Abstract: A method of reducing resist residue on a semiconductor substrate includes introducing ozone gas into a chemical solution effective to dissolve resist residue adhered to the semiconductor substrate. The chemical solution is circulated through a processing tank where the semiconductor substrate is immersed in the chemical solution and through a first circulation path having a first pump and a first filter. After dissolution of the resist in the processing tank, the chemical solution is circulated through a second circulation path having a second pump and a second filter and returned to the processing tank. The first filter is cleaned by circulating the chemical solution through a third circulation path that includes the first pump and the first filter while introducing ozone gas into the chemical solution. The third circulation path is a closed loop path that excludes the processing tank, the second pump and the second filter.

Abstract: A method of reducing resist residue on a semiconductor substrate includes introducing ozone gas into a chemical solution effective to dissolve resist residue adhered to the semiconductor substrate. The chemical solution is circulated through a processing tank where the semiconductor substrate is immersed in the chemical solution and through a first circulation path having a first pump and filter. After dissolution of the resist in the processing tank, the chemical solution is circulated through a second circulation path having a second pump and filter and returned to the processing tank. The first filter is cleaned by circulating the chemical solution through a third circulation path that includes the first pump and filter and introducing ozone gas into the chemical solution.

Abstract: An apparatus for reducing resist residue on a semiconductor substrate surface has a processing tank containing a chemical solution, and two circulation paths arranged in parallel for circulating the chemical solution inside the processing tank. Each circulation path has a pump and a filter. An ozone gas generating device supplies ozone to the processing tank. A third circulation path includes the pump and filter of one of the two circulation paths and is isolated from the processing tank and used to clean the filter by supplying ozone gas to the third circulation path.

Abstract: The present application provides a method for preventing or protecting an organ from ischemia-reperfusion injury, the method comprising a step of perfusing an organ harvested for transplant ex vivo with a solution containing molecular hydrogen via a blood vessel thereof.

Abstract: Provided is a method of reducing resist residue on a semiconductor substrate surface in a step of performing resist stripping, by introducing ozone gas into a chemical solution. Circulation lines are arranged for a tank (12) for performing processing on the semiconductor substrate (1), and two circulation pumps (131, 132) and two filters (141, 142) are arranged on those circulation lines. Further, a gas introducing jig (34) configured to dissolve the ozone gas into the chemical solution is incorporated in those circulation lines.

Abstract: A switching-type power-supply which enables the switching with little power loss and a method of switching the switching-type power-supply are provided. The switching-type power-supply unit includes a transformer with primary, secondary, winding and control windings, a switch which switches supply of a primary current from a dotted terminal to a non-dotted terminal through the primary winding, a rectifying diode connected the secondary winding, a monitoring signal generation circuit with a diode and a resistor, the diode between GND and a dotted terminal of the control winding, the resistor between GND and a non-dotted terminal of the control winding, the monitoring signal generation circuit generating a monitoring signal at the dotted terminal of the control winding, and a control unit with a zero-point detector and a controller. The zero-point detector monitoring the monitoring signal and supplying a detection signal to the controller.

Abstract: A switching-type power-supply which enables the switching with little power loss and a method of switching the switching-type power-supply are provided. The switching-type power-supply unit includes a transformer with primary, secondary, winding and control windings, a switch which switches supply of a primary current from a dotted terminal to a non-dotted terminal through the primary winding, a rectifying diode connected the secondary winding, a monitoring signal generation circuit with a diode and a resistor, the diode between GND and a dotted terminal of the control winding, the resistor between GND and a non-dotted terminal of the control winding, the monitoring signal generation circuit generating a monitoring signal at the dotted terminal of the control winding, and a control unit with a zero-point detector and a controller. The zero-point detector monitoring the monitoring signal and supplying a detection signal to the controller.