Abstract: A display apparatus manufacturing apparatus includes: a laser emitter for emitting a laser having dispersion in a short-axis direction greater than dispersion in a long-axis direction, and a laser converter for converting the laser into a converted laser having dispersion in the long-axis direction greater than dispersion in the short-axis direction.

Abstract: A display device manufacturing method includes annealing a display substrate by irradiating a laser to the display substrate in different energy values, measuring a transmittance of the annealed display substrate, and determining an optimal crystallization value of the display substrate based on the transmittance, wherein the determining of the optimal crystallization value includes calculating an absorbance of the display substrate for each energy value of the laser based on the transmittance, calculating a band gap energy of the annealed display substrate for each energy value of the laser based on the absorbance, and determining an energy value of the laser corresponding to a minimum value of the band gap energy as the optimal crystallization value. Also provided is a display device manufacturing apparatus that may implement the manufacturing method.

Abstract: A vacuum apparatus includes a vacuum chamber, first sensor units disposed in the vacuum chamber facing a deposition direction of particles, and second sensor units disposed in the vacuum chamber, each disposed on a corresponding first sensor of the first sensor units facing the deposition direction, wherein the first sensor units are configured to sense a pressure in the vacuum chamber and an absorption amount of the particles adsorbed to the first sensor units, and the second sensor units are configured to sense the pressure in the vacuum chamber.

Abstract: A vacuum apparatus includes a vacuum chamber, first sensor units disposed in the vacuum chamber facing a deposition direction of particles, and second sensor units disposed in the vacuum chamber, each disposed on a corresponding first sensor of the first sensor units facing the deposition direction, wherein the first sensor units are configured to sense a pressure in the vacuum chamber and an absorption amount of the particles adsorbed to the first sensor units, and the second sensor units are configured to sense the pressure in the vacuum chamber.