Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

Abstract: The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.

Abstract: A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.

Abstract: A system, circuit, and method are presented for evaluating conditional execution instructions. The system, circuit, and method are adapted to receive an identification instruction comprising the size and the condition of execution of a block of conditional execution instructions. The system, circuit, and method may also be coupled to determine a position and for a conditional execution instruction within a block of conditional execution instructions. The system, circuit, and method can determine whether a conditional field, in which the conditional field comprises a type of conditional execution instruction, meets a condition of execution. By determining the size of the block of conditional execution by an identification instruction and determining the type of conditional execution instruction, the system, circuit and method advantageously decreases the code density of a set of instruction, and advantageously increases the overall performance of a processor.

Abstract: For use in a wide-issue processor, a mechanism for, and method of, conditionally executing instructions and a digital signal processor (DSP) incorporating the mechanism or the method. In one embodiment, the mechanism includes: (1) a conditional execution block state machine that tags and generates link pointers for instructions located in a conditional execution block and (2) conditional link pointer registers, associated with stages in a pipeline of the processor, that contain and cause the link pointers to move therethrough as the instructions located in the conditional execution block move through the stages.

Abstract: A mechanism for, and method of, processing multiply-accumulate instructions with out-of-order completion in a pipeline, for use in a processor having an at least four-wide instruction issue architecture, and a digital signal processor (DSP) incorporating the mechanism or the method. In one embodiment, the mechanism including: (1) a multiply-accumulate unit (MAC) having an initial multiply stage and a subsequent accumulate stage and (2) out-of-order completion logic, associated with the MAC, that causes interim results produced by the multiply stage to be stored when the accumulate stage is unavailable and allows younger instructions to complete before the multiply-accumulate instructions.

Abstract: A computer system having a hierarchical bus structure that allows decoupling of a local bus from a global bus thereof. Decoupling of the local bus is achieved through use of an asynchronous system bus adapter which includes a local bus adapter for handling transactions, initiated by a system device coupled to the global bus, that require access to a local device coupled to the local bus and a global bus adapter for handling transactions, initiated by a local device coupled to the local bus, that require access to a system device coupled to the system bus. The local bus adapter is further configured to issue signals which prevent the global bus adapter from handling transactions initiated by local devices coupled to the local bus while transactions initiated by system devices coupled to the global bus are on-going.

Abstract: A mechanism for resource allocation in a processor, a method of allocating resources in a processor and a digital signal processor incorporating the mechanism or the method. In one embodiment, the mechanism includes: (1) categorization logic, associated with an earlier pipeline stage, that generates instruction type information for instructions to be executed in the processor and (2) priority logic, associated with a later pipeline stage, that allocates functional units of the processor to execution of the instructions based on the instruction type information.

Abstract: For use in a processor having an external memory interface, an instruction prefetch mechanism, a method of prefetching instructions and a digital signal processor incorporating the mechanism or the method. In one embodiment, the mechanism includes: (1) a branch predictor that predicts whether a branch is to be taken, (2) prefetch circuitry, coupled to the branch predictor, that prefetches instructions associated with the branch via the external memory interface if the branch is taken and prefetches sequential instructions via the external memory interface if the branch is not taken and (3) a loop recognizer, coupled to the prefetch circuitry, that determines whether a loop is present in fetched instructions and reinstates a validity of instructions in the loop and prevents the prefetch circuitry from prefetching instructions outside of the loop until the loop completes execution.

Abstract: A processor is disclosed that executes an instruction including a user-defined value (an address or a command) and provides the user-defined value during execution of the instruction. In one embodiment the processor includes a bus interface adapted for coupling to a bus, and the processor drives the user-defined address or command upon one or more signal lines of the bus via the bus interface during execution of the instruction. A described data processing system includes the processor coupled to a device including an addressable register. The device receives a user-defined address from the processor and accesses the addressable register in response to the user-defined address. Methods are disclosed for obtaining a value stored in an addressable register, providing a value stored in an addressable register, storing a value in an addressable register, and modifying a value stored in an addressable register.

