Abstract: The present invention provides octave-spanning optical frequency combs. The octave-spanning optical frequency combs employ microresonators having improved stability using a smaller form factor. In some embodiments, the octave-spanning optical frequency combs are fabricated using aluminum nitride (AlN). AlN is a more robust Kerr material for generating octave-spanning soliton comb (e.g., 1.5 octaves or more).

Abstract: The present invention provides a device and system for high-efficiency and low-noise detection of single photons within the visible and infrared spectrum. In certain embodiments, the device of the invention can be integrated within photonic circuits to provide on-chip photon detection. The device comprises a traveling wave design comprising a waveguide layer and a superconducting nanowire atop of the waveguide.

Abstract: Devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters.

Abstract: The present invention provides a device and system for high-efficiency and low-noise detection of single photons within the visible and infrared spectrum. In certain embodiments, the device of the invention can be integrated within photonic circuits to provide on-chip photon detection. The device comprises a traveling wave design comprising a waveguide layer and a superconducting nanowire atop of the waveguide.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

Abstract: An embodiment of the invention provides a neural probe containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.

Abstract: The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

Abstract: The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.

Abstract: Devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: A biosensor is comprised of a free and a biofunctionalized recognition self-sensing nanocantilever, a dock adjacent to the ends of the nanocantilevers, and a gap between the nanocantilevers and dock. The self-sensing cantilevers each include a semiconductor piezoresistor defined in a pair of legs about which the cantilevers flex. A bias power or current is applied to the piezoresistor. The sensitivity of the cantilevers is optimized for a given ambient temperature and geometry of the cantilevers and dock by minimizing the force spectral density, SF, of the cantilevers to determine the optimum bias power, Pin. A sub-aN/?Hz force sensitivity is obtained by scaling down the dimensions of the cantilevers and supplying an optimum bias power as a function of temperature and geometry.

Abstract: The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.

Abstract: Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

Abstract: The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Abstract: Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Abstract: An embodiment of the invention provides a neural probe (100) containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.