Abstract: A sample traveling stage is used for inspection equipment or precision processing equipment for semiconductors or FPDs, (Flat Panel Displays). The sample traveling stage includes a moving part in which a first slide, which is mounted on a base frame and moves along a first guide block, and a second slide, which is mounted on the first slide and moves along a second guide block, is installed in a mutually crossing direction. A traveling part that travels sample through the sample table is installed by a flexure mechanism module formed on the second slide and measures displacement through the X, Y bar mirror installed at the above sample table in a mutually vertical direction. A measuring part includes a laser head, a beam divider, and an interferometer installed at the operating path of the moving part forms the output into a displacement signal by receiving the input beam interference signal reflected by the X, Y bar mirror from receiver.

Abstract: A sample traveling stage is used for inspection equipment or precision processing equipment for semiconductors or FPDs, (Flat Panel Displays). The sample traveling stage includes a moving part in which a first slide, which is mounted on a base frame and moves along a first guide block, and a second slide, which is mounted on the first slide and moves along a second guide block, is installed in a mutually crossing direction. A traveling part that travels sample through the sample table is installed by a flexure mechanism module formed on the second slide and measures displacement through the X, Y bar mirror installed at the above sample table in a mutually vertical direction. A measuring part includes a laser head, a beam divider, and an interferometer installed at the operating path of the moving part forms the output into a displacement signal by receiving the input beam interference signal reflected by the X, Y bar mirror from receiver.

Abstract: A magnet fixing method of a linear servo motor wherein a cage for simultaneously securing positions and angles of a plurality of magnets is injection-molded where the cage is utilized to fix the magnets such that productivity is improved to shorten the working hours and reduce the manufacturing cost. A mutual twisting phenomenon can be prevented by interacting magnetic force among the plurality of magnets to thereby reduce the rate of defects.

Abstract: A magnet fixing method of a linear servo motor wherein a cage for simultaneously securing positions and angles of a plurality of magnets is injection-molded where the cage is utilized to fix the magnets such that productivity is improved to shorten the working hours and reduce the manufacturing cost. A mutual twisting phenomenon can be prevented by interacting magnetic force among the plurality of magnets to thereby reduce the rate of defects.