Patents by Inventor Hubertus Von Der Waydbrink
Hubertus Von Der Waydbrink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9802763Abstract: In various embodiments, a transporting device for transporting a substrate in a process chamber is provided. The transporting device includes a guiding rail arrangement having two guiding rails for mounting a multiplicity of bars between the two guiding rails. The two guiding rails form a closed path of movement along which the multiplicity of bars are guided. The transporting device further includes the multiplicity of bars that are mounted in the guiding rail arrangement, and a drive device for pushing at least one bar of the multiplicity of bars in such a way that, in a transporting region of the guiding rail arrangement, in each case multiple bars of the multiplicity of bars are pushed against one another and the bars that have been pushed against one another move along the path of movement in the transporting region.Type: GrantFiled: June 22, 2015Date of Patent: October 31, 2017Assignee: VON ARDENNE GmbHInventors: Michael Hentschel, Hubertus von der Waydbrink, Daniel Stange, Christoph Dubau, Reinhard Jaeger
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Patent number: 9452456Abstract: A substrate treatment plant includes a process chamber delimited by chamber walls and in the process chamber a substrate conveying unit for the horizontal conveyance of slab-shaped substrates in one conveying plane and in one conveying direction. The substrate conveying unit includes an arrangement of rotatably mounted, cylindrical conveying rollers transversely arranged to the conveying direction, the topmost generatrices of the conveying rollers defining the conveying plane, and at least one substrate treatment unit, which is located above the conveying plane, and at least one gas inlet. In the region of the substrate treatment unit at least one additional heating unit is located below the conveying plane and a condensation unit is located under the substrate conveying unit.Type: GrantFiled: September 16, 2013Date of Patent: September 27, 2016Assignee: VON ARDENNE GMBHInventors: Hubertus Von Der Waydbrink, Steffen Grosser, Michael Hentschel, Daniel Stange, Thomas Meyer
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Publication number: 20150368045Abstract: In various embodiments, a transporting device for transporting a substrate in a process chamber is provided. The transporting device includes a guiding rail arrangement having two guiding rails for mounting a multiplicity of bars between the two guiding rails. The two guiding rails form a closed path of movement along which the multiplicity of bars are guided. The transporting device further includes the multiplicity of bars that are mounted in the guiding rail arrangement, and a drive device for pushing at least one bar of the multiplicity of bars in such a way that, in a transporting region of the guiding rail arrangement, in each case multiple bars of the multiplicity of bars are pushed against one another and the bars that have been pushed against one another move along the path of movement in the transporting region.Type: ApplicationFiled: June 22, 2015Publication date: December 24, 2015Inventors: Michael Hentschel, Hubertus von der Waydbrink, Daniel Stange, Christoph Dubau, Reinhard Jaeger
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Publication number: 20150368793Abstract: In various embodiments, a method for processing a substrate is provided. The method includes placing the substrate on at least one substrate carrier. The substrate carrier includes at least one carrier layer and a thermal insulating layer arranged over the carrier layer. The thermal insulating layer is arranged between the carrier layer and the substrate placed on. The thermal insulating layer includes at least one of a lower density or a lower thermal conductivity than the carrier layer. The method further includes coating the substrate with a coating material while the substrate is lying on the at least one substrate carrier, and removing coating material that adheres to the substrate carrier during the coating of the substrate from the at least one substrate carrier, the removal of the coating material from the at least one substrate carrier taking place by irradiating the at least one substrate carrier.Type: ApplicationFiled: June 22, 2015Publication date: December 24, 2015Inventors: Hubertus von der Waydbrink, Roland Wanke, Christoph Dubau, Daniel Stange, Michael Hentschel
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Patent number: 8911231Abstract: A substrate-treatment installation includes a vacuum chamber, a substrate treatment device within the vacuum chamber, a substrate transport device within the vacuum chamber for guiding a substrate along a longitudinal direction in a substrate transport plane past the substrate treatment device, and a device for controlling substrate temperature. The substrate temperature controlling device includes a heat-absorbing cooler on one side of the substrate transport plane and an insulation member selectively displaceable between at least two different positions to vary extent of thermal shielding of the heat-absorbing cooler relative to the substrate transport plane by the insulation member.Type: GrantFiled: June 18, 2010Date of Patent: December 16, 2014Assignee: VON ARDENNE Anlagentechnik GmbHInventors: Hubertus Von Der Waydbrink, Thomas Meyer, Michael Hentschel, Reinhardt Bauer, Andrej Wolf, Hans-Christian Hecht
