Abstract: A monolithic ink-jet printhead includes a substrate having an ink chamber to be supplied with ink to be ejected on a front surface thereof, a manifold for supplying ink to the ink chamber on a rear surface thereof, and an ink channel in communication with the ink chamber and the manifold, a nozzle plate including a plurality of passivation layers stacked on the substrate and a heat dissipating layer overlying the passivation layers, the nozzle plate having a nozzle penetrating the nozzle plate, a heater formed between adjacent passivation layers and located above the ink chamber for heating the ink to be supplied within the ink chamber, and a conductor provided between adjacent passivation layers, the conductor being electrically connected to the heater for applying current across the heater, wherein the heat dissipating layer is made of a thermally conductive metal for dissipating heat from the heater.

Abstract: The present invention is for a vibration-type micro-gyroscope. The micro-gyroscope according to the present invention has an inner driving gimble and an outer detecting gimble. The inner gimble is driven by electrostatic force and the outer gimble detects variance of capacitance induced by angular velocity. The outer gimble is connected to a fixing axis through a first plate-spring and the inner gimble is connected to the outer gimble through a second plate-spring.