Abstract: A method includes forming a reflective multilayer over a substrate; depositing a first capping layer over the reflective multilayer, wherein the first capping layer is made of a ruthenium-containing material or a chromium-containing material; performing a treatment to the first capping layer to introduce nitrogen or fluorine into the first capping layer; forming an absorption layer over the first capping layer; and patterning the absorption layer.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: A structure including an EUV mask and a pellicle attached to the EUV mask. The pellicle includes a pellicle frame and a plurality of pellicle membrane layers attached to the pellicle frame. The plurality of pellicle membrane layers include at least one core pellicle membrane layer and an additional pellicle membrane layer is disposed on the at least one core pellicle membrane layer. In some embodiments, the additional pellicle membrane layer is a material having a thermal emissivity greater than 0.2, a transmittance greater than 80%, and a refractive index (n) for 13.5 nanometer source of greater than 0.9.

Abstract: According to the claimed invention, the computer system has a central processing unit, a north bridge electrically connected to the central processing unit, memory electrically connected to the north bridge, and a south bridge electrically connected to the north bridge, the south bridge having a general purpose serial input/output port. The computer also includes at least one peripheral device electrically connected to the south bridge and an interfacing circuit for providing a plurality of extended general purpose input/output ports, the interfacing circuit having a connection end electrically connected to the general purpose serial input/output port. When inputting a data signal from a general purpose input/output (GPIO) port, the data signal is transmitted to the general purpose serial input/output port through the connection end of the interfacing circuit.

Abstract: According to the claimed invention, the computer system has a central processing unit, a north bridge electrically connected to the central processing unit, memory electrically connected to the north bridge, and a south bridge electrically connected to the north bridge, the south bridge having a general purpose serial input/output port. The computer also includes at least one peripheral device electrically connected to the south bridge and an interfacing circuit for providing a plurality of extended general purpose input/output ports, the interfacing circuit having a connection end electrically connected to the general purpose serial input/output port. When inputting a data signal from a general purpose input/output (GPIO) port, the data signal is transmitted to the general purpose serial input/output port through the connection end of the interfacing circuit.