Abstract: An extreme ultra-violet (EUV) lithography process includes lithographically patterning first through fourth photoresist regions on respective first through fourth regions of a semiconductor substrate, in sequence, using a mask. This mask includes a main area in which a main pattern is defined, a first dummy area in which a first dummy pattern is defined, a second dummy area in which a plurality of second sub-dummy patterns are defined at corresponding corners of the mask, and an alignment area including an alignment pattern therein that is spaced farther from a center of the main area relative to the first and second dummy areas. During the lithographically patterning, at least part of the alignment area on the first region of the substrate is exposed at least three times to EUV light, using the mask.

Abstract: An electronic device includes a display panel, an antenna, and a circuit film. The antenna overlaps the display panel. The antenna includes an antenna base film having a first surface and a second surface opposite each other. The first surface is disposed between the display panel and the second surface. The antenna further includes an antenna pattern, an antenna feed line, and an antenna pad each being disposed on the first surface. The antenna pattern is electrically connected through the antenna feed line to the antenna pad. The circuit film is electrically connected to the antenna pad.

Abstract: Disclosed is an electronic device that includes a plurality of first sensing electrodes arranged in a first direction, a plurality of second sensing electrodes arranged in a second direction crossing the first direction, and an antenna pattern including a first sub-antenna pattern surrounded by one of the plurality of first sensing electrodes and a second sub-antenna pattern electrically connected to the first sub-antenna pattern and disposed between the one of the plurality of first sensing electrodes and one of the plurality of second sensing electrodes.

Abstract: A display device is disclosed that includes a display panel, a sensor substrate, sensing electrodes, an antenna pattern, an antenna signal line, an antenna pad, and an antenna frame. The sensor substrate is disposed on an upper surface of the display panel and includes a touch sensing area, a first peripheral area adjacent to the touch sensing area, and a second peripheral area bent from the first peripheral area. The sensing electrodes and the antenna pattern are disposed on the touch sensing area of the sensor substrate. The antenna signal line is connected from the antenna pattern and extends to the first peripheral area and the second peripheral area. The antenna pad is disposed in the second peripheral area and connects to the antenna signal line. The antenna frame is attached to a lower surface of the display panel and defines a bending shape of the sensor substrate.

Abstract: Disclosed is an input sensing part that includes sensing electrodes disposed in an active area, a first ground pattern disposed in an inactive area around the active area, a first ground pad disposed in the inactive area and electrically connected to the first ground pattern, a first antenna pattern insulated from the sensing electrodes and disposed in the active area, a first signal pad that extends from the first antenna pattern and disposed in the inactive area, a 1-1-th ground pad disposed adjacent to the first signal pad and electrically connected to the first ground pattern, and a 1-2-th ground pad disposed adjacent to the first signal pad.

Abstract: A power plant thermal-management-system control method for controlling thermal management systems in PMCs is provided. The thermal management systems are operated based on coolant temperatures of the PMCs of a power plant of a fuel cell vehicle to prevent the temperatures of the PMCs from deviating from a reference range, which in turn prevents degradation of fuel cells.

Abstract: A photoresist composition including an organometallic compound, and a method for fabricating a semiconductor device using the same are provided. The photoresist composition may include an organometallic compound, a radical sensitizer including a structure of Chemical formula 2-1 or Chemical formula 2-2, and a solvent. In Chemical formula 2-1, A1 is a substituted or unsubstituted hydrocarbon group having 1 to 20 carbon atoms, and R1, R2 and R3 are each independently hydrogen, a halogen, a substituted or unsubstituted hydrocarbon group having 1 to 20 carbon atoms, or a hetero-functional group. In Chemical formula 2-2, A2 is a substituted or unsubstituted hydrocarbon group having 1 to 20 carbon atoms, and R4 and R5 are each independently hydrogen, a halogen, a substituted or unsubstituted hydrocarbon group having 1 to 20 carbon atoms, or a hetero-functional group.

Abstract: A display device includes sensor electrodes for sensing a touch. The sensor electrodes may also be used as an antenna. A display circuit board of the display device includes a radio signal connection unit for providing touch sensing signals and radio reception signals of the sensor electrodes to a touch driving circuit and an antenna driving circuit. Therefore, the display device not only senses a user's touch using the sensor electrodes but also conducts mobile communication using the sensor electrodes. For example, sensor electrodes for sensing a touch may also be used as an antenna.

Abstract: A display device includes a display panel configured to display an image, a sensing panel configured to at least partially overlap the display panel and that includes a sensing area and a non-sensing area, a sensing panel controller configured to drive the sensing panel, a plurality of sensing electrodes disposed in the sensing area, and a plurality of sensing lines electrically connected to the plurality of sensing electrodes, respectively. The sensing panel controller is configured to apply the same sensing voltage to each of the plurality of sensing lines or to apply a reference voltage different from the sensing voltage to at least some sensing lines among the plurality of sensing lines.

Abstract: A touch sensing unit includes a first electrode including a plurality of first main patterns arranged in a first direction and a first outer pattern arranged on one sides of the plurality of first main patterns, a second electrode including a plurality of second main patterns arranged in a second direction intersecting the first direction and a second outer pattern arranged on one sides of the plurality of second main patterns, a first compensation pattern extending along an edge of the first outer pattern, and a first signal wire connected to at least one of the first outer pattern and the first compensation pattern. The first compensation pattern includes a first compensation connection part protruding toward the first outer pattern and connected to the first outer pattern.

