Patents by Inventor Hou-Yu Chen

Hou-Yu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11973077
    Abstract: A device includes a transistor, a backside via, and a pair of sidewall spacers. The transistor includes a gate structure, a channel layer surrounded by the gate structure, and a first source/drain structure and a second source/drain structure connected to the channel layer. The backside via is under and connected to the first source/drain structure and includes a first portion, a second portion between the first portion and the first source/drain structure, and a third portion tapering from the first portion to the second portion in a cross-sectional view. The pair of sidewall spacers are on opposite sidewalls of the second portion of the backside via but not on opposite sidewalls of the first portion of the backside via.
    Type: Grant
    Filed: April 21, 2023
    Date of Patent: April 30, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wang-Chun Huang, Hou-Yu Chen, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11955664
    Abstract: A battery module includes an insulating base, a pair of electrodes and multiple battery packs. Each electrode is installed to the insulating base and has a bridge portion and a wire connecting part exposed from the insulating base, and a pair of lugs is extended smoothly from each battery pack, and an end of at least a part of the lugs is attached to each bridge portion correspondingly. Therefore, the lug is not being twisted or deformed easily, and the battery module may have good conductive efficiency, long service life, and convenience of changing the battery pack.
    Type: Grant
    Filed: March 17, 2022
    Date of Patent: April 9, 2024
    Assignee: AMITA TECHNOLOGIES INC.
    Inventors: Chueh-Yu Ko, Hou-Chi Chen, Chia-Wen Yen, Ming-Hsiao Tsai
  • Patent number: 11948989
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a substrate; semiconductor layers over the substrate, wherein the semiconductor layers are separate from each other and are stacked up along a direction generally perpendicular to a top surface of the substrate; a dielectric feature over and separate from the semiconductor layers; and a gate structure wrapping around each of the semiconductor layers, the gate structure having a gate dielectric layer and a gate electrode layer, wherein the gate dielectric layer interposes between the gate electrode layer and the dielectric feature and the dielectric feature is disposed over at least a part of the gate electrode layer.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ting Chung, Yi-Bo Liao, Hou-Yu Chen, Kuan-Lun Cheng
  • Patent number: 11921543
    Abstract: A system and method of docking an information handling system to an intelligent wireless fan dock comprising a docking sensor to detect a docking event, a wireless module to establish a wireless link of the intelligent wireless fan dock with the docked information handling system upon detection of a docking event and to receive a dynamic fan speed request command to adjust extended fan cooling airflow from fan dock control system operating at the docked information handling system, where the fan dock control system has determined that the docked information handling system and the intelligent wireless fan dock pairing enables an increased performance mode and altered power draw limitations for the docked information handling system relative to the information handling system in an undocked state, and increasing the extended fan cooling airflow of a cooling fan based on the dynamic fan speed request command from the docked information handling system.
    Type: Grant
    Filed: April 28, 2022
    Date of Patent: March 5, 2024
    Assignee: Dell Products, LP
    Inventors: Lee-Ching Kuo, Hong Ling Chen, Hou Chun Wang, En-Yu Jen, Chen-Yu Lin
  • Patent number: 11923358
    Abstract: A device comprises a first transistor, a second transistor, a first contact, and a second contact. The first transistor comprises a first gate structure, first source/drain regions on opposite sides of the first gate structure, and first gate spacers spacing the first gate structure apart from the first source/drain regions. The second transistor comprises a second gate structure, second source/drain regions on opposite sides of the second gate structure, and second gate spacers spacing the second gate structure apart from the second source/drain regions. The first contact forms a first contact interface with one of the first source/drain regions. The second contact forms a second contact interface with one of the second source/drain regions. An area ratio of the first contact interface to top surface the first source/drain region is greater than an area ratio of the second contact interface to top surface of the second source/drain region.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: March 5, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chung-Pin Huang, Hou-Yu Chen, Chuan-Li Chen, Chih-Kuan Yu, Yao-Ling Huang
  • Patent number: 11894260
    Abstract: A semiconductor structure includes a gate structure surrounding a plurality of channels and a cut feature that electrically isolates two separate portions of the gate structure. The cut feature comprises an outer layer having a work-function metal, and an inner layer comprising a dielectric material. The cut feature extends above a top surface of the gate structure.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: February 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Wang-Chun Huang, Yu-Xuan Huang, Hou-Yu Chen, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20240030189
    Abstract: Methods for forming packaged semiconductor devices including backside power rails and packaged semiconductor devices formed by the same are disclosed. In an embodiment, a device includes a first integrated circuit device including a first transistor structure in a first device layer; a front-side interconnect structure on a front-side of the first device layer; and a backside interconnect structure on a backside of the first device layer, the backside interconnect structure including a first dielectric layer on the backside of the first device layer; and a first contact extending through the first dielectric layer to a source/drain region of the first transistor structure; and a second integrated circuit device including a second transistor structure in a second device layer; and a first interconnect structure on the second device layer, the first interconnect structure being bonded to the front-side interconnect structure by dielectric-to-dielectric and metal-to-metal bonds.
