Patents by Inventor Hubertus A. Corsius

Hubertus A. Corsius has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for depositing a layer on a substrate
    Patent number: 5294572
    Abstract: Method and apparatus for the batchwise simultaneous treatment of several substrates by chemical vapor deposition. The method is carried out in a closed system and before the deposition treatment, the substrates are subjected to a cleaning treatment in the same system.
    Type: Grant
    Filed: November 1, 1991
    Date of Patent: March 15, 1994
    Assignee: ASM International N.V.
    Inventors: Ernst H. A. Granneman, Hans W. Piekaar, Hubertus A. Corsius, Boudewijn G. Sluijk