Patents by Inventor Hugo Martijn MAKKINK

Hugo Martijn MAKKINK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
    Patent number: 8690005
    Abstract: A vacuum chamber comprising a plurality of wall panels enclosing an interior space, in which the wall panels are removably attached to form the chamber using a plurality of connection members for locating the wall panels in a predetermined arrangement. The vacuum chamber further comprises one or more sealing members provided at the edges of the wall panels. The wall panels are arranged so that a vacuum tight seal is formed at the edges of the wall panels as a result of forming a vacuum in the interior space.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: April 8, 2014
    Assignee: Mapper Lithography IP B.V.
    Inventors: Sander Baltussen, Guido De Boer, Tijs Frans Teepen, Hugo Martijn Makkink
  • CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER
    Publication number: 20100270299
    Abstract: A vacuum chamber comprising a plurality of wall panels enclosing an interior space, in which the wall panels are removably attached to form the chamber using a plurality of connection members for locating the wall panels in a predetermined arrangement. The vacuum chamber further comprises one or more sealing members provided at the edges of the wall panels. The wall panels are arranged so that a vacuum tight seal is formed at the edges of the wall panels as a result of forming a vacuum in the interior space.
    Type: Application
    Filed: February 19, 2010
    Publication date: October 28, 2010
    Applicant: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Sander BALTUSSEN, Guido DE BOER, Tijs Frans TEEPEN, Hugo Martijn MAKKINK