    Type: Application
    Filed: August 9, 2023
    Publication date: January 25, 2024
    Inventors: Chi-Yi Chuang, Hou-Yu Chen, Kuan-Lun Cheng
  • Publication number: 20240008243
    Abstract: A semiconductor device includes multiple transistors formed in a substrate, a frontside power rail disposed on a frontside of the substrate, and a backside power rail disposed on a backside of the substrate. The transistors form at least a first cell functioning under a first power supply voltage and a second cell functioning under a second power supply voltage that is different from the first power supply voltage. The frontside power rail provides the first power supply voltage to the first cell, and the backside power rail provides the second power supply voltage to the second cell.
    Type: Application
    Filed: January 26, 2023
    Publication date: January 4, 2024
    Inventors: Yu-Xuan Huang, Ching-Wei Tsai, Yi-Hsun Chiu, Hou-Yu Chen
  • Patent number: 11862701
    Abstract: A semiconductor device according to the present disclosure includes a stack of first channel layers and first and second source/drain (S/D) epitaxial features adjacent to opposite sides of at least a portion of the first channel layers, respectively. The first and second S/D epitaxial features have a first conductivity type. The semiconductor device also includes a stack of second channel layers stacked over the first channel layers and third and fourth source/drain (S/D) epitaxial features adjacent to opposite sides of at least a portion of the second channel layers, respectively. The third and fourth S/D epitaxial features have a second conductivity type. A total active channel layer number of the first channel layers is different from that of the second channel layers.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: January 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ting Chung, Hou-Yu Chen, Kuan-Lun Cheng
  • Patent number: 11855089
    Abstract: A semiconductor device includes a silicon substrate; a semiconductor fin over the silicon substrate; and an isolation structure over the silicon substrate. The semiconductor fin includes a first portion and a second portion over the first portion. The first portion is surrounded by the isolation structure, and the second portion protrudes above the isolation structure. The second portion has a different crystalline lattice constant than the first portion. The first portion includes a first dopant, and the second portion is substantially free of the first dopant. The semiconductor device further includes a gate structure above the isolation structure and engaging multiple surfaces of the second portion.
    Type: Grant
    Filed: June 8, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yong-Yan Lu, Chia-Wei Soong, Hou-Yu Chen
  • Patent number: 11855224
    Abstract: A semiconductor device according to the present disclosure includes an anti-punch-through (APT) region over a substrate, a plurality of channel members over the APT region, a gate structure wrapping around each of the plurality of channel members, a source/drain feature adjacent to the gate structure, and a diffusion retardation layer. The source/drain feature is spaced apart from the APT region by the diffusion retardation layer. The source/drain feature is spaced apart from each of the plurality of channel members by the diffusion retardation layer. The diffusion retardation layer is a semiconductor material.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ching-Wei Tsai, Yi-Bo Liao, Sai-Hooi Yeong, Hou-Yu Chen, Yu-Xuan Huang, Kuan-Lun Cheng
  • Publication number: 20230411467
    Abstract: A semiconductor device includes a channel region, first and second S/D contacts, first and second S/D epitaxial regions, a gate structure, and a gate contact. The channel region includes a first surface, a second surface opposite to the first surface, and a sidewall connected to the first surface and the second surface. The first S/D contact is disposed over the first surface of the channel region, the second S/D contact is disposed underneath the second surface of the channel region, the first S/D epitaxial region underlies the first S/D contact and overlies the first surface of the channel region, and the second S/D epitaxial region overlies the second S/D contact and underlies the second surface of the channel region. The gate structure surrounds the sidewall of the channel region, and the gate contact is disposed in proximity to the second S/D contact and lands on the gate structure.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Ting Chung, Yu-Xuan Huang, Hou-Yu Chen, Jin Cai
  • Patent number: 11837538
    Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a first vertical structure and a second vertical structure formed over the substrate, and a conductive rail structure between the first and second vertical structures. A top surface of the conductive rail structure can be substantially coplanar with top surfaces of the first and the second vertical structures.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: December 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Bo Liao, Wei Ju Lee, Cheng-Ting Chung, Hou-Yu Chen, Chun-Fu Cheng, Kuan-Lun Cheng
  • Patent number: 11837535
    Abstract: Methods of forming decoupling capacitors in interconnect structures formed on backsides of semiconductor devices and semiconductor devices including the same are disclosed. In an embodiment, a device includes a device layer including a first transistor; a first interconnect structure on a front-side of the device layer; a second interconnect structure on a backside of the device layer, the second interconnect structure including a first dielectric layer on the backside of the device layer; a contact extending through the first dielectric layer to a source/drain region of the first transistor; a first conductive layer including a first conductive line electrically connected to the source/drain region of the first transistor through the contact; and a second dielectric layer adjacent the first conductive line, the second dielectric layer including a material having a k-value greater than 7.0, a first decoupling capacitor including the first conductive line and the second dielectric layer.
