Abstract: A method of overlay error measurement includes disposing a reference pattern module over a substrate. The substrate includes first and second overlay measurement patterns in first and second locations. The reference pattern module includes first and second reference patterns. The method includes creating a first overlap of the first reference pattern with the first overlay measurement pattern and a second overlap of the second reference pattern with the second overlay measurement pattern. The method further includes determining a first overlay error between the first reference pattern of the reference pattern module and the first overlay measurement pattern of the substrate and determining a second overlay error between the second reference pattern and the second overlay measurement pattern. The method also includes determining a total overlay error between the first and second overlay measurement patterns of the substrate based on the first and second overlay errors.

Abstract: A method of manufacturing a semiconductor device includes forming a plurality of fin structures extending in a first direction over a semiconductor substrate. Each fin structure includes a first region proximate to the semiconductor substrate and a second region distal to the semiconductor substrate. An electrically conductive layer is formed between the first regions of a first adjacent pair of fin structures. A gate electrode structure is formed extending in a second direction substantially perpendicular to the first direction over the fin structure second region, and a metallization layer including at least one conductive line is formed over the gate electrode structure.

Abstract: A web-based tool (as a server) for integrated pharmaceutical analysis and report generation service is provided in the present invention. The server can be used for numerical analysis and report generation for pharmaceutical manufacturing, research and development, and has advantages such as simple operation, complicated but fast calculation and professional report generation, and high accuracy. The server includes at least one pharmaceutical manufacturing and research and development numerical analysis system configured to perform different pharmaceutical manufacturing and research and development numerical analyses and generate different reports.

Abstract: A web-based tool (as a server) for integrated pharmaceutical analysis and report generation service is provided in the present invention. The server can be used for numerical analysis and report generation for pharmaceutical manufacturing, research and development, and has advantages such as simple operation, complicated but fast calculation and professional report generation, and high accuracy. The server includes at least one pharmaceutical manufacturing and research and development numerical analysis system configured to perform different pharmaceutical manufacturing and research and development numerical analyses and generate different reports.

Abstract: The invention is a method for stabilizing heavy metals of the fly ash, the bottom ash or the soil. The stabilization agents which belong to silicate materials, was added to fly ash bottom ash or soil by sprinkling or directly subjoining mix and so on.

Abstract: An inverter for converting a DC input voltage into an AC output voltage using the sigma-delta modulation (SDM) is provided which includes: a SDM controller for producing a modulated output voltage signal according to a reference voltage signal, a driving circuit electrically connected to the SDM controller for producing a driving signal according to the modulated output voltage signal, and a power inversion stage circuit electrically connected to the driving circuit for producing the AC output voltage according to the driving signal. A controller for producing a modulated output voltage signal according to a reference voltage signal is also provided which includes: an integrator circuit, a sample-and-hold circuit electrically connected to the integrator circuit, and a quantizer circuit electrically connected to the sample-and-hold circuit and electrically connected to an input terminal of the integrator circuit through an output terminal thereof.

Abstract: An inverter for converting a DC input voltage into an AC output voltage using the sigma-delta modulation (SDM) is provided which includes: a SDM controller for producing a modulated output voltage signal according to a reference voltage signal, a driving circuit electrically connected to the SDM controller for producing a driving signal according to the modulated output voltage signal, and a power inversion stage circuit electrically connected to the driving circuit for producing the AC output voltage according to the driving signal. A controller for producing a modulated output voltage signal according to a reference voltage signal is also provided which includes: an integrator circuit, a sample-and-hold circuit electrically connected to the integrator circuit, and a quantizer circuit electrically connected to the sample-and-hold circuit and electrically connected to an input terminal of the integrator circuit through an output terminal thereof.