Abstract: A semiconductor device includes a substrate having cell array and extension regions, a gate electrode structure having gate electrodes stacked in a first direction, a channel through the gate electrode structure on the cell array region, a first division pattern extending in the second direction on the cell array and extension regions, the first division pattern being at opposite sides of the gate electrode structure in a third direction, an insulation pattern structure partially through the gate electrode structure on the extension region, a through via through the insulation pattern structure, and a support layer on the gate electrode structure and extending on the cell array and extension regions, the support layer contacting an upper sidewall of the first division pattern, and the support layer not contacting an upper surface of a portion of the first division pattern on the extension region adjacent to the insulation pattern structure.

Abstract: A semiconductor device includes a substrate having cell array and extension regions, a gate electrode structure having gate electrodes stacked in a first direction, a channel through the gate electrode structure on the cell array region, a first division pattern extending in the second direction on the cell array and extension regions, the first division pattern being at opposite sides of the gate electrode structure in a third direction, an insulation pattern structure partially through the gate electrode structure on the extension region, a through via through the insulation pattern structure, and a support layer on the gate electrode structure and extending on the cell array and extension regions, the support layer contacting an upper sidewall of the first division pattern, and the support layer not contacting an upper surface of a portion of the first division pattern on the extension region adjacent to the insulation pattern structure.

Abstract: A vertical memory device includes a gate electrode structure formed on a substrate including a cell array region and a pad region, a channel, contact plugs, and support structures. The gate electrode structure includes gate electrodes extending in a second direction and stacked in a staircase shape in a first direction on the pad region. The channel extends through the gate electrode structure on the cell array region. The contact plugs contact corresponding ones of steps, respectively, of the gate electrode structure. The support structures extend through the corresponding ones of the steps, respectively, and extend in the first direction on the pad region. The support structure includes a filling pattern and an etch stop pattern covering a sidewall and a bottom surface thereof. An upper surface of each of the support structures is higher than that of the channel.