Abstract: An optical metrology system for measuring a contour of a workpiece surface. The system includes a multi-wavelength light projector that projects a wavelength-varying collimated light beam onto the surface of the workpiece. The collimated light beam has a plurality of substantially parallel light rays, each of which has a predetermined wavelength. The wavelength of the plurality of light rays varies in a predetermined manner across a width of the collimated light beam. A wavelength-discriminating detector determines an intensity of light reflected from the workpiece surface and detects wavelength-specific characteristics of the received reflected light. Significantly, the wavelength-specific characteristics of the reflected light are related to the distance of the workpiece surface from the detector. Specifically, the multi-wavelength projector includes a collimated light source that generates a collimated light beam.

Abstract: The present invention includes a stereoscopic fiber optic probe sensor. In one aspect of the invention, the fiber stereoscopic optic probe includes a signal fiber bundle having a plurality of first signal fibers, and an illumination fiber bundle having a plurality of second signal fibers. A drawn fiber optic bundle is contiguous with and formed by a predetermined length of the signal fiber bundle and the illumination fiber bundle. The drawn fiber optic bundle comprises portions of the first and second signal fibers. A plurality of fiber tips terminate the drawn fiber optic bundle. Each fiber tip provides one or more surfaces at which the first signal fibers are terminated and one or more surfaces at which the second signal fibers are terminated. In one embodiment, the sensor includes an imaging sensor. The sensor is operatively coupled to an end of the signal fiber bundle opposite the drawn fiber optic bundle.

Abstract: An optical metrology system and method for rapidly and accurately measuring an object surface contour. The optical metrology system measures cross-sections of an object substantially orthogonal to an axis of the object includes a first and second optical assemblies each arranged proximate to opposing sides of a desired section of the object to be measured. The optical assemblies each include at least one source of electromagnetic radiation such as a laser, each configured to project a linear beam on a proximate object surface. The optical assemblies also include a line scan camera fixed relative to the lasers and having a single column of detector elements substantially parallel with the object surface. The camera receives reflections from the object surface which are provided to a controller for processing. The system also includes a first adjustment device for adjusting a distance between the lasers of each assembly and the object.