Abstract: A loading and unloading airlock apparatus for a vacuum treatment chamber which includes an airlock chamber, a transport mechanism inside the chamber to transport a substrate holder arranged to have substrates detachably mounted thereon, an exhaust port to evacuate the chamber to a vacuum, a gas inlet port to introduce a gas to bring the evacuated chamber back to atmospheric pressure, a rectifying plate provided in the chamber adjacent to and at a predetermined distance away from the substrate holder on that side of the substrate holder upon which the substrates are detachably mounted, and a gas introduction pipe having a gas ejection outlet in said chamber for introducing additional gas in a space defined by the predetermined distance to flow along the surfaces of the substrates and the substrate holder.

Abstract: A head with a pick-up coil is attached to a supporter so that the head is freely movable along the direction perpendicular to the surface of a superconductor. Fluid spouted from the spout hole of the head maintains the height (gap space) of the head from the surface. The head is firmly fixed to the supporter in the direction along the surface. Since the relative position of the head in the direction along the surface of the superconductor is changable by drive means for moving the superconductor or the head, the distribution of the magnetic flux which is trapped in the superconductor is measured by scanning the surface of the superconductor with pick-up coil.

Abstract: The present invention relates to a fine particle collector arrangement for vacuum pumps, in which high temperature walls and low temperature walls are alternately provided in the collecting chamber to form gas flow passage which is extended from the inlet conduit connected with the vacuum processing chamber to the outlet conduit connected with the vacuum pump, and the gas flow passage has larger cross section than that of the inlet conduit. Fine particles in gas flowing from the inlet conduit are deposited on the each low temperature wall member to be efficiently collected by the thermal creep velocity caused by the thermophoretic force.

Abstract: A particle collector trap for a vacuum evacuating system wherein there is provided a vessel formed of a double-wall cylinder and having an inlet conduit connected to a vacuum processing chamber and an outlet conduit connected to at least one vacuum pump, a passage for flowing gas is defined between the double walls of the vessel, and one of the double walls is heated and other wall is cooled so as to maintain a predetermined temperature difference therebetween.