Abstract: A target debris collection device for extreme ultraviolet (EUV) light source apparatus, includes a baffle body extending within an EUV vessel between a collector and an outlet port of the EUV vessel to allow EUV light reflected from the collector to pass through an internal transmissive region thereof, a discharge plate provided in a first end portion of the baffle body adjacent to the collector to collect the target material debris on an inner surface of the baffle body, a guide structure to guide the target material debris collected in the discharge plate to a collection tank, and a first heating member provided in the guide structure to prevent the target material debris from being solidified.

Abstract: A memory device includes a substrate, a first cell string, second cell string, and third cell string, each connected to a first bit line and formed in a direction perpendicular to a top surface of the substrate, a first upper ground selection line connected to the first cell string, a second upper ground selection line separated from the first upper ground selection line and connected to the second and third cell strings, a first lower ground selection line connected to the first and second cell strings, and a second lower ground selection line separated from the first lower ground selection line and connected to the third cell string.

Abstract: A sterilization module including a main body, a circuit board disposed in the main body, a light source disposed on the circuit board to emit sterilizing light, and a transparent unit to protect the light source from an outside and including a material that transmits the sterilizing light, in which the light source includes a mesa including a first semiconductor layer, an active layer, and a second semiconductor layer, a first electrode electrically connected to the first semiconductor layer, and a second electrode disposed on the second semiconductor layer and electrically connected to the second semiconductor layer, in which the first electrode includes a first contact region disposed on the outer area of the first semiconductor layer and a second contact region at least partially surrounded by the mesa, and a distance between the transparent unit and the circuit board is greater than a height of the light source.

Abstract: An organic light-emitting diode display may have thin-film transistor circuitry formed on a substrate. The display and substrate may have rounded corners. A pixel definition layer may be formed on the thin-film transistor circuitry. Openings in the pixel definition layer may be provided with emissive material overlapping respective anodes for organic light-emitting diodes. A cathode layer may cover the array of pixels. A ground power supply path may be used to distribute a ground voltage to the cathode layer. The ground power supply path may be formed from a metal layer that is shorted to the cathode layer using portions of a metal layer that forms anodes for the diodes, may be formed from a mesh shaped metal pattern, may have L-shaped path segments, may include laser-deposited metal on the cathode layer, and may have other structures that facilitate distribution of the ground power supply.

Abstract: A nonvolatile memory device may include a plurality of memory planes and a plurality of plane-dedicated pad sets. The plurality of memory planes may include a plurality of memory cell arrays including nonvolatile memory cells and a plurality of page buffer circuits. Each of the plurality of page buffer circuits may be connected to ones of the nonvolatile memory cells included in each of the plurality of memory cell arrays through bitlines. A plurality of plane-dedicated pad sets may be connected to the plurality of page buffer circuits through a plurality of data paths respectively such that each of the plurality plane-dedicated pad sets is dedicatedly connected to each of the plurality of page buffer circuits. A bandwidth of a data transfer may be increased by reducing a data transfer delay and supporting a parallel data transfer, and power consumption may be decreased by removing data multiplexing and/or signal routing.

Abstract: Disclosed are systems and methods using artificial intelligence for the detection and characterization of liver cancers.

Abstract: An opening/closing module according to the present invention comprises a middle door part having a curved shape that is located at an entrance of a sterilization module to separate, from the outside, the sterilization module that provides a sterilization space for accommodating a hand truck, and selectively opens/closes the entrance of the sterilization module by including a sliding part.

Abstract: Generating models usable by data appliances to perform inline malware analysis is disclosed. A set of features, including a plurality of n-grams, extracted from a set of files is received. A reduced set of features is determined that includes at least some of the plurality of n-grams. The reduced set of features is used to generate a model usable by a data appliance to perform inline malware analysis.

Abstract: A sterilizer according to the present invention comprises: a temperature-raising module for heating a carriage introduced thereinto; a sterilization module for sterilizing the carriage transferred from the temperature-raising module; a cooling module for cooling the carriage transferred from the sterilization module; and an opening-closing module connected to the temperature-raising module, the sterilization module, or the cooling module, to selectively open or close at least one module, and the sterilizer independently heat-treats a space separated by the opening-closing module.

Abstract: Methods of forming memory devices are described. Some embodiments of the disclosure utilize a low temperature anneal process to reduce bottom voids and seams in low melting point, low resistance metal buried word lines. Some embodiments of the disclosure utilize a high density dielectric cap during a high temperature anneal process to reduce bottom voids in buried word lines.

Abstract: A cloud-based traffic classification engine maintains a catalog of application-based traffic classes which have been developed based on known applications, and a local traffic classification engine maintains a subset of these classes. Network traffic intercepted by the firewall which cannot be classified by the local engine is forwarded to the cloud-based engine for classification. Upon determination of a class of the traffic, the cloud-based engine forwards the determined class and corresponding signature to the local engine. The firewall maintains a cache which is updated with the signatures corresponding to the class communicated by the cloud-based engine. Subsequent network traffic sent from the application can be determined to correspond to the application and classified according locally at the firewall based on the cached signatures. Localization of the cache to the firewall reduces latency of traffic classification operations as the catalog of classification information stored in the cloud scales.

