Patents by Inventor Hyun-Su Sim
Hyun-Su Sim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11967529Abstract: Methods of manufacturing a semiconductor chip are provided. The methods may include providing a semiconductor substrate including integrated circuit regions and a cut region. The cut region may be between the integrated circuit regions. The methods may also include forming a modified layer by emitting a laser beam into the semiconductor substrate along the cut region, polishing an inactive surface of the semiconductor substrate to propagate a crack from the modified layer, and separating the integrated circuit regions along the crack. The cut region may include a plurality of multilayer metal patterns on an active surface of the semiconductor substrate, which is opposite to the inactive surface of the semiconductor substrate. The plurality of multilayer metal patterns may form a pyramid structure when viewed in cross section.Type: GrantFiled: November 10, 2020Date of Patent: April 23, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Byung-moon Bae, Yoon-sung Kim, Yun-hee Kim, Hyun-su Sim, Jun-ho Yoon, Jung-ho Choi
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Patent number: 11710706Abstract: A semiconductor device includes a semiconductor substrate having a scribe lane defined therein. A plurality of semiconductor chips is formed on an upper surface of the semiconductor substrate. At least one conductive structure is arranged on an upper surface of the semiconductor substrate, within the scribe lane thereof. A fillet is arranged on at least one side surface of the conductive structure. The fillet is configured to induce a cut line which spreads along the scribe lane, through a central portion of the conductive structure.Type: GrantFiled: August 9, 2021Date of Patent: July 25, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Su Sim, Yoon-Sung Kim, Yun-Hee Kim, Byung-Moon Bae, Jun-Ho Yoon
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Patent number: 11244911Abstract: A semiconductor chip includes a substrate including: a main chip region; and a scribe lane surrounding the main chip region; a lower interlayer insulating layer disposed on the substrate in the scribe lane; a circuit structure disposed on the lower interlayer insulating layer in the scribe lane; and a pad structure disposed on the lower interlayer insulating layer. The circuit structure and the pad structure are disposed to be spaced apart from each other in a longitudinal direction of the scribe lane.Type: GrantFiled: April 19, 2019Date of Patent: February 8, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yoon Sung Kim, Yun Hee Kim, Byung Moon Bae, Hyun Su Sim, Jun Ho Yoon, Jung Ho Choi
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Publication number: 20210366837Abstract: A semiconductor device includes a semiconductor substrate having a scribe lane defined therein. A plurality of semiconductor chips is formed on an upper surface of the semiconductor substrate. At least one conductive structure is arranged on an upper surface of the semiconductor substrate, within the scribe lane thereof. A fillet is arranged on at least one side surface of the conductive structure. The fillet is configured to induce a cut line which spreads along the scribe lane, through a central portion of the conductive structure.Type: ApplicationFiled: August 9, 2021Publication date: November 25, 2021Inventors: Hyun-Su Sim, Yoon-Sung Kim, Yun-Hee Kim, Byung-Moon Bae, Jun-Ho Yoon
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Patent number: 11145601Abstract: A semiconductor chip including an alignment pattern is provided. The semiconductor chip includes a substrate associated with a main chip region of a semiconductor wafer and including a scribe lane. A lower interlayer insulating layer is disposed on the substrate, a low-K layer including dummy metal patterns is disposed on the lower interlayer insulating layer, an alignment pattern is disposed on the low-K layer, and a passivation layer covers the alignment pattern.Type: GrantFiled: June 4, 2019Date of Patent: October 12, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Yoon Sung Kim, Yun Hee Kim, Byung Moon Bae, Hyun Su Sim, Jun Ho Yoon, Jung Ho Choi
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Patent number: 11107773Abstract: A semiconductor device includes a semiconductor substrate having a scribe lane defined therein. A plurality of semiconductor chips is formed on an upper surface of the semiconductor substrate. At least one conductive structure is arranged on an upper surface of the semiconductor substrate, within the scribe lane thereof. A fillet is arranged on at least one side surface of the conductive structure. The fillet is configured to induce a cut line which spreads along the scribe lane, through a central portion of the conductive structure.Type: GrantFiled: June 13, 2019Date of Patent: August 31, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Su Sim, Yoon-Sung Kim, Yun-Hee Kim, Byung-Moon Bae, Jun-Ho Yoon
