing between a lower surface of the thrust plate and an upper surface of the stator assembly when compressed air is supplied between the lower surface of the thrust plate and the upper surface of the stator assembly. The thrust plate and the stator assembly form a sealing portion through which the compressed air flows. The sealing portion includes an inclined flow path whose height increases from an outer peripheral surface of the thrust plate toward the inside in a radial direction.

Abstract: A measurement X-ray CT apparatus calibrates a geometrical positional relationship between a focus of an X-ray source, an X-ray detector, and a rotation center of a rotating table in advance. The measurement X-ray CT apparatus then obtains projection images by irradiating the object to be measured with X-rays to perform a CT scan, and generates a three-dimensional image of the object to be measured by CT reconstruction of the projection images. The measurement X-ray CT apparatus further includes a reference frame that is made of a material and has a structure less susceptible to environmental changes, and sensors that are located on the reference frame and intended to successively obtain calibration values of the geometrical positional relationship between the focus of the X-ray source and the X-ray detector during the CT scan. The calibration values are used as parameters of the CT reconstruction.

Abstract: A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.

Abstract: A rotary table apparatus includes: a table part having a placement surface; a support part having a guide surface facing an opposing surface which is on an opposite side of the placement surface of the table part; an air film forming part that forms an air film by supplying compressed air between the guide surface and the opposing surface; a negative pressure generating part that sucks air between the guide surface and the opposing surface; a discharge part formed with a discharge port; and an opening adjusting part that adjust the size of an opening area of the discharge port in accordance with the size of a compressed air pressure corresponding to a load applied to the table part.

Abstract: An air bearing includes: a main body part having a bearing surface facing a guide surface; a flow path part provided in the main body part; an air film forming part that supplies compressed air flowing through the flow path part to the guide surface to form an air film; a negative pressure generating part that sucks air between the bearing surface and the guide surface, the negative pressure generating part being provided in the flow path part; a discharge path in communication with the flow path part; and a flow rate adjusting part that adjusts a flow rate of air flowing from the flow path part to the discharge path in accordance with a compressed air pressure corresponding to a load applied to the main body part.

Abstract: A measurement X-ray CT apparatus calibrates a geometrical positional relationship between a focus of an X-ray source, an X-ray detector, and a rotation center of a rotating table in advance. The measurement X-ray CT apparatus then obtains projection images by irradiating the object to be measured with X-rays to perform a CT scan, and generates a three-dimensional image of the object to be measured by CT reconstruction of the projection images. The measurement X-ray CT apparatus further includes a reference frame that is made of a material and has a structure less susceptible to environmental changes, and sensors that are located on the reference frame and intended to successively obtain calibration values of the geometrical positional relationship between the focus of the X-ray source and the X-ray detector during the CT scan. The calibration values are used as parameters of the CT reconstruction.

Abstract: An air bearing includes: a main body part having a bearing surface facing a guide surface; a flow path part provided in the main body part; an air film forming part that supplies compressed air flowing through the flow path part to the guide surface to form an air film; a negative pressure generating part that sucks air between the bearing surface and the guide surface, the negative pressure generating part being provided in the flow path part; a discharge path in communication with the flow path part; and a flow rate adjusting part that adjusts a flow rate of air flowing from the flow path part to the discharge path in accordance with a compressed air pressure corresponding to a load applied to the main body part.

Abstract: A rotary table apparatus includes: a table part having a placement surface; a support part having a guide surface facing an opposing surface which is on an opposite side of the placement surface of the table part; an air film forming part that forms an air film by supplying compressed air between the guide surface and the opposing surface; a negative pressure generating part that sucks air between the guide surface and the opposing surface; a discharge part formed with a discharge port; and an opening adjusting part that adjust the size of an opening area of the discharge port in accordance with the size of a compressed air pressure corresponding to a load applied to the table part.

Abstract: A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.

Abstract: A probe head of a three-dimensional coordinate measuring device according to an embodiment of the present invention includes a measurer, a first and second diaphragm, a first oscillator, and a second oscillator. The measurer extends in a first direction. The first and second diaphragms are provided at two different positions on the measurer, at a first position and a second position, respectively, and support the measurer such that the measurer is capable of displacement in a first direction. The first oscillator causes the measurer to oscillate along the first direction. The second oscillator causes a predetermined portion of the measurer between the first and second diaphragms to oscillate along each of a second direction orthogonal to the first direction, and a third direction orthogonal to both the first and second directions.

Abstract: The air bearing includes a main body part having a bearing surface opposed to a guide face, first and second flow path parts, which are provided in the main body part, for allowing compressed air supplied from outside to flow, an air supply hole, which is provided in the flow path part, for supplying compressed air to the guide face to form an air film between the bearing surface and the guide face, and a negative pressure generating part, which is provided in the second flow path part intersecting with the first flow path part, for generating a negative pressure for sucking air between the guide face and the main body part by increasing the flow velocity of the compressed air.