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Patent number: 8821977Abstract: A transport device and method of transporting a substrate using a rotatable shaft and baffles may be used to extend cleaning intervals for the transport device and reduce deposition of a vapor deposition material upon the transport device.Type: GrantFiled: September 7, 2012Date of Patent: September 2, 2014Assignee: First Solar, Inc.Inventors: Hubertus von der Waydbrink, Georg Laimer, Siegfried Scheibe, Ricky C. Powell, James Ernest Hinkle, James B. Foote
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Publication number: 20140076362Abstract: A substrate treatment plant includes a process chamber delimited by chamber walls and in the process chamber a substrate conveying unit for the horizontal conveyance of slab-shaped substrates in one conveying plane and in one conveying direction. The substrate conveying unit includes an arrangement of rotatably mounted, cylindrical conveying rollers transversely arranged to the conveying direction, the topmost generatrices of the conveying rollers defining the conveying plane, and at least one substrate treatment unit, which is located above the conveying plane, and at least one gas inlet. In the region of the substrate treatment unit at least one additional heating unit is located below the conveying plane and a condensation unit is located under the substrate conveying unit.Type: ApplicationFiled: September 16, 2013Publication date: March 20, 2014Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus VON DER WAYDBRINK, Steffen GROSSER, Michael HENTSCHEL, Daniel STANGE, Thomas MEYER
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Patent number: 8605292Abstract: A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.Type: GrantFiled: March 28, 2011Date of Patent: December 10, 2013Assignee: VON ARDENNE Anlagentechnik GmbHInventors: Damir Muchamedjarow, Hubertus Von Der Waydbrink, Michael Hentschel, Marco Kenne, Reinhardt Bauer, Steffen Leβmann, Thomas Bock, Reinhard Jaeger
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Patent number: 8470094Abstract: Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.Type: GrantFiled: November 10, 2011Date of Patent: June 25, 2013Assignee: VON ARDENNE Anlagentechnik GmBHInventors: Hubertus Von Der Waydbrink, Siegfried Scheibe, Jens Meyer, Andrej Wolf, Uwe Traeber, Michael Hentschel
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Publication number: 20130056333Abstract: A transport device and method of transporting a substrate using a rotatable shaft and baffles may be used to extend cleaning intervals for the transport device and reduce deposition of a vapour deposition material upon the transport device.Type: ApplicationFiled: September 7, 2012Publication date: March 7, 2013Inventors: Hubertus Von Der Waydbrink, Georg Laimer, Siegfried Scheibe, Ricky C. Powell, James Ernest Hinkle, James B. Foote
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Publication number: 20120281975Abstract: A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.Type: ApplicationFiled: August 23, 2010Publication date: November 8, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Michael Hentschel, Thomas Meyer, Hubertus Von Der Waydbrink, Marco Kenne, Daniel Stange, Hans-Christian Hecht
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Patent number: 8277890Abstract: The transporting device according to the invention, in particular for transporting sheet-like substrates through a coating installation, comprises transporting rollers which are rotatably mounted on both sides and horizontally arranged transversely in relation to the transporting direction, the uppermost surface lines of the transporting rollers defining the transporting plane, and is characterized in that the end parts of the transporting rollers have a smaller diameter than the middle part of the transporting rollers and in that baffles which are mounted displaceably in the axial direction of the transporting rollers between a first position and a second position are arranged between the end parts of the transporting rollers and the transporting plane. The fact that the baffles are mounted in an axially displaceable manner has the effect of considerably extending the cleaning intervals of the transporting device.Type: GrantFiled: April 7, 2006Date of Patent: October 2, 2012Assignees: First Solar, Inc., Von Ardenne Anlagentechnik GmbHInventors: Hubertus Von Der Waydbrink, Georg Laimer, Siegfried Scheibe, Ricky C. Powell, James Ernest Hinkle, James B. Foote
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Publication number: 20120118541Abstract: A device for controlling the temperature of substrates in a substrate-treatment system, in which a substrate can be guided in the longitudinal extension of the substrate-treatment system in a substrate transport plane within a vacuum chamber past a treatment device, solves the problem of dynamically shaping a dynamic change of the thermal insulation to control the heat transfer in the substrate and thereby, reduce, in particular, thermal inertias by providing a heat-absorbing cooler side of the substrate transport plane. The heat-absorbing cooler can be shielded, at least partially from the substrate transport plane, using an insulation member.Type: ApplicationFiled: June 18, 2010Publication date: May 17, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus Von Der Waydbrink, Thomas Meyer, Michael Hentschel, Reinhardt Bauer, Andrej Wolf, Hans-Christian Hecht
