Abstract: A system adapted to dry microelectronic, optical or other critical parts which in the course of their processing are rendered wet and become contaminated unless fully dried. The system includes an upright drying chamber having an inlet at its lower end and an outlet at its upper end, the parts to be dried being supported in a work zone between the inlet and outlet. Coupled to the inlet of the drying chamber is an input chamber having a blower therein which blows heated gas into the drying chamber through a filter unit covering the inlet thereto The blower creates a negative pressure in the input chamber and a positive pressure in the drying chamber in which the filtered heated gas acts to evaporate moisture from the parts in the work zone.

Abstract: A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.

Abstract: A submicron particle filter unit of the Hepa type adapted to be interposed between a source of pressurized gas and a work-processing region to provide an environment therefor free of particles and other contaminants. The membrane of the unit is fabricated from a continuous, elongated, porous metal sheet accordion-folded to define a uniform series of pleats forming a media pack having an entry and an exit face, the pack being clamped with gaskets between the side plates of a frame or welded or otherwise joined thereto. Pressurized gas from the source applied to the entry face of the pack is filtered therethrough to yield at its exit face a laminar flow of gas which creates a clean environment for the work-producing region.

Abstract: A system for drying microelectronic, optical and other parts which are rendered wet in the course of their processing, the system functioning rapidly to dry these parts so that they are free of contaminants. The system includes a drying chamber having a work zone in which the wet parts are held in a removable carrier resting on a stand, the work zone being heated to promote evaporation. Flowing through the work zone and passing over the wet parts is a gaseous stream which entrains vapors emitted from the parts and discharges the vapors from the chamber. To accelerate the evaporative process, a vibration generator is operatively coupled to the stand or to a vibration coupling device to impart vibrations thereto which are transmitted to the wet parts in the carrier, causing liquid drops on the surfaces of the parts to fractionate into droplets or to otherwise disperse and spread the liquid over a larger area, thereby greatly increasing the aggregate exposed surface area of the liquid.

Abstract: A system for drying microelectronic, optical and other parts that in the course of their processing are rendered wet with solvents or other liquids, which if not fully evaporated from the parts will contaminate and impair their quality. The system includes an open-ended drying chamber having a work zone intermediate its sides in which the parts to be dried are supported for exposure to a gas stream. One end of the chamber defines a gas inlet to admit the gas stream which sweeps the entire chamber. Coupled to the drying chamber is a pressure chamber in which a submicron particle filter unit of the Hepa type producing a relatively low pressure drop is disposed to cover the gas inlet.

Abstract: A work transfer system conveying a work basket in a programmed sequence to the processing tanks of an assembly thereof at various positions on a work bench. The system acts to transfer the basket to a selected tank and to properly orient the basket with respect to this tank before lowering the basket therein for processing for a given dwell period, at the conclusion of which the basket is hoisted from the tank and transferred to another tank where the procedure is repeated. Running parallel to the front side of the bench is a rail on which a robot rides, the robot supporting a hoist carriage which can be raised or lowered. Cantilevered from the carriage is a main arm articulated by an elbow shaft to a forearm that extends over the bench. The forearm is joined by a hand shaft depending therefrom to a hand that engages the handle of the work basket. A main arm motor acts to rotate the elbow shaft and thereby swing the forearm to a position generally aligning the basket with a selected tank therebelow.

Abstract: A work transfer system conveying a work basket in a programmed sequence to the processing tanks of an assembly thereof placed at various positions on a work bench. The system acts to transfer the basket to a selected tank and to properly orient the basket with respect to this tank before lowering the basket therein for processing during a given dwell period, at the conclusion of which the basket is hoisted from the tank and transferred to another tank where the procedure is repeated. Running along the front of the bench is a rail on which a robot is driven to a position in the proximity of the selected tank, the robot supporting a hoist which can be raised or lowered. Cantilevered from the hoist and extending transversely across the bench is a hollow arm having a trolley therein provided with a turntable whose spindle projects upwardly to join the upper end of a loop which encircles the arm, the loop being provided at its lower end with a hand that engages the work basket.

Abstract: A mechanized work transfer system in which a robot assembly riding on a horizontal rail and driven by an external motor acts to convey a basket carrying work along a row of processing stages on a work bench. The assembly includes a robot provided with an elevator operated by an internal motor which serves to lower the basket at each stage on the work bench and to deposit it into a processing tank for a predetermined dwell period, after which the basket is hoisted out of the tank and transferred to another stage where the procedure is repeated. To render the assembly substantially immune to corrosive vapors emanating from the tanks, the robot housing is sectioned into left and right compartments, the left compartment being reserved for those moving and stationary components which can be fabricated of corrosion-resistant materials.

Abstract: An automatic work transfer system for conveying a basket carrying work through a row of processing stages at a work station in any desired sequence. The basket is lowered into a tank at each stage and oriented therein for processing for a predetermined dwell period, at the conclusion of which the basket is hoisted out of the tank and transferred to the next stage where the procedure is repeated. The system includes a supporting rail laterally displaced from the row of stages and parallel thereto. Riding on the rail is a robot provided with a pair of vertical shafts supported on an elevator. Cantilevered from the shafts are a pair of arms which extend over the stages, the ends of the arms being pivotally connected to a cross piece. Depending from the center of the cross piece is a rod terminating in a hand adapted to engage the handle of the basket.

Abstract: A heat exchange assembly for raising a process fluid, such as ultra-pure, de-ionized water, to an elevated temperature without adversely affecting the quality thereof includes coaxially-arranged inner and outer pipes, the annular space therebetween defining a flow passage for the fluid to be heated. The inner pipe is formed of high-strength metal of good thermal conductivity and encloses a heat source, such as steam, circulating heated fluid or an electric heater. The inner pipe is ensheathed by an extruded heat-shrinkable plastic tube of non-reactive material, such as PTFE or polypropylene not exceeding 7 mils in thickness, which is shrunk-fit thereon to form one wall of the flow passage. The opposing wall of the passage is formed by the interior surface of the outer pipe which is also constituted by non-reactive plastic material such as PTFE or polypropylene.