Abstract: The air bearing includes a main body part having a bearing surface opposed to a guide face, first and second flow path parts, which are provided in the main body part, for allowing compressed air supplied from outside to flow, an air supply hole, which is provided in the flow path part, for supplying compressed air to the guide face to form an air film between the bearing surface and the guide face, and a negative pressure generating part, which is provided in the second flow path part intersecting with the first flow path part, for generating a negative pressure for sucking air between the guide face and the main body part by increasing the flow velocity of the compressed air.

Abstract: A method of placing a work piece on a measuring device in which a work piece is placed on a table of a measuring device is provided. The method includes: using a retainer capable of holding the work piece above the table and a lifting/lowering device lifting and lowering a top surface of the table; holding the work piece above the table with the retainer; lifting the top surface of the table with the lifting/lowering device to bring the top surface of the table into contact with a bottom surface of the work piece; and, after a load of the work piece is borne by the table, releasing the hold of the retainer on the work piece.

Abstract: A probe head of a three-dimensional coordinate measuring device according to an embodiment of the present invention includes a measurer, a first and second diaphragm, a first oscillator, and a second oscillator. The measurer extends in a first direction. The first and second diaphragms are provided at two different positions on the measurer, at a first position and a second position, respectively, and support the measurer such that the measurer is capable of displacement in a first direction. The first oscillator causes the measurer to oscillate along the first direction. The second oscillator causes a predetermined portion of the measurer between the first and second diaphragms to oscillate along each of a second direction orthogonal to the first direction, and a third direction orthogonal to both the first and second directions.

Abstract: An industrial machine includes a moving mechanism moving one of a probe and a tool relative to a work piece, using three displacement axes parallel to each of three orthogonal axis directions; a low thermal expansion member formed with a material having a smaller thermal expansion coefficient than a material forming a structural element of the moving mechanism; and an expansion/contraction measurer measuring, using the low thermal expansion member as a reference, an amount of expansion/contraction of the structural element in one of the three orthogonal axis directions, the expansion/contraction occurring due to a change in temperature.

Abstract: A method of placing a work piece on a measuring device in which a work piece is placed on a table of a measuring device is provided. The method includes: using a retainer capable of holding the work piece above the table and a lifting/lowering device lifting and lowering a top surface of the table; holding the work piece above the table with the retainer; lifting the top surface of the table with the lifting/lowering device to bring the top surface of the table into contact with a bottom surface of the work piece; and, after a load of the work piece is borne by the table, releasing the hold of the retainer on the work piece.

Abstract: A slide guide device includes: a guide body having a reference guide surface and a sub guide surface that are parallel to each other; a slider having a reference slide pad adapted to slide on the reference guide surface and a sub slide pad adapted to slide on the sub guide surface, the slider being adapted to be driven by a drive unit to move along the guide body. The sub slide pad includes a slide surface (sub slide surface) slidable on the sub guide surface and an air pocket that receives a load in a manner non-contact with the sub guide surface.

Abstract: A rotation transmitter includes: a first member, an intermediate member and a second member that are arranged coaxially with a rotation axis. The first member is formed with a first bearing surface along the rotation axis and a first direction. The second member is formed with a second bearing surface along the rotation axis and a second direction. The intermediate member is formed with a first middle bearing surface facing the first bearing surface and formed with a second middle bearing surface facing the second bearing surface. A static-pressure air bearing is formed between the bearing surface and the middle bearing surface. The rotation transmitter further includes: a preload device that biases the bearing surface and the middle bearing surface in a direction approaching each other.

Abstract: A precision feeding device that drives a table supported by a base in a predetermined moving direction includes: a rod connected to the table; a drive mechanism that drives to move the rod forward and backward in the moving direction; and a laser interferometer that detects a displacement of the rod relative to the base. The drive mechanism includes a linear motor that symmetrically applies a drive force on the rod relative to an axis in the moving direction. A laser path of the laser interferometer passes through the rod and extends in the moving direction, so that a moving axis of the rod, a thrust axis of the drive mechanism and a detection axis of the laser interferometer are aligned.

Abstract: An industrial machine includes a moving mechanism moving one of a probe and a tool relative to a work piece, using three displacement axes parallel to each of three orthogonal axis directions; a low thermal expansion member formed with a material having a smaller thermal expansion coefficient than a material forming a structural element of the moving mechanism; and an expansion/contraction measurer measuring, using the low thermal expansion member as a reference, an amount of expansion/contraction of the structural element in one of the three orthogonal axis directions, the expansion/contraction occurring due to a change in temperature.