Abstract: Techniques for outbound/inbound lateral traffic punting based upon process risk are disclosed. In some embodiments, a system/process/computer program product for outbound/inbound lateral traffic punting based upon process risk includes receiving, at a network device on an enterprise network, process identification (ID) information from an endpoint (EP) agent executed on an EP device, in which the process ID information identifies a process that is associated with an outbound or inbound network session on the EP device on the enterprise network, and the EP agent selected the network session for punting to the network device for inspection; monitoring network communications associated with the network session at the network device to identify an application identification (APP ID) for the network session; and performing an action based on a security policy using the process ID information and the APP ID.

Abstract: A sterilization module according to the present invention comprises: a sterilization housing that has an inner space capable of accommodating a cart; a sterilization heat treatment machine for heat-treating the cart accommodated in the inner space of the sterilization; a connection part that is provided in the inner space of the sterilization housing and moves the cart forward; and a rotation part that rotates the cart with respect to a cart rotary shaft, which is a predetermined rotary shaft, while gripping the cart.

Abstract: A semiconductor device includes; a first transistor on a substrate and including a first gate electrode, a second transistor on the substrate and including a second gate electrode adjacent to the first gate electrode, an electrode structure including electrodes vertically stacked on the first and second transistors and including first and second pads adjacent to in the first direction, first and second landing pads between the substrate and the electrode structure connected respectively to the first and second landing pads, a first penetration electrode penetrating the electrode structure to connect the first landing pad and the first pad, a second penetration electrode penetrating the electrode structure to connect the second landing pad and the second pad, and lower interconnection lines between the first landing pad and the second landing pad and extending in a second direction substantially perpendicular to the first direction.

Abstract: A target debris collection device for extreme ultraviolet (EUV) light source apparatus, includes a baffle body extending within an EUV vessel between a collector and an outlet port of the EUV vessel to allow EUV light reflected from the collector to pass through an internal transmissive region thereof, a discharge plate provided in a first end portion of the baffle body adjacent to the collector to collect the target material debris on an inner surface of the baffle body, a guide structure to guide the target material debris collected in the discharge plate to a collection tank, and a first heating member provided in the guide structure to prevent the target material debris from being solidified.

Abstract: An apparatus for outputting a sound source for minimizing power consumption and an operating method thereof are disclosed. The sound source output method includes a terminal detecting step of detecting connection and a type of a terminal; a power control processing step of generating a power control signal so as to correspond to an audio transmitting method according to the detected terminal type and controlling a power supply operation to a conversion processing unit and an amplification processing unit connected to a power source unit including at least one power block based on the power control signal; an audio signal generating step of generating at least one audio signal by performing signal converting and amplifying operations based on the power supplied based on the power supply operation; and an audio outputting step of outputting a final audio signal generated using audio signals according to the audio transmitting method.

Abstract: A part is adapted to be used in a semiconductor processing equipment. The part includes a substrate and a protective coating. The protective coating covers at least a part of the substrate, is made of silicon carbide, and has an atomic ratio of carbon in the protective coating increases in a direction away from the substrate while an atomic ratio of silicon in the protective coating decreases in the direction. The atomic ratio of silicon in the protective coating is larger than that of the carbon near the substrate, and the atomic ratio of silicon in the protective coating is smaller than that of carbon near the outer surface of the protective coating. A method for making the part is also provided.

Abstract: The present disclosure relates to a wear resistant steel material that is not cracked even after being cut using gas, etc., and a method of manufacturing the wear resistant steel material.

Abstract: A sterilization module including a main body including an ultraviolet outlet, a transparent member disposed on the ultraviolet outlet to transmit ultraviolet light, and a light source unit irradiating ultraviolet light toward the transparent member, and a sealing member, in which the light source unit includes a circuit board and a light emitting diode chip mounted thereon and including an epitaxial substrate, a conductive semiconductor layer electrically connected to the circuit board directly by an electrode, ultraviolet light is c irradiated toward the transparent member by passing through the epitaxial substrate, the sealing member is disposed between the transparent member and the circuit board, and a distance between the transparent member and the circuit board spaced apart from each other by the sealing member is greater than a height of the light emitting diode chip.

Abstract: Disclosed is a method of analyzing a programmable logic controller (PLC) logic to detect whether an anomaly that deviates from a standard pattern occurs in a repeated cycle. After modeling and patterning an operation pattern of automation equipment and processes with a graph, an anomaly detecting model capable of detecting whether a pattern is abnormal may be constructed as a graph AutoEncoder model. By detecting the change in the process pattern, it is possible to early detect the anomaly of the equipment and processes.