Patents by Inventor Hyeon Dong SONG

Hyeon Dong SONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad conditioning apparatus
    Patent number: 11648644
    Abstract: A polishing pad conditioning apparatus according to an example embodiment of the present inventive concept includes an apparatus body, a pivot arm provided on the apparatus body and including a housing having an internal space and provided at a distal end portion of the pivot arm and a head unit disposed at the distal end portion of the pivot arm. The head unit includes: a rotary motor provided in the internal space of the housing, the rotary motor including a rotary shaft; a foreign material blocking member connected to the rotary shaft; a disk holder connected to the rotary shaft; and a conditioning disk coupled to the disk holder. The foreign material blocking member includes a fluid flow groove configured to guide a movement of fluid for preventing foreign objects from entering the housing on an outer surface of the foreign material blocking member.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: May 16, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Eun Seok Lee, Ja Eung Koo, Kuen Byul Kim, Jeong Min Na, Chang Gil Ryu, Hyeon Dong Song, Young Seok Jang, Jin Suk Hong
  • POLISHING PAD CONDITIONING APPARATUS
    Publication number: 20200206870
    Abstract: A polishing pad conditioning apparatus according to an example embodiment of the present inventive concept includes an apparatus body, a pivot arm provided on the apparatus body and including a housing having an internal space and provided at a distal end portion of the pivot arm and a head unit disposed at the distal end portion of the pivot arm. The head unit includes: a rotary motor provided in the internal space of the housing, the rotary motor including a rotary shaft; a foreign material blocking member connected to the rotary shaft; a disk holder connected to the rotary shaft; and a conditioning disk coupled to the disk holder. The foreign material blocking member includes a fluid flow groove configured to guide a movement of fluid for preventing foreign objects from entering the housing on an outer surface of the foreign material blocking member.
    Type: Application
    Filed: July 22, 2019
    Publication date: July 2, 2020
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Eun Seok LEE, Ja Eung KOO, Kuen Byul KIM, Jeong Min NA, Chang Gil RYU, Hyeon Dong SONG, Young Seok JANG, Jin Suk HONG