Patents by Inventor Hualong Yang

Hualong Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11990363
    Abstract: A wafer support pin lifting device includes a support plate, a slide block and a lifting pole. The support plate is for supporting multiple support pins. The slide block is slidably connected to an inner wall of a cavity so that the slide block slides relative to the cavity. The lifting pole has a first end, a second end and a third end. The first end is connected to the support plate, the second end is pivotally connected to the slide block, and the third end is connected to an actuator. With the pivotal connection between the second end of the lifting pole and the slide block, the lifting pole approaching the high position causes the support plate to be approximately horizontal, and the lifting pole approaching the low position causes the support plate to be tilted.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: May 21, 2024
    Assignee: PIOTECH INC.
    Inventors: Dezan Yang, Hualong Yang, Fengli Wu
  • Publication number: 20220208595
    Abstract: A wafer support pin lifting device includes a support plate, a slide block and a lifting pole. The support plate is for supporting multiple support pins. The slide block is slidably connected to an inner wall of a cavity so that the slide block slides relative to the cavity. The lifting pole has a first end, a second end and a third end. The first end is connected to the support plate, the second end is pivotally connected to the slide block, and the third end is connected to an actuator. With the pivotal connection between the second end of the lifting pole and the slide block, the lifting pole approaching the high position causes the support plate to be approximately horizontal, and the lifting pole approaching the low position causes the support plate to be tilted.
    Type: Application
    Filed: December 14, 2021
    Publication date: June 30, 2022
    Inventors: Dezan Yang, Hualong Yang, Fengli Wu
  • Publication number: 20210407843
    Abstract: An automatic wafer carrying system and a method for transferring a wafer using the system are provided.
    Type: Application
    Filed: June 22, 2021
    Publication date: December 30, 2021
    Inventors: Hualong Yang, Dezan Yang, Wenmin Liu, Fengli Wu