Patents by Inventor Hugh Grinolds

Hugh Grinolds has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV light source optical elements
    Publication number: 20070170378
    Abstract: Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e.g., reflectors comprising MLM stacks employing various binary layer materials and capping layer(s) including single and binary capping layers for utilization in plasma generated EUV light source chambers, particularly where the plasma source material is reactive with one or more of the MLM materials.
    Type: Application
    Filed: March 19, 2007
    Publication date: July 26, 2007
    Inventors: Norbert Bowering, Alexander Ershov, Timothy Dyer, Hugh Grinolds
  • EUV light source optical elements
    Publication number: 20050199830
    Abstract: Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e.g., reflectors comprising MLM stacks employing various binary layer materials and capping layer(s) including single and binary capping layers for utilization in plasma generated EUV light source chambers, particularly where the plasma source material is reactive with one or more of the MLM materials.
    Type: Application
    Filed: December 22, 2004
    Publication date: September 15, 2005
    Inventors: Norbert Bowering, Alexander Ershov, Timothy Dyer, Hugh Grinolds