Abstract: The present invention relates to a heterojunction semiconductor substrate having excellent dielectric properties, a method of manufacturing the same, and an electronic device using the same. The present invention provides a heterojunction semiconductor substrate with improved interlayer adhesion, low leakage current, and excellent dielectric properties that maintain strength in a ferroelectric fatigue experiment by interposing a metal layer and a conductive metal oxide layer on a semiconductor substrate to form an epitaxial oxide thin film layer composed of perovskite piezoelectric oxide. The heterojunction semiconductor substrate can be applied to sensors, actuators, transducers, or MEMS devices that use the high functionality of the high-quality epitaxial oxide thin film layer, including applications in electronic and optical devices.

Abstract: Disclosed is a heterojunction semiconductor flexible substrate in which an epitaxial oxide thin film layer is hetero-bonded to a thinned silicon substrate using a metal layer, a manufacturing method thereof, and the heterojunction semiconductor flexible substrate can be applied to sensor, actuator, transducer, or micro electro mechanical systems (MEMS) device using high functionality of the epitaxial oxide thin film layer of high quality as well as an electronic and/or optical device.

Abstract: An apparatus for providing tire information is provided. The apparatus includes a detector that detects driving information as a vehicle is being driven and a controller that calculates a relative speed of a tire of the vehicle and a resonance frequency of the tire based on the driving information. The controller then compares the calculated relative speed and the calculated resonance frequency with a previously learned determination reference value to determine whether the tire is deflated.

Abstract: An embodiment of the present disclosure provides a thermal processing apparatus and an operation method thereof capable of controlling a heat distribution of a substrate at a low cost in a thermal processing process using a microwave. According to the present disclosure, a thermal processing apparatus includes a chamber that forms a thermal processing space of a substrate, a substrate support unit that is located at a lower portion of the thermal processing space and supports the substrate, and a microwave unit that is located at an upper portion of the thermal processing space and forms an electromagnetic field by the microwave in the thermal processing space.

Abstract: Provided is a method of processing a big data which may include arranging a plurality of action icons from a palette and a plurality of flow icons representing a non-cyclic order for the plurality of the action icons to generate a workflow, checking a syntax for the plurality of the arranged action icons and the plurality of the flow icons, the syntax being dependent on a corresponding action icon and graphically generating an alarm badge indicating a syntax error for a specific icon when the syntax error for the specific icon is found. Therefore, the method and apparatus may use a Hadoop framework to effectively manage a workflow for processing irregular big data.

Abstract: Provided is a method of processing a big data which may include arranging a plurality of action icons from a palette and a plurality of flow icons representing a non-cyclic order for the plurality of the action icons to generate a workflow, checking a syntax for the plurality of the arranged action icons and the plurality of the flow icons, the syntax being dependent on a corresponding action icon and graphically generating an alarm badge indicating a syntax error for a specific icon when the syntax error for the specific icon is found. Therefore, the method and apparatus may use a Hadoop framework to effectively manage a workflow for processing irregular big data.