Patents by Inventor Huang-Ken Tai

Huang-Ken Tai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7988216
    Abstract: A holding apparatus for holding a semiconductor wafer comprises a pneumatic cylinder, a plunger movably connected to the pneumatic cylinder, an inlet pipe connected to the pneumatic cylinder, and a relief valve connected to the inlet pipe. Clean dry air is pumped into the pneumatic cylinder through the inlet pipe to impel the plunger in a first direction to contact the wafer. A part of the air in the inlet pipe is discharged through the relief valve to regulate air pressure to the pneumatic cylinder.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: August 2, 2011
    Assignee: Inotera Memories, Inc.
    Inventors: You-En Ku, Huang-Ken Tai
  • Publication number: 20090196718
    Abstract: A holding apparatus for holding a semiconductor wafer comprises a pneumatic cylinder, a plunger movably connected to the pneumatic cylinder, an inlet pipe connected to the pneumatic cylinder, and a relief valve connected to the inlet pipe. Clean dry air is pumped into the pneumatic cylinder through the inlet pipe to impel the plunger in a first direction to contact the wafer. A part of the air in the inlet pipe is discharged through the relief valve to regulate air pressure to the pneumatic cylinder.
    Type: Application
    Filed: March 20, 2008
    Publication date: August 6, 2009
    Applicant: INOTERA MEMORIES, INC.
    Inventors: You-En Ku, Huang-Ken Tai