Patents by Inventor Igor Aharonovich

Igor Aharonovich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11377740
    Abstract: Methods and systems for direct lithographic pattern definition based upon electron beam induced alteration of the surface chemistry of a substrate are described. The methods involve an initial chemical treatment for global definition of a specified surface chemistry (SC). Electron beam induced surface reactions between a gaseous precursor and the surface are then used to locally alter the SC. High resolution patterning of stable, specified surface chemistries upon a substrate can thus be achieved. The defined patterns can then be utilized for selective material deposition via methods which exploit the specificity of certain SC combinations or by differences in surface energy. It is possible to perform all steps in-situ without breaking vacuum.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: July 5, 2022
    Assignee: FEI Company
    Inventors: James Bishop, Toan Trong Tran, Igor Aharonovich, Charlene Lobo, Milos Toth
  • Publication number: 20200190669
    Abstract: Methods and systems for direct lithographic pattern definition based upon electron beam induced alteration of the surface chemistry of a substrate are described. The methods involve an initial chemical treatment for global definition of a specified surface chemistry (SC). Electron beam induced surface reactions between a gaseous precursor and the surface are then used to locally alter the SC. High resolution patterning of stable, specified surface chemistries upon a substrate can thus be achieved. The defined patterns can then be utilized for selective material deposition via methods which exploit the specificity of certain SC combinations or by differences in surface energy. It is possