Patents by Inventor Houda Graoui

Houda Graoui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Advances in spike anneal processes for ultra shallow junctions
    Patent number: 6897131
    Abstract: Lamp based spike annealing was improved to address the aggressive requirements of <100 nm Ultra Shallow Junction (USJ) technologies. Improvements focused on enhancing cool down rates, and thereby improving spike sharpness. Boron ion implanted substrates with varying ion-implanted energy and dose were then annealed to characterize the improvements in spike annealing. A greater than 10% improvement in sheet resistance and junction depth was realized on substrates that were annealed with the improved spike profile. The improved spike anneal had the same comparable uniformity to the standard spike anneal.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: May 24, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Balasubramanian Ramachandran, Ravi Jallepally, Ryan C. Boas, Sundar Ramamurthy, Amir Al-Bayati, Houda Graoui, Joseph M. Spear
  • Advances in spike anneal processes for ultra shallow junctions
    Publication number: 20040126999
    Abstract: Lamp based spike annealing was improved to address the aggressive requirements of <100 nm Ultra Shallow Junction (USJ) technologies. Improvements focused on enhancing cool down rates, and thereby improving spike sharpness. Boron ion implanted substrates with varying ion-implanted energy and dose were then annealed to characterize the improvements in spike annealing. A greater than 10% improvement in sheet resistance and junction depth was realized on substrates that were annealed with the improved spike profile. The improved spike anneal had the same comparable uniformity to the standard spike anneal.
    Type: Application
    Filed: September 22, 2003
    Publication date: July 1, 2004
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Balasubramanian Ramachandran, Ravi Jallepally, Ryan C. Boas, Sundar Ramamurthy, Amir Al-Bayati, Houda Graoui, Joseph M. Spear