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Publication number: 20120055404Abstract: Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.Type: ApplicationFiled: November 10, 2011Publication date: March 8, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus VON DER WAYDBRINK, Siegfried SCHEIBE, Jens MEYER, Andrej WOLF, Uwe TRAEBER, Michael HENTSCHEL
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Publication number: 20120017833Abstract: Conveyor devices, in particular for use in substrate treatment devices, and configurations of substrate treatment devices, in particular horizontal coating installations for the mass coating of plate-like substrates during the production of solar cells are provided. The conveyor device comprises a multiplicity of conveyor rollers, each mounted rotatably at both ends thereof. During operation of the conveyor device, at least one conveyor roller is displaceable axially, i.e. parallel to the axis of rotation thereof.Type: ApplicationFiled: January 14, 2011Publication date: January 26, 2012Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus Von Der Waydbrink, Michael Hentschel, Marco Kenne, Steffen Lessmann, Thomas Peunsch, Reinhard Jaeger
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Publication number: 20110290186Abstract: A method is provided for producing a processing atmosphere for coating substrates, with this method primarily being used in CVD-processes for precipitating an individual layer or a system of individual layers under defined processing atmospheres, in which processing gas is supplied to a coating chamber in a defined manner and exhausted. Via the method and related devices, a variable processing atmosphere is adjustable inside the coating chamber in a flexible, reliable and homogenous manner, and requiring a reduced maintenance and energy expense, even when the substrate is heated. The processing gas is created by at least one gas channel extending perpendicular in reference to the substrate by way of supplying gas flow or exhausting, with a lateral extension being equivalent to the width of the substrate.Type: ApplicationFiled: July 26, 2011Publication date: December 1, 2011Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus VON DER WAYDBRINK, Michael HENTSCHEL, Marco KENNE, Andrej WOLF
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Publication number: 20110290181Abstract: A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.Type: ApplicationFiled: March 28, 2011Publication date: December 1, 2011Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Damir Muchamedjarow, Hubertus Von Der Waydbrink, Michael HENTSCHEL, Marco KENNE, Reinhardt BAUER, Steffen LEßMANN, Thomas BOCK, Reinhard JAEGER
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Publication number: 20110120682Abstract: An apparatus and method for heat absorption in vacuum coating installations includes an absorber having a line system to supply a coolant. The line system is enclosed by a jacket tight relative to the vacuum chamber, flow spaces are arranged between the line system and the jacket, which are connected to a source of heat exchanger medium so that the line system is flowed around by a heat exchanger medium sealed relative to the vacuum chamber.Type: ApplicationFiled: November 24, 2010Publication date: May 26, 2011Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus VON DER WAYDBRINK, Knut BARTHEL, Michael HENTSCHEL, Steffen LESSMAN, Marco KENNE, Damir MUCHAMEDJAROW, Reinhard JAEGER
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Publication number: 20100080673Abstract: A transport device for a vacuum processing system, a drive unit for high temperature processes in vacuum processing systems, and a vacuum processing system employ a drive unit which operates without the polygonal effect, can be connected endlessly, is suitable for high temperatures, is insensitive to radiation heat, does not generate degassing and does not need a lubricant. The drive unit includes a traction element, guided around at least two deflecting rollers. The traction element is a continuous metal strip.Type: ApplicationFiled: September 29, 2009Publication date: April 1, 2010Applicant: VON ARDENNE ANLAGENTECHNIK GMBHInventors: Hubertus VON DER WAYDBRINK, Udo WILLKOMMEN, Michael HENTSCHEL, Marco KENNE
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Publication number: 20090214784Abstract: The transporting device according to the invention, in particular for transporting sheet-like substrates through a coating installation, comprises transporting rollers which are rotatably mounted on both sides and horizontally arranged transversely in relation to the transporting direction, the uppermost surface lines of the transporting rollers defining the transporting plane, and is characterized in that the end parts of the transporting rollers have a smaller diameter than the middle part of the transporting rollers and in that baffles which are mounted displaceably in the axial direction of the transporting rollers between a first position and a second position are arranged between the end parts of the transporting rollers and the transporting plane. The fact that the baffles are mounted in an axially displaceable manner has the effect of considerably extending the cleaning intervals of the transporting device.Type: ApplicationFiled: April 7, 2006Publication date: August 27, 2009Applicants: VON ARDENNE ANLAGENTECHNIK GMBH, FRIST SOLAR INC.Inventors: Hubertus Von Der Waydbrink, Georg Laimer, Siegfried Scheibe, Ricky C. Powell, James Ernest Hinkle, James B. Foote