Abstract: An inline heater includes a heater core that includes a heat spreader assembly comprising a tubular heat spreader that extends axially along a longitudinal axis and that comprises an external surface. The heat spreader assembly includes a fluid inlet and a fluid outlet. At least one conduit extends helically about the longitudinal axis of the heat spreader between the fluid inlet and the fluid outlet to define a fluid heating flow path that fluidically connects the fluid inlet and the fluid outlet. The heat spreader assembly further comprising an electrically operated heating element for heating the heat spreader.

Abstract: A heat transfer assembly includes a sheath which in one embodiment is elliptical in cross-section and in another embodiment has a complex cross-section with flat wall sections and curved wall sections. The sheath is elastically deformable so as to accept a heat transfer element sub-assembly. Once installed, the sheath holds the sub-assembly in place by an interference fit.

Abstract: A heat transfer assembly includes a sheath which in one embodiment is elliptical in cross-section and in another embodiment has a complex cross-section with flat wall sections and curved wall sections. The sheath is elastically deformable so as to accept a heat transfer element sub-assembly. Once installed, the sheath holds the sub-assembly in place by an interference fit.

Abstract: A heater assembly includes a heated hose construction including a thermoplastic conduit that is relatively thin and a resistance wire or resistance ribbon wound around an exterior periphery of the conduit and in thermal communication therewith. An overall coverage of a surface area of the conduit by the resistance wire or resistance ribbon is at least 50% of the surface area of the conduit so that the resistance wire or resistance ribbon reinforces the conduit. A non-conductive braid layer is disposed over the resistance wire or resistance ribbon. The braid layer is permeable to vapor leaking out of the conduit. A support member is provided by which the heated hose construction is supported. The support member may be accommodated in a housing through which a purge gas flows.

Abstract: A heat transfer assembly includes a sheath which in one embodiment is elliptical in cross-section and in another embodiment has a complex cross-section with flat wall sections and curved wall sections. The sheath is elastically deformable so as to accept a heat transfer element sub-assembly. Once installed, the sheath holds the sub-assembly in place by an interference fit.

Abstract: A heat exchanger for fluids includes an elongated conduit. At least two spaced fluid passageways are defined in the conduit and extend longitudinally through the conduit from a first end thereof to a second end thereof. A heat transfer element thermally contacts a surface of the conduit to transfer heat to or from a fluid flowing through the at least two spaced passageways. The conduit can be unitary and of one piece. In one embodiment, the conduit can be a single crystal.

Abstract: A heat exchanger includes a plurality of tubes wherein at least some of the tubes are elliptical or oval in cross section and each tube includes a longitudinal axis. Each elliptical tube includes a major axis and a minor axis. The plurality of tubes is arranged in a radial pattern such that the major axes of the elliptical tubes intersect a centerline of the heat exchanger. The plurality of tubes is connected to a heater mount and a heater is also connected to the heater mount. A securing element holds the plurality of tubes, the heater and the heater mount together. A tube liner can extend along the longitudinal axis of at least one of the elliptical or oval tubes of the plurality of tubes. If a tube liner is employed, a purge fluid flow channel is defined between an outer periphery of the tube liner and an inner periphery of at least one of the elliptical or oval tubes of the plurality of tubes.

Abstract: A heat exchanger includes a plurality of tubes wherein at least some of the tubes are elliptical or oval in cross section and each tube includes a longitudinal axis. Each elliptical tube includes a major axis and a minor axis. The plurality of tubes is arranged in a radial pattern such that the major axes of the elliptical tubes intersect a centerline of the heat exchanger. The plurality of tubes is connected to a heater mount and a heater is also connected to the heater mount. A securing element holds the plurality of tubes, the heater and the heater mount together. A tube liner can extend along the longitudinal axis of at least one of the elliptical or oval tubes of the plurality of tubes. If a tube liner is employed, a purge fluid flow channel is defined between an outer periphery of the tube liner and an inner periphery of at least one of the elliptical or oval tubes of the plurality of tubes.

Abstract: A sealed self regulating heater assembly includes a positive temperature coefficient (PTC) heating element and a pair of spaced electrodes. Each electrode includes a first surface with the first surfaces of the pair of electrodes being spaced from one another, such that the PTC element is located between the first surfaces of the pair of electrodes and is energized by the pair of electrodes. A sheath surrounds the pair of electrodes in the PTC element. First and second closures are located at opposed end of the sheath with the sheath and the closures cooperating to define an interior space. An electrically insulative and thermally conductive film material is disposed within the interior space and a supply of oxygen is provided to the interior space.