Abstract: Disclosed herein is an integrated reservoir tank assembly for a vehicle. The integrated reservoir tank assembly for a vehicle includes an integrated reservoir tank in which an inner space is partitioned into a first chamber configured to store cooling water of a first cooling circuit and a second chamber configured to store cooling water of a second cooling circuit by a partition wall; a first electric water pump integrally coupled to the first chamber of the integrated reservoir tank and configured to transmit the cooling water stored in the first chamber along a cooling water line of the first cooling circuit; and a second electric water pump integrally coupled to the second chamber of the integrated reservoir tank and configured to transmit the cooling water stored in the second chamber along a cooling water line of the second cooling circuit.

Abstract: An apparatus for processing natural language according to an embodiment includes a collection module that collects documents having tags, a parsing module that extracts text from the collected documents and extracts tag-related information on the tag surrounding each extracted text, and a preprocessing module that generates tokens of a preset unit by tokenizing each extracted text, generates token position information for each token in full text of the document, and sets the token and the token position information as training data in matching with the tag-related information.

Abstract: A substrate treatment apparatus including a chamber; a lower electrode in the chamber, wherein the substrate is on the lower electrode; an upper electrode in the chamber, and above the lower electrode; a pulse signal generator configured to generate a pulse signal; and a bias power supply configured to generate bias power having a pulsed non-sinusoidal waveform using the pulse signal, and supply the generated bias power to the lower electrode, wherein the bias power supply includes a DC power generator configured to receive the pulse signal and generate a direct-current (DC) voltage subjected to feedforward compensation based on the pulse signal; and a modulator configured to generate a power signal having a non-sinusoidal waveform using the DC voltage, and filter the power signal using the pulse signal to generate the bias power having the pulsed non-sinusoidal waveform.

Abstract: A power plant thermal-management-system control method for controlling thermal management systems in PMCs is provided. The thermal management systems are operated based on coolant temperatures of the PMCs of a power plant of a fuel cell vehicle to prevent the temperatures of the PMCs from deviating from a reference range, which in turn prevents degradation of fuel cells.

Abstract: A method for operating a medical imaging device includes obtaining lesion information on at least one lesion detected from a medical image, determining a shape and a position of at least one contour corresponding to the at least one lesion based on the obtained lesion information, determining a position of at least one text region that includes a text indicating the lesion information on the at least one lesion in the medical image, and displaying the at least one contour and the text included in the at least one text region on the medical image, based on the determined shape and position of the at least one contour and the determined position of the at least one text region.

Abstract: An apparatus for training a document summarization model includes a token generation unit, a named entity recognition unit, and a model training unit. The token generation unit generates document tokens and summarization tokens. The named entity recognition unit assigns named entity token status to a summarization token, recognized as a named entity through NER, and assigns non-named entity token status to the other tokens. The model training unit obtains feature vectors by inputting the plurality of document tokens into an encoder inside a document summarization model, obtains a first loss related to the named entity token, a second loss related to the other tokens, and a total loss using a weighted value by inputting the feature vectors, the summarization tokens, the named entity token, and the non-named entity token into a decoder inside the document summarization model, and trains the document summarization model on the basis of the total loss.

Abstract: Disclosed herein is an integrated reservoir tank assembly for a vehicle. The integrated reservoir tank assembly for a vehicle includes an integrated reservoir tank in which an inner space is partitioned into a first chamber configured to store cooling water of a first cooling circuit and a second chamber configured to store cooling water of a second cooling circuit by a partition wall; a first electric water pump integrally coupled to the first chamber of the integrated reservoir tank and configured to transmit the cooling water stored in the first chamber along a cooling water line of the first cooling circuit; and a second electric water pump integrally coupled to the second chamber of the integrated reservoir tank and configured to transmit the cooling water stored in the second chamber along a cooling water line of the second cooling circuit.

Abstract: A display device includes sensor electrodes for sensing a touch. The sensor electrodes may also be used as an antenna. A display circuit board of the display device includes a radio signal connection unit for providing touch sensing signals and radio reception signals of the sensor electrodes to a touch driving circuit and an antenna driving circuit. Therefore, the display device not only senses a user's touch using the sensor electrodes but also conducts mobile communication using the sensor electrodes. For example, sensor electrodes for sensing a touch may also be used as an antenna.

Abstract: A system for estimating a concentration of hydrogen in a fuel cell is provided. The system includes a hydrogen supply line supplying the hydrogen to the fuel cell and a time measurement sensor measuring a time duration from a point in time when an operation of the fuel cell ends to a point in time when the fuel cell restarts. A controller estimates an amount of air introduced into the fuel cell during the time duration using the measured time duration and estimates a concentration of hydrogen in the hydrogen supply line at the time of restarting the fuel cell based on the measured time duration and the estimated amount of introduced air.

Abstract: An apparatus for training a dialogue summary model according to an embodiment includes a parameter transferer configured to transfer one or more learning parameter values of a pre-trained natural language processing model to a sequence-to-sequence-based dialogue summary model, and a model trainer configured to train the dialogue summary model by using the transferred learning parameter values as initial values for learning parameters of each of an encoder and a decoder in the dialogue summary model.