Abstract: A lithography rework analysis method and system. The method is applied to a system having a network server and a user computer having a browser interface. The method transfers initial data of various machines into the network database. The network database contains rework data of machines performing lithography rework operation. Analysis time node is input to the browser interface and the analysis time node is transferred to the network server. According to the analysis time node, the network server retrieves required data from the network database and displays the data on the browser interface. Rework data residing within the network database includes data table production time, product number, production line code, station code, department code, product code, mask rework pieces, measuring station, production machine, worker name, rework reason code, rework reason title, current status, wafer lot note item, rework time and rework region.

Abstract: The present invention discloses an integrated service platform (ISP). Under the real-time mode, the ISP of the present invention comprises the devices of: an engineering data analysis database (EDB); an area controller database (AC Database); a web server; and client computers. Under the mode of accessing data in a certain period of time, the present invention comprises the devices of: an EDB; an AC Database; a loader; a web server; and client computers. The application of the ISP of the present invention allows users on the client sites to access the data they want with browsers. Thus, no disturbance of the maintenance on the client sites would occur, because the browsers are used for accessing the data.

Abstract: The present invention discloses an integrated service platform (ISP). Under the real-time mode, the ISP of the present invention comprises the devices of: an engineering data analysis database (EDB); an area controller database (AC Database); a web server; and client computers. Under the mode of accessing data in a certain period of time, the present invention comprises the devices of: an EDB; an AC Database; a loader; a web server; and client computers. The application of the ISP of the present invention allows users on the client sites to access the data they want with browsers. Thus, no disturbance of the maintenance on the client sites would occur, because the browsers are used for accessing the data.

Abstract: A lithography rework analysis method and system. The method is applied to a system having a network server and a user computer having a browser interface. The method transfers initial data of various machines into the network database. The network database contains rework data of machines performing lithography rework operation. Analysis time node is input to the browser interface and the analysis time node is transferred to the network server. According to the analysis time node, the network server retrieves required data from the network database and displays the data on the browser interface. Rework data residing within the network database includes data table production time, product number, production line code, station code, department code, product code, mask rework pieces, measuring station, production machine, worker name, rework reason code, rework reason title, current status, wafer lot note item, rework time and rework region.

Abstract: A financial cost prediction system method, wherein the subserver of each department is connected to the main server, and the initial cost data of each department is screened and classified via the main server to form financial reports. The financial reports and further organized into a standard cost account, and are provided to the finance department user terminal for to access the financial reports and to compare to the standard cost account. Also, the present system enables the initial cost data to automatically compile into financial reports and sets the schedules of the main server, so as to automatically correct erroneous financial reports. By using this system, to predict the cost and expense for the coming month or the coming year can be obtained.