Abstract: A self-regulating heater assembly comprises a positive temperature coefficient (PTC) heating element and a pair of spaced electrodes. Each electrode includes a first surface. The first surfaces of the pair of electrodes are spaced from one another. The PTC element is located between and supported by the first surfaces of the pair of electrodes and is energized by the pair of electrodes. Means for limiting a compressive force on the PTC element is provided. The means includes an electrically insulative spacer member positioned between the first surfaces of the pair of electrodes. A first pair of power leads, one power lead being connected to each of the pair of electrodes, energizes the pair of electrodes.

Abstract: A top-flow fluid pump that is made from a high-purity fluroplastic material is disclosed. The pump is used to circulate extremely corrosive fluids that are heated to temperatures of 160-180° C. through at least one filtration unit. The pump can be used in a semiconductor etching system. The pump utilizes the driven side of an impeller to generate a suction force that draws the corrosive fluid into a pumping chamber from at least one inlet port. A pedestal support or shaft sleeve, through which a motor drive shaft extends, is modified to create an annular passageway that permits the corrosive fluid to enter the pumping chamber from the inlet. With the inlet design of the present invention, a drive motor seal assembly is no longer subjected to corrosive fluid because the seal assembly is positioned on the suction side of the impeller. In a “dead headed” condition, the corrosive fluid flow stops completely as the fluid within the pumping chamber simply remains in shear.

Abstract: A control system for an in-line, ultra-pure deionized water (UPDI) heater including a housing, at least one fluid pathway through the housing, and a resistive heating element proximate the fluid pathway for heating an operating fluid flowing through the pathway. The control system includes a mechanism for determining an actual power value which is indicative of the power being applied to the resistive heating element, a mechanism for determining a needed power value which is indicative of the power required to achieve an outlet fluid temperature substantially equal to a user-selectable preset fluid temperature, a mechanism for adjusting the actual power applied to the resistive heating element based on an offset between the actual power value and the needed power value, and a mechanism for overriding the adjusting mechanism when the offset is greater than a predetermined level.

Abstract: A new and improved end-cap for use with a fluid heater is disclosed. The end-cap includes an end wall, a first groove in the end wall for receiving a first tube, a second groove in the end wall located radially inward of the first groove for receiving a second tube, and a third groove in the end wall located radially inward of the second groove for receiving a third tube. A first side wall separates the first and the second grooves, and a second side wall separates the second and the third grooves. The first and the second side walls each are relatively thin which facilitates deformation in a radial direction in response to differential thermal expansion of the end cap in relation to the tubes. In addition, the side walls compress in a circumferential direction in response to differential thermal expansion of the end cap in relation to the tubes. An annular flange is positioned radially inward of the second side wall to facilitate centering the third tube in the third groove.

Abstract: An apparatus for heating a fluid such as ultra-pure de-ionized (UPDI) water is disclosed. The fluid heater includes an intermediate body portion, a bottom end cap assembly secured to one end of the intermediate body portion, and a top end cap assembly secured to the other end of the intermediate body portion. The intermediate body portion includes a number of concentric quartz tubes wherein a first quartz tube is spaced radially inwardly of a second quartz tube to define an inner fluid pathway for heating UPDI water while flowing through the inner fluid pathway. A third quartz tube is spaced radially outwardly of the second quartz tube and radially inwardly of a fourth quartz tube to define an outer annular fluid pathway for further heating the UPDI water received from the inner fluid pathway. A resistive heating element is interposed between the second and third quartz tubes for heating the UPDI water by means of conduction, convection and heat radiation with a heating efficiency approaching 100%.

Abstract: An immersion heater for corrosive fluids includes an electrically resistive material strand operative upon connection to a source of power to provide heat. A thermally conductive electrically insulating fill material is disposed around the electrically resistive material strand. An electrically conductive sheath encases the fill material. A tubular jacket of a flexible chemically inert material encases the electrically conductive sheath. A fluid flow passage is defined between the tubular jacket and the sheath for allowing a fluid to flow therethrough. The fluid is a purge gas that flows between the sheath and the jacket in order to remove any corrosive fluid which may have penetrated the jacket. A method for manufacturing an immersion heater is also disclosed.

Abstract: A tubular high efficiency, non-contaminating fluid heater includes an elongate tubular member having a coil-like configuration and a sidewall which defines an elongate tubular chamber formed from an inert material through which fluid is adapted to flow. The tubular member includes an inlet and an outlet and a plurality of elongate electrical resistance heaters sheathed with the same inert material are disposed in said tubular chamber for heating the fluid as it flows through the tubular chamber.