Patents by Inventor Huan-Wen Lai

Huan-Wen Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shower head apparatus and method for controlling plasma or gas distribution
    Patent number: 9982340
    Abstract: An apparatus comprises: a shower head having a supply plenum for supplying the gas to the chamber and a vacuum manifold fluidly coupled to the supply plenum; and at least one vacuum system fluidly coupled to the vacuum manifold of the shower head.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: May 29, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Chih-Tsung Lee, Hung Jui Chang, You-Hua Chou, Shiu-Ko Jangjian, Chung-En Kao, Ming-Chin Tsai, Huan-Wen Lai
  • SHOWER HEAD APPARATUS AND METHOD FOR CONTROLLIGN PLASMA OR GAS DISTRIBUTION
    Publication number: 20130267045
    Abstract: An apparatus comprises: a shower head having a supply plenum for supplying the gas to the chamber and a vacuum manifold fluidly coupled to the supply plenum; and at least one vacuum system fluidly coupled to the vacuum manifold of the shower head.
    Type: Application
    Filed: April 4, 2012
    Publication date: October 10, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Tsung LEE, Hung Jui CHANG, You-Hua CHOU, Shiu-Ko JANGJIAN, Chung-En KAO, Ming-Chin TSAI, Huan-Wen LAI
  • Electrostatic chuck assembly having disassembling device
    Patent number: 7102871
    Abstract: A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: September 5, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co,, Ltd.
    Inventors: Cheng-Liang Chang, Ray Chuang, Jen Wei, Chian-Kuo Huang, Huan-Wen Lai, Ching-Sun Lee, Cheng-Yua Chuang, Chi-Ching Lo, Neo-Feng Chiou, Yen-Bo Huang
  • Electrostatic chuck assembly having disassembling device
    Publication number: 20050094349
    Abstract: A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.
    Type: Application
    Filed: October 29, 2003
    Publication date: May 5, 2005
    Inventors: Cheng-Liang Chang, Ray Chuang, Jen Wei, Chian-Kuo Huang, Huan-Wen Lai, Ching-Sun Lee, Cheng-Yua Chuang, Chi-Ching Lo, Neo-Feng Chiou, Yen-Bo Huang