Abstract: According to one embodiment, an optical sensor includes an optical waveguide module and a specimen area. The specimen area is provided adjacent to the optical waveguide module, and is configured to hold a specimen. The specimen area includes a sensing area and a precipitation area. An optical change occurs in the sensing area. A precipitate of the specimen is precipitated in the precipitation area. The precipitation area is placed at a different position from a position of the sensing area which is attached to the optical waveguide module.

Abstract: A dry processing apparatus includes a lower electrode for holding a substrate to be processed in a chamber, a shower head, provided to face a surface of the lower electrode, on which the substrate to be processed is placed, for supplying a process gas to the substrate to be processed, placed on the lower electrode, and a pumping channel formed to surround an outer circumference of the lower electrode, wherein a pumping gap portion for communicating a processing space formed between the lower electrode and the shower head, and the pumping channel with each other, is made such that a width of the gap portion differs between an exhaust pump side where the pumping channel is connected to an exhaust pump, and an opposite side thereto.