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Publication number: 20210057278Abstract: Methods of manufacturing a semiconductor chip are provided. The methods may include providing a semiconductor substrate including integrated circuit regions and a cut region. The cut region may be between the integrated circuit regions. The methods may also include forming a modified layer by emitting a laser beam into the semiconductor substrate along the cut region, polishing an inactive surface of the semiconductor substrate to propagate a crack from the modified layer, and separating the integrated circuit regions along the crack. The cut region may include a plurality of multilayer metal patterns on an active surface of the semiconductor substrate, which is opposite to the inactive surface of the semiconductor substrate. The plurality of multilayer metal patterns may form a pyramid structure when viewed in cross section.Type: ApplicationFiled: November 10, 2020Publication date: February 25, 2021Inventors: Byung-moon Bae, Yoon-sung Kim, Yun-hee Kim, Hyun-su Sim, Jun-ho Yoon, Jung-ho Choi
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Patent number: 10886234Abstract: A semiconductor device is provided. The semiconductor device includes: a substrate which includes a semiconductor chip region and a scribe line region surrounding the semiconductor chip region; an insulating film arranged over the semiconductor chip region and the scribe line region on the substrate, and including a first surface, a second surface opposite to the first surface, a third surface connecting the first surface and the second surface, and a fourth surface opposite to the third surface and connecting the first surface and the second surface; and an opening portion formed on the second surface of the insulating film and the fourth surface of the insulating film to expose the substrate, wherein the opening portion is formed in the scribe line region, and the first surface of the insulating film and the third surface of the insulating film do not include an opening portion which expose the substrate.Type: GrantFiled: August 7, 2019Date of Patent: January 5, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jun Ho Yoon, Yoon Sung Kim, Yun Hee Kim, Byung Moon Bae, Hyun Su Sim, Jung Ho Choi
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Patent number: 10854517Abstract: Methods of manufacturing a semiconductor chip are provided. The methods may include providing a semiconductor substrate including integrated circuit regions and a cut region. The cut region may be between the integrated circuit regions. The methods may also include forming a modified layer by emitting a laser beam into the semiconductor substrate along the cut region, polishing an inactive surface of the semiconductor substrate to propagate a crack from the modified layer, and separating the integrated circuit regions along the crack. The cut region may include a plurality of multilayer metal patterns on an active surface of the semiconductor substrate, which is opposite to the inactive surface of the semiconductor substrate. The plurality of multilayer metal patterns may form a pyramid structure when viewed in cross section.Type: GrantFiled: March 20, 2019Date of Patent: December 1, 2020Assignee: Samsung Electronics Co., Ltd.Inventors: Byung-moon Bae, Yoon-sung Kim, Yun-hee Kim, Hyun-su Sim, Jun-ho Yoon, Jung-ho Choi
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Publication number: 20200168556Abstract: A semiconductor device includes a semiconductor substrate having a scribe lane defined therein. A plurality of semiconductor chips is formed on an upper surface of the semiconductor substrate. At least one conductive structure is arranged on an upper surface of the semiconductor substrate, within the scribe lane thereof. A fillet is arranged on at least one side surface of the conductive structure. The fillet is configured to induce a cut line which spreads along the scribe lane, through a central portion of the conductive structure.Type: ApplicationFiled: June 13, 2019Publication date: May 28, 2020Inventors: HYUN-SU SIM, YOON-SUNG KIM, YUN-HEE KIM, BYUNG-MOON BAE, JUN-HO YOON
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Patent number: 10651105Abstract: Provided is a semiconductor chip capable of withstanding damage such as cracks created in the fabrication process. A semiconductor chip according to the inventive concept includes: a semiconductor substrate including a residual scribe lane surrounding a die region and a periphery of a die of the die region, a passivation layer covering a portion above the semiconductor substrate, a cover protection layer covering a portion of the passivation layer and the die region, and a cover protection layer formed integrally with a buffering protection layer covering a portion of the residual scribe lane, wherein the buffering protection layer includes a corner protection layer in contact with a portion of an edge adjacent to a corner of the semiconductor substrate, and an extending protection layer extending along the residual scribe lane from the corner protection layer and in contact with the cover protection layer.Type: GrantFiled: January 21, 2019Date of Patent: May 12, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yun-Hee Kim, Yoon-Sung Kim, Byung-Moon Bae, Hyun-Su Sim
