Abstract: A gripper and a driving method using the same are disclosed, wherein an actuator has a configuration combined with a piezoelectric operating unit and a bending structure, whereby an amount of variation of a gap between fingers are amplified more than that of the piezoelectric operating unit by generating a movement of the fingers perpendicular to a movement direction of the piezoelectric operating unit, and wherein the gripper having arms including a strain gauge sensor can precisely measure a force applied to a micro object.

Abstract: A gripper and a driving method using the same are disclosed, wherein an actuator has a configuration combined with a piezoelectric operating unit and a bending structure, whereby an amount of variation of a gap between fingers are amplified more than that of the piezoelectric operating unit by generating a movement of the fingers perpendicular to a movement direction of the piezoelectric operating unit, and wherein the gripper having arms including a strain gauge sensor can precisely measure a force applied to a micro object.

Abstract: The present invention provides an apparatus for solution component analysis and fabricating method thereof, by which a mixing channel, reaction channel, and measurement channel are formed as continuous micro-grooves on one substrate to implement the miniature apparatus for analyzing solution components, by which the apparatus is provided with portability facilitating access to a spot outside a laboratory to perform an instant sample analysis, and by which an optical system configuration for sample analysis can be simplified in a manner of facilitating an optical transfer by forming a transparent silicon oxide (SiO2) layer between a micro channel of the apparatus and an optical fiber to insert the optical fiber therein.

Abstract: The present invention provides an apparatus for solution component analysis and fabricating method thereof, by which a mixing channel, reaction channel, and measurement channel are formed as continuous micro-grooves on one substrate to implement the miniature apparatus for analyzing solution components, by which the apparatus is provided with portability facilitating access to a spot outside a laboratory to perform an instant sample analysis, and by which an optical system configuration for sample analysis can be simplified in a manner of facilitating an optical transfer by forming a transparent silicon oxide (SiO2) layer between a micro channel of the apparatus and an optical fiber to insert the optical fiber therein.

Abstract: A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response to a pressure stimulus. A first capacitor is provided on the diaphragm and at least a second capacitor is provided on a bulk portion of the substrate so as to be adjacent to the first capacitor. The first and the second capacitor are connected to each other in series, wherein capacitance differs between the first and the second capacitor when the diaphragm moves up and down in response to the pressure stimulus.

Abstract: Disclosed is a microlens manufacturing method which comprises the step of: positioning a X-ray mask for manufacturing the microlens on an substrate on which a sensitive film is formed, and arranging a rotation axis of the substrate and a central axis of the X-ray mask; applying X-rays to the X-ray mask to expose the sensitive film while fixing the X-ray mask and rotating the substrate; developing the sensitive film to form the microlens; performing an electroplating process on the plating base to form a metal layer; and separating the metal layer from the sensitive film structure and combining the metal layer with a mold frame for injection molding the microlens and manufacturing an injection mold.

Abstract: A differential capacitive pressure sensor includes a substrate, a first to a third lower electrode sequentially arranged on the substrate, a first to a third upper electrode respectively floating over the first to the third lower electrode, and a first to a third supporting member downwardly extending from the first to the third upper electrode, respectively. The substrate includes a diaphragm positioned at a center portion thereof and the diaphragm has a reduced thickness. The second lower electrode is positioned corresponding to the diaphragm, and the first lower electrode and the second lower electrode are electrically connected to each other. The second upper electrode crosses over the second lower electrode. The first and the second supporting member contact the second lower electrode.