Abstract: The present disclosure relates to methods, to an apparatus and to a computer program for processing of a lithography object. More particularly, the present invention relates to a method for removing a material, to a corresponding apparatus and to a method for lithographic processing of a wafer, and to a computer program for performing the methods. A method for processing a lithography object comprises, for example: providing a first gas comprising first molecules; providing a particle beam in a working region of the object for removal of a first material in the working region based at least partly on the first gas, wherein the first material comprises ruthenium.

Abstract: Method for the particle beam-induced etching of a lithography mask, more particularly a non-transmissive EUV lithography mask, having the steps of: a) providing the lithography mask in a process atmosphere, b) beaming a focused particle beam onto a target position on the lithography mask, c) supplying at least one first gaseous component to the target position in the process atmosphere, where the first gaseous component can be converted by activation into a reactive form, where the reactive form reacts with a material of the lithography mask to form a volatile compound, and d) supplying at least one second gaseous component to the target position in the process atmosphere, where the second gaseous component under predetermined process conditions with exposure to the particle beam forms a deposit comprising a compound of silicon with oxygen, nitrogen and/or carbon.

Abstract: The present application relates to a method for permanently repairing defects of absent material of a photolithographic mask, comprising the following steps: (a) providing at least one carbon-containing precursor gas and at least one oxidizing agent at a location to be repaired of the photolithographic mask; (b) initiating a reaction of the at least one carbon-containing precursor gas with the aid of at least one energy source at the location of absent material in order to deposit material at the location of absent material, wherein the deposited material comprises at least one reaction product of the reacted at least one carbon-containing precursor gas; and (c) controlling a gas volumetric flow rate of the at least one oxidizing agent in order to minimize a carbon proportion of the deposited material.

Abstract: The present application relates to a method for permanently repairing defects of absent material of a photolithographic mask, comprising the following steps: (a) providing at least one carbon-containing precursor gas and at least one oxidizing agent at a location to be repaired of the photolithographic mask; (b) initiating a reaction of the at least one carbon-containing precursor gas with the aid of at least one energy source at the location of absent material in order to deposit material at the location of absent material, wherein the deposited material comprises at least one reaction product of the reacted at least one carbon-containing precursor gas; and (c) controlling a gas volumetric flow rate of the at least one oxidizing agent in order to minimize a carbon proportion of the deposited material.

Abstract: The present application relates to a method for permanently repairing defects of absent material of a photolithographic mask, comprising the following steps: (a) providing at least one carbon-containing precursor gas and at least one oxidizing agent at a location to be repaired of the photolithographic mask; (b) initiating a reaction of the at least one carbon-containing precursor gas with the aid of at least one energy source at the location of absent material in order to deposit material at the location of absent material, wherein the deposited material comprises at least one reaction product of the reacted at least one carbon-containing precursor gas; and (c) controlling a gas volumetric flow rate of the at least one oxidizing agent in order to minimize a carbon proportion of the deposited material.

Abstract: The present application relates to a method for permanently repairing defects of absent material of a photolithographic mask, comprising the following steps: (a) providing at least one carbon-containing precursor gas and at least one oxidizing agent at a location to be repaired of the photolithographic mask; (b) initiating a reaction of the at least one carbon-containing precursor gas with the aid of at least one energy source at the location of absent material in order to deposit material at the location of absent material, wherein the deposited material comprises at least one reaction product of the reacted at least one carbon-containing precursor gas; and (c) controlling a gas volumetric flow rate of the at least one oxidizing agent in order to minimize a carbon proportion of the deposited material.

Abstract: An electrical room housing electrical and electronic apparatus for operating and controlling electrical motors of an industrial equipment is disclosed. The electrical room includes a cooling device with a first heat exchanger which is arranged with a first set of channels through which is conducted a first flow of air drawn from inside the electrical room. Warm air from inside the electrical room is circulated through the first heat exchanger of the cooling device and returned to the electrical room in a closed loop, and the air temperature in the electrical room is controlled dependent on a setpoint of between 24-40° C. A method for controlling the cooling device to cool the electrical room and one or more computer programs arranged for controlling the cooling device are also described.

Abstract: An electrical room housing electrical and electronic apparatus for operating and controlling electrical motors of an industrial equipment is disclosed. The electrical room includes a cooling device with a first heat exchanger which is arranged with a first set of channels through which is conducted a first flow of air drawn from inside the electrical room. Warm air from inside the electrical room is circulated through the first heat exchanger of the cooling device and returned to the electrical room in a closed loop, and the air temperature in the electrical room is controlled dependent on a setpoint of between 24-40° C. A method for controlling the cooling device to cool the electrical room and one or more computer programs arranged for controlling the cooling device are also described.

Abstract: The invention concerns a device for die-cutting a stack of sheet-like materials, particularly labels, whereby the stack is pressed into the die-cutter blade by a relative movement of a punching ram and a hollow cylindrical die-cutter blade. For a device such as this, it is proposed that the die-cutter blade 18 is adjustably held in a frame 16, and the frame 16 is accommodated by a receiving apparatus 13 which is mounted in a punch platen 12 and is adjustable relative to it, whereby the frame 16 can be slid in a plane parallel to the punch platen 12, in particular is adjustable in the direction of two major axes that are essentially arranged perpendicular to one another, and can also be tilted out of the plane. Such a device allows for precise orientation of the die-cutter blade relative to the stack to be punched.

Abstract: A method for sealing the cut edges which result when filter material is cut from a zigzag-shaped starting material is provided. The filter material area situated within an outer casing is at least partly interspersed with fine particles which are present therein in an unbound state. A cutter blade separates the filter material, which during the cutting process rests against an anvil, by exerting pressure which acts approximately perpendicularly on the material to be separated. According to the method, the severance cut takes place in an area which shortly prior to carrying out the severance cut has been impregnated with a liquid which is solidifiable under pressure.

Abstract: The invention relates to a device for die cutting a stack consisting of sheet-type materials, in particular labels. According to said method, a movement of a stack to be cut in relation to a hollow cylindrical be pushed into said die-cutter blade. This type of device is characterized in that the die-cutter blade (18) is adjustably mounted in a frame (16), which can be inserted in a holding device (13) perpendicularly to the relative displacement direction (K) of the stacks to be cut (7) and die-cutter blades (18), and can be fixed in a central position. The holding device (13) is mounted in a die-cutter head plate (12), in such a way that it can be adjusted in relation to the latter. A die-cutter device of this type has an extremely compact construction, as a result of the positioning and mounting of the die-cutter blade in the direction of the relative movement of the stack to be cut and the die-cutter blade.

Abstract: The invention relates to a method for linking a first plastic component (6) with a second plastic component (9). According to the inventive method, the first component (6) is introduced into an injection mold with at least one connecting section (12) at which the link with the second component (9) is to be established. The second component (9) is formed by injection-molding plastic material onto the connecting section. A surface of the connecting section (12) is at least partially covered by the plastic material of the second component (9). At least one of the components may consist of a plastic material that requires only a relatively narrow temperature range to be moldable in the molten state. At least one binder body is formed at the surface intended to be covered by the injection-molded plastic material which binder is firmly linked with the surface. Said binder melts when contacted with the heat energy of the injection-molded plastic material and fuses with the injection-molded plastic.

Abstract: The invention concerns a device for die-cutting a stack of sheet-like materials, particularly labels, whereby the stack is pressed into the die-cutter blade by a relative movement of a punching ram and a hollow cylindrical die-cutter blade.

Abstract: The invention concerns a device for die-cutting a stack of sheet-like materials, particularly labels, whereby the stack is pressed into the die-cutter blade by a relative movement of a punching ram and a hollow cylindrical die-cutter blade. For such a device, it is proposed that the stack (8) to be punched be positioned between a limiting element (88) and a moveable slide-in unit 21 is positioned against a stop (89), and the limiting element (88) and the stop (89) are moveable. This type of construction of the die-cutting device ensures an optimal positioning of the stack in area of the pinching ram, independent of varying stack sizes.

Abstract: A filter body of an air filter, comprising a cylindrical filter member with an end disk on at least one axial end. This end disk comprises a radially effective seal which is arranged radially in relation to the arrangement on a sealing surface when the filter body is mounted in a filter housing. This end disk also comprises a supporting section which extends, relative to the filter member, in a ring shaped manner on the axially outer side of the end disk. This supporting section is designed to be axially elastic. When the filter body is mounted in a filter housing, this supporting section is supported by a support contour formed on the filter housing and extending parallel to the end disk. In this case, the filter body can be axially positioned in the filter housing.

Abstract: The invention concerns a device for die-cutting a stack of sheet-like materials, particularly labels, whereby the stack is pressed into the die-cutter blade by a relative movement of a punching ram and a hollow cylindrical die-cutter blade.

Abstract: Proposed is a method for sealing the cut edges which result when filter material is cut from web shaped starting material, in which method

Abstract: A process for forming small stacks from an initial stack of sheet material by cutting includes providing a single guillotine cutter machine which comprises a rear table part for receiving the material to be cut and a front table part for receiving the cut material, separating the initial stack into partial stacks by a plurality of cuts in a first direction perpendicular to a direction of feed thereof, and pushing back and rotating 90° at least a portion of the partial stacks from the front table part onto the rear table part for further cutting. The process also includes installing a first movable guide plate above the front table part, placing the partial stacks such that the partial stacks abut the guide plate, and cutting the partial stacks to produce small stacks.

Abstract: A ring-shaped filter element through which material can flow radially. Web material as is provided filter material which is folded in a zigzag shape and sealingly connected at its longitudinal sides relative to a ring-shaped end plate. The end plate is formed of a first area made of a first material, and extends peripherally and not covering a radial inner and/or outer edge area. A second area forms this edge area and is designed for a seal-tight placement onto a connecting part, of a second material. The ring-shaped filter element contains a second area having a second material which is foamed simultaneously onto the web material of the first material already connected fixedly with the web material.

Abstract: The invention describes a plastic embodiment for a suction system, whereby various configurations of said embodiment can be produced at low cost. According to the invention, a modular structured suction system is created. Said system comprises a plastic air distributor module which can be connected to an air feed pertaining to an internal combustion engine; several plastic, single-pieced suction pipe modules, whereby one end of the suction pipes is joined to the air distributor module and the suction pipes are respectively allocated to a combustion chamber of the internal combustion engine; in addition to at least one plastic single-pieced flange module that is connected to the other end of the suction pipe of at least one suction pipe module and which can be secured to the internal combustion engine.