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Publication number: 20200126932Abstract: A semiconductor chip includes a substrate including: a main chip region; and a scribe lane surrounding the main chip region; a lower interlayer insulating layer disposed on the substrate in the scribe lane; a circuit structure disposed on the lower interlayer insulating layer in the scribe lane; and a pad structure disposed on the lower interlayer insulating layer. The circuit structure and the pad structure are disposed to be spaced apart from each other in a longitudinal direction of the scribe lane.Type: ApplicationFiled: April 19, 2019Publication date: April 23, 2020Applicant: Samsung Electronics Co., Ltd.Inventors: Yoon Sung KIM, Yun Hee Kim, Byung Moon Bae, Hyun Su Sim, Jun Ho Yoon, Jung Ho Choi
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Publication number: 20200126927Abstract: A semiconductor chip including an alignment patter is provided. The semiconductor ship includes a substrate associated with a main chip region of a semiconductor wafer and including a scribe lane. A lower interlayer insulating layer is disposed on the substrate, a low-K layer including dummy metal patterns is disposed on the lower interlayer insulating layer, an alignment pattern is disposed on the low-K layer, and a passivation layer covers the alignment pattern.Type: ApplicationFiled: June 4, 2019Publication date: April 23, 2020Inventors: YOON SUNG KIM, YUN HEE KIM, BYUNG MOON BAE, HYUN SU SIM, JUN HO YOON, JUNG HO CHOI
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Publication number: 20200066650Abstract: A semiconductor device is provided. The semiconductor device includes: a substrate which includes a semiconductor chip region and a scribe line region surrounding the semiconductor chip region; an insulating film arranged over the semiconductor chip region and the scribe line region on the substrate, and including a first surface, a second surface opposite to the first surface, a third surface connecting the first surface and the second surface, and a fourth surface opposite to the third surface and connecting the first surface and the second surface; and an opening portion formed on the second surface of the insulating film and the fourth surface of the insulating film to expose the substrate, wherein the opening portion is formed in the scribe line region, and the first surface of the insulating film and the third surface of the insulating film do not include an opening portion which expose the substrate.Type: ApplicationFiled: August 7, 2019Publication date: February 27, 2020Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jun Ho YOON, Yoon Sung KIM, Yun Hee KIM, Byung Moon BAE, Hyun Su SIM, Jung Ho CHOI
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Publication number: 20200058551Abstract: Methods of manufacturing a semiconductor chip are provided. The methods may include providing a semiconductor substrate including integrated circuit regions and a cut region. The cut region may be between the integrated circuit regions. The methods may also include forming a modified layer by emitting a laser beam into the semiconductor substrate along the cut region, polishing an inactive surface of the semiconductor substrate to propagate a crack from the modified layer, and separating the integrated circuit regions along the crack. The cut region may include a plurality of multilayer metal patterns on an active surface of the semiconductor substrate, which is opposite to the inactive surface of the semiconductor substrate. The plurality of multilayer metal patterns may form a pyramid structure when viewed in cross section.Type: ApplicationFiled: March 20, 2019Publication date: February 20, 2020Inventors: Byung-moon Bae, Yoon-sung Kim, Yun-hee Kim, Hyun-su Sim, Jun-ho Yoon, Jung-ho Choi
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Publication number: 20200020604Abstract: Provided is a semiconductor chip capable of withstanding damage such as cracks created in the fabrication process. A semiconductor chip according to the inventive concept includes: a semiconductor substrate including a residual scribe lane surrounding a die region and a periphery of a die of the die region, a passivation layer covering a portion above the semiconductor substrate, a cover protection layer covering a portion of the passivation layer and the die region, and a cover protection layer formed integrally with a buffering protection layer covering a portion of the residual scribe lane, wherein the buffering protection layer includes a corner protection layer in contact with a portion of an edge adjacent to a corner of the semiconductor substrate, and an extending protection layer extending along the residual scribe lane from the corner protection layer and in contact with the cover protection layer.Type: ApplicationFiled: January 21, 2019Publication date: January 16, 2020Inventors: Yun-Hee Kim, Yoon-Sung Kim, Byung-Moon Bae, Hyun-Su Sim