Abstract: A processor is disclosed including a register, functional unit(s), and a control unit. The register stores multiple bits, wherein one or more of the bits has a value representing a current electrical power dissipation mode (i.e., power mode) of the processor. The functional unit(s) respond to the power mode signal by altering their electrical power dissipation and issuing an acknowledge signal. The control unit receives a power mode input representing a request to enter a new power mode, and issues the power mode signal in response. The control unit waits for the acknowledge signal(s), and responds to the acknowledge signal(s) by modifying the one or more bits of the register to reflect the new power mode. A method is described for transitioning from a current power mode to a new power mode. A data processing system is disclosed including a peripheral device coupled to the processor.

Abstract: A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.

Abstract: For use in a wide-issue pipelined processor, a mechanism and method for reducing pipeline stalls between nested calls and supporting early prefetching of instructions in nested subroutines and a digital signal processor (DSP) incorporating the mechanism or the method. In one embodiment, the mechanism includes: (1) a program counter (PC) generator that generates return PC values for call instructions in a pipeline of the processor and (2) return PC storage, coupled to the PC generator and located in an execution core of said processor, that stores the return PC values and makes ones of the return PC values available to a PC of the processor upon execution of corresponding return instructions.

Abstract: For use in a wide-issue pipelined processor, a mechanism for, and method of, reducing pipeline stalls between conditional branches and a digital signal processor (DSP) incorporating the mechanism or the method. In one embodiment, the mechanism includes: (1) a mispredict program counter (PC) generator that generates a mispredict PC value for each conditional branch instruction in a pipeline of the processor and (2) mispredict PC storage, coupled to the mispredict PC generator, that stores the mispredict PC value at least until a resolution of the conditional branch instruction occurs and makes the mispredict PC value available to a PC of the processor if the resolution results in a mispredict condition. The mispredict PC storage includes a mispredict PC queue and a number of staging registers wherein the mispredict PC queue has at least as many stages as the number of staging registers.

Abstract: A system for handling distributed results in a high-performance wide-issue superscalar processor having result-forwarding capability is disclosed. The system generally includes buffer logic configured to produce write data and write information to a register file. The register file generally has a plurality of registers and is adapted to receive the write information, the write data, and read information. The register file also includes logic configured to produce the write data as read data output when the read information and the write information specify the same register. An embodiment of the disclosed register file includes multiple registers for storing data, read logic, correction logic, and muxing logic.

Abstract: For use in a processor having separate instruction and data buses, separate instruction and data memories and separate instruction and data units, a mechanism for, and method of, supporting self-modifying code and a digital signal processor incorporating the mechanism or the method. In one embodiment, the mechanism includes: (1) a crosstie bus coupling the instruction bus and the data unit and (2) a request arbiter, coupled between the instruction and data units, that arbitrates requests therefrom for access to the instruction memory.

Abstract: A processor is disclosed that executes an instruction including a user-defined value (an address or a command) and provides the user-defined value during execution of the instruction. In one embodiment the processor includes a bus interface adapted for coupling to a bus, and the processor drives the user-defined address or command upon one or more signal lines of the bus via the bus interface during execution of the instruction. A described data processing system includes the processor coupled to a device including an addressable register. The device receives a user-defined address from the processor and accesses the addressable register in response to the user-defined address. Methods are disclosed for obtaining a value stored in an addressable register, providing a value stored in an addressable register, storing a value in an addressable register, and modifying a value stored in an addressable register.

Abstract: A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes a transfer chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The substrate table includes a first stage moveable in a first dimension, a second stage moveable in a second dimension, and a third stage moveable in a third dimension. Each stage moves independently in its respective dimension. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober stack assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.

Abstract: A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate thereto. A first pushing member is radially coupled to the first body and adapted to urge the substrate in a first direction parallel to the support plate when the first body rotates. In another aspect, a load lock chamber having a substrate support that supports a substrate placed thereon includes a cooling plate that is moved to actuate at least one alignment mechanism. The alignment mechanism includes a pushing member that urges the substrate in a first direction towards a center of the support. The pushing member may additionally rotate about an axis perpendicular to the first direction.

Abstract: For use in an instruction queue having a plurality of instruction slots, a mechanism for queueing and retiring instructions. In one embodiment, the mechanism includes a plurality of tag fields corresponding to the plurality of instruction slots, and control logic, coupled to the tag fields, that assigns tags to the tag fields to denote an order of instructions in the instruction slots. In addition, the mechanism includes a tag multiplexer, coupled to the control logic, that changes the order by reassigning only the tags.