Abstract: Provided is a defect analysis device which may include a light source that irradiates an analysis target layer of an element with light, a position adjuster that adjusts a position in the analysis target in the analysis target to be irradiated with the light, a detector that measures a current value of current flowing between a source area of the element electrically connected to one end of the analysis target layer and a drain area of the element electrically connected to the other end of the analysis target layer in the element, and an analyzer that acquires quantitative data related to a defect in the analysis target layer on the basis of the current value in which, in a first mode, a plurality of areas of the analysis target layer are sequentially irradiated with the light.

Abstract: A method of manufacturing a stacked structure includes forming a first metal buffer layer including crystal grains on a base substrate, forming a second metal buffer material layer on the first metal buffer layer, and crystallizing the second metal buffer material layer to form a second metal buffer layer, wherein the second metal buffer material layer includes crystal grains, and a density of the crystal grains of the second metal buffer material layer is lower than a density of the crystal grains of the first metal buffer layer.

Abstract: In one example, a voltage generator includes a plurality of voltage pumps, a voltage detection circuit, an oscillator, and a control circuit. The plurality of voltage pumps are configured to perform voltage pumping operations in a sequence and output a pumping voltage. The voltage detection circuit is configured to detect a voltage level of the pumping voltage and output a detection signal. The control circuit is configured to output, in response to the detection signal, a plurality of divided oscillator signals based on an oscillator signal of the oscillator, to enable a different one of the voltage pumps to begin each sequence of voltage pumping operations each time the pumping voltage is less than a threshold voltage.

Abstract: In one example, a voltage generator includes a plurality of voltage pumps, a voltage detection circuit, an oscillator, and a control circuit. The plurality of voltage pumps are configured to perform voltage pumping operations in a sequence and output a pumping voltage. The voltage detection circuit is configured to detect a voltage level of the pumping voltage and output a detection signal. The control circuit is configured to output, in response to the detection signal, a plurality of divided oscillator signals based on an oscillator signal of the oscillator, to enable a different one of the voltage pumps to begin each sequence of voltage pumping operations each time the pumping voltage is less than a threshold voltage.

Abstract: In one example, a voltage generator includes a plurality of voltage pumps, a voltage detection circuit, an oscillator, and a control circuit. The plurality of voltage pumps are configured to perform voltage pumping operations in a sequence and output a pumping voltage. The voltage detection circuit is configured to detect a voltage level of the pumping voltage and output a detection signal. The control circuit is configured to output, in response to the detection signal, a plurality of divided oscillator signals based on an oscillator signal of the oscillator, to enable a different one of the voltage pumps to begin each sequence of voltage pumping operations each time the pumping voltage is less than a threshold voltage.

Abstract: A temperature sensor generates a variable voltage whose level decreases linearly as a temperature increases, and compares the variable voltage with first and second reference voltages to generate first and second temperature codes to measure the temperature.

Abstract: In one example, a voltage generator includes a plurality of voltage pumps, a voltage detection circuit, an oscillator, and a control circuit. The plurality of voltage pumps are configured to perform voltage pumping operations in a sequence and output a pumping voltage. The voltage detection circuit is configured to detect a voltage level of the pumping voltage and output a detection signal. The control circuit is configured to output, in response to the detection signal, a plurality of divided oscillator signals based on an oscillator signal of the oscillator, to enable a different one of the voltage pumps to begin each sequence of voltage pumping operations each time the pumping voltage is less than a threshold voltage.

Abstract: A comparison circuit includes: an offset removal unit configured to store offset information of a comparator in response to a reference voltage, and compare a pad voltage with the reference voltage based on the offset information to drive a first node; and a comparison signal output unit configured to buffer a signal of the first node and output a comparison signal.

Abstract: Impedance calibration circuits are provided. The impedance calibration circuit includes an operation control signal generator and an impedance calibrator. The operation control signal generator receives temperature code signals to generate an operation control signal enabled when an internal temperature is changed from a first temperature to a second temperature. The impedance calibrator receives an external command signal or the operation control signal to generate pull-up code signals for pulling up an output signal and pull-down code signals for pulling down the output signal according to an external resistor.

Abstract: A temperature sensor includes: a gate voltage generation unit including a bias resistor, a first source resistor, and a first MOS transistor and configured to generate a gate voltage; and a variable voltage output unit including an output resistor, a second source resistor, and a second MOS transistor and configured to generate the variable voltage.

Abstract: Impedance calibration circuits are provided. The impedance calibration circuit includes an operation control signal generator and an impedance calibrator. The operation control signal generator receives temperature code signals to generate an operation control signal enabled when an internal temperature is changed from a first temperature to a second temperature. The impedance calibrator receives an external command signal or the operation control signal to generate pull-up code signals for pulling up an output signal and pull-down code signals for pulling down the output signal according to an external resistor.

Abstract: A negative voltage pumping unit including a driver configured to receive an external high-voltage and an external voltage and drive and output an oscillator signal, and a capacitor configured to perform a pumping operation and generate a negative voltage; and an internal circuit configured to receive a ground voltage and the voltage of a node.

Abstract: A negative voltage pumping unit including a driver configured to receive an external high-voltage and an external voltage and drive and output an oscillator signal, and a capacitor configured to perform a pumping operation and generate a negative voltage; and an internal circuit configured to receive a ground voltage and the voltage of a node.

Abstract: A temperature sensor generates a variable voltage whose level decreases linearly as a temperature increases, and compares the variable voltage with first and second reference voltages to generate first and second temperature codes to measure the temperature.

Abstract: A temperature sensor generates a variable voltage whose level decreases linearly as a temperature increases, and compares the variable voltage with first and second reference voltages to generate first and second temperature codes to measure the temperature.

Abstract: A comparison circuit includes: an offset removal unit configured to store offset information of a comparator in response to a reference voltage, and compare a pad voltage with the reference voltage based on the offset information to drive a first node; and a comparison signal output unit configured to buffer a signal of the first node and output a comparison signal.

Abstract: An internal voltage generating circuit includes a supply voltage driving unit, an internal voltage driving unit, and a driving control unit. The supply voltage driving unit is configured to compare a voltage division signal of a supply voltage with a bias voltage, generate a first pull-up signal, and drive the supply voltage in response to the first pull-up signal. The internal voltage driving unit is configured to receive the supply voltage, generate a second pull-up signal, and drive an internal voltage. The driving control unit is configured to select the first pull-up signal or a power supply voltage as a third pull-up signal.

Abstract: A temperature sensor includes: a gate voltage generation unit including a bias resistor, a first source resistor, and a first MOS transistor and configured to generate a gate voltage; and a variable voltage output unit including an output resistor, a second source resistor, and a second MOS transistor and configured to generate the variable voltage.

Abstract: An internal voltage generating circuit includes a supply voltage driving unit, an internal voltage driving unit, and a driving control unit. The supply voltage driving unit is configured to compare a voltage division signal of a supply voltage with a bias voltage, generate a first pull-up signal, and drive the supply voltage in response to the first pull-up signal. The internal voltage driving unit is configured to receive the supply voltage, generate a second pull-up signal, and drive an internal voltage. The driving control unit is configured to select the first pull-up signal or a power supply voltage as a third pull-up signal.

Abstract: A temperature sensor generates a variable voltage whose level decreases linearly as a temperature increases, and compares the variable voltage with first and second reference voltages to generate first and second temperature codes to measure the temperature.