Patents by Inventor Hyun Sung Joo

Hyun Sung Joo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for selectively oxidizing a silicon/metal composite film stack
    Patent number: 6534401
    Abstract: A method of selectively oxidizing a composite film. According to the present invention a substrate of having a composite film comprising of lower silicon film, a barrier layer, and upper metal film on the barrier layer is placed into a reaction chamber. An inert gas is then fed into reaction chamber to create an inert ambient in the reaction chamber. The temperature of the substrate is then raised or ramped from first temperature to a second temperature in the inert ambient. After the temperature of the substrate is raised to the second temperature the substrate is exposed to an ambient which oxidizes the silicon but which does not oxidize the metal.
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: March 18, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Hyun Sung Joo, David R. Lopes