    Type: Grant
    Filed: July 15, 2022
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Xuan Huang, Hou-Yu Chen, Ching-Wei Tsai, Kuan-Lun Cheng, Chung-Hui Chen
  • Publication number: 20230387261
    Abstract: A semiconductor device includes semiconductor nanosheets, a gate structure, and a dielectric spacer. The semiconductor nanosheets are vertically stacked over each other, disposed above a semiconductor substrate, and serve as channel regions. A bottommost semiconductor nanosheet most proximate from the semiconductor substrate is a thinnest nanosheet of the semiconductor nanosheets. The gate structure surrounds each of the semiconductor nanosheets in a first cross-section, and the dielectric spacer is interposed between the bottommost semiconductor nanosheet and the semiconductor substrate and adjoins the gate structure in the first cross-section.
    Type: Application
    Filed: May 27, 2022
    Publication date: November 30, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wang-Chun Huang, Hou-Yu Chen, Jin Cai, Chih-Hao Wang
  • Publication number: 20230386993
    Abstract: Methods of forming decoupling capacitors in interconnect structures formed on backsides of semiconductor devices and semiconductor devices including the same are disclosed. In an embodiment, a device includes a device layer including a first transistor; a first interconnect structure on a front-side of the device layer; a second interconnect structure on a backside of the device layer, the second interconnect structure including a first dielectric layer on the backside of the device layer; a contact extending through the first dielectric layer to a source/drain region of the first transistor; a first conductive layer including a first conductive line electrically connected to the source/drain region of the first transistor through the contact; and a second dielectric layer adjacent the first conductive line, the second dielectric layer including a material having a k-value greater than 7.0, a first decoupling capacitor including the first conductive line and the second dielectric layer.
    Type: Application
    Filed: August 9, 2023
    Publication date: November 30, 2023
    Inventors: Yu-Xuan Huang, Hou-Yu Chen, Ching-Wei Tsai, Kuan-Lun Cheng, Chung-Hui Chen
  • Publication number: 20230387001
    Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a first vertical structure and a second vertical structure formed over the substrate, and a conductive rail structure between the first and second vertical structures. A top surface of the conductive rail structure can be substantially coplanar with top surfaces of the first and the second vertical structures.
    Type: Application
    Filed: August 10, 2023
    Publication date: November 30, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Bo LIAO, Wei Ju Lee, Cheng-Ting Chung, Hou-Yu Chen, Chun-Fu Cheng, Kuan-Lun Cheng
  • Patent number: 11830854
    Abstract: Methods for forming packaged semiconductor devices including backside power rails and packaged semiconductor devices formed by the same are disclosed. In an embodiment, a device includes a first integrated circuit device including a first transistor structure in a first device layer; a front-side interconnect structure on a front-side of the first device layer; and a backside interconnect structure on a backside of the first device layer, the backside interconnect structure including a first dielectric layer on the backside of the first device layer; and a first contact extending through the first dielectric layer to a source/drain region of the first transistor structure; and a second integrated circuit device including a second transistor structure in a second device layer; and a first interconnect structure on the second device layer, the first interconnect structure being bonded to the front-side interconnect structure by dielectric-to-dielectric and metal-to-metal bonds.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Yi Chuang, Hou-Yu Chen, Kuan-Lun Cheng
  • Publication number: 20230369504
    Abstract: In an embodiment, a device includes: a first interconnect structure including metallization patterns; a second interconnect structure including a power rail; a device layer between the first interconnect structure and the second interconnect structure, the device layer including a first transistor, the first transistor including an epitaxial source/drain region; and a conductive via extending through the device layer, the conductive via connecting the power rail to the metallization patterns, the conductive via contacting the epitaxial source/drain region.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Yi-Bo Liao, Yu-Xuan Huang, Pei-Yu Wang, Cheng-Ting Chung, Ching-Wei Tsai, Hou-Yu Chen
  • Publication number: 20230369499
    Abstract: A semiconductor device according to the present disclosure includes a first transistor and a second transistor disposed over the first transistor. The first transistor includes a plurality of channel members vertically stacked over one another, and a first source/drain feature adjoining the plurality of channel members. The second transistor includes a fin structure, and a second source/drain feature adjoining the fin structure. The semiconductor device further includes a conductive feature electrically connecting the first source/drain feature and the second source/drain feature.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Chi-Yi Chuang, Hou-Yu Chen, Kuan-Lun Cheng