Abstract: A device includes a fin extending from a semiconductor substrate; a gate stack over the fin; a first spacer on a sidewall of the gate stack; a source/drain region in the fin adjacent the first spacer; an inter-layer dielectric layer (ILD) extending over the gate stack, the first spacer, and the source/drain region, the ILD having a first portion and a second portion, wherein the second portion of the ILD is closer to the gate stack than the first portion of the ILD; a contact plug extending through the ILD and contacting the source/drain region; a second spacer on a sidewall of the contact plug; and an air gap between the first spacer and the second spacer, wherein the first portion of the ILD extends across the air gap and physically contacts the second spacer, wherein the first portion of the ILD seals the air gap.

Abstract: Methods of cutting gate structures, and structures formed, are described. In an embodiment, a structure includes first and second gate structures over an active area, and a gate cut-fill structure. The first and second gate structures extend parallel. The active area includes a source/drain region disposed laterally between the first and second gate structures. The gate cut-fill structure has first and second primary portions and an intermediate portion. The first and second primary portions abut the first and second gate structures, respectively. The intermediate portion extends laterally between the first and second primary portions. First and second widths of the first and second primary portions along longitudinal midlines of the first and second gate structures, respectively, are each greater than a third width of the intermediate portion midway between the first and second gate structures and parallel to the longitudinal midline of the first gate structure.

Abstract: A precision agriculture implementation method by UAV systems and artificial intelligence image processing technologies provides an unmanned aerial vehicle (UAV), a wireless communication device, a central control unit, and a spray device and a multispectral camera installed to the UAV. The farming area is divided into an array of blocks. The central control unit controls the UAV to fly over the blocks according to navigation parameters and the multispectral camera to capture a multispectral image of each block. A projected leaf area index (PLAI) and a normalized difference vegetation index (NDVI) of each block are calculated by the multispectral image, and a spray control mode of the spray device of the corresponding block is set according to the PLAI and NDVI. The spray device is controlled to spray a water solution, salt solution, fertilizer solution, and/or pesticide solution to the corresponding block according to the spray control mode.

Abstract: A precision agriculture implementation method by UAV systems and artificial intelligence image processing technologies provides an unmanned aerial vehicle (UAV), a wireless communication device, a central control unit, and a spray device and a multispectral camera installed to the UAV. The farming area is divided into an array of blocks. The central control unit controls the UAV to fly over the blocks according to navigation parameters and the multispectral camera to capture a multispectral image of each block. A projected leaf area index (PLAI) and a normalized difference vegetation index (NDVI) of each block are calculated by the multispectral image, and a spray control mode of the spray device of the corresponding block is set according to the PLAI and NDVI. The spray device is controlled to spray a water solution, salt solution, fertilizer solution, and/or pesticide solution to the corresponding block according to the spray control mode.

Abstract: An interactive document camera system includes a document camera, a display panel, and a handwriting sensor module. The document camera can simultaneously output an image of an object and a handwriting input obtained from the handwriting sensor module. The inactive document camera system further includes a computer system so that an operating image provided by the computer system can be simultaneously outputted, and a handwriting data corresponding to the handwriting input can be recorded in the computer system. The interactive document camera includes an image-sensing and processing unit, different connecting interfaces and an image synthesizer. The different connecting interfaces are selectively connected to and communicated with a display panel, a handwriting sensor module or a computer system.