Patents by Inventor Howell R. Phelps

Howell R. Phelps has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CRITICAL DIMENSION UNIFORMITY OPTIMIZATION
    Publication number: 20080228308
    Abstract: Embodiments of an apparatus and methods for providing critical dimensions of a pattern. Pattern parameters and process history from a first substrate are used to create a thermal modes. The thermal mode is employed to established intelligent set points for zones of a substrate heater. A second substrate is position proximate the heater. The actual temperature of each zone is controlled using the corresponding intelligent setpoint.
    Type: Application
    Filed: March 13, 2007
    Publication date: September 18, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Howell R. Phelps