Patents by Inventor HUANXIONG XIA

HUANXIONG XIA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PEDESTAL AND METHOD FOR CONTROLLING THE SAME, TRAY, AND PROCESS CHAMBER
    Publication number: 20170009342
    Abstract: A pedestal and a method for controlling the same, a tray, and a process chamber are provided. The pedestal comprises: a barrier (12), defining a plurality of areas, in which the plurality of areas are electrically insulated and thermally insulated from each other; a plurality of subbases (11), disposed in the plurality of areas respectively; and a control device, configured for controlling a temperature and/or a power of each subbase (11).
    Type: Application
    Filed: April 3, 2014
    Publication date: January 12, 2017
    Inventors: DONG XIANG, HUANXIONG XIA, WANG YANG, PENG MOU, HAN ZHANG, WEI WANG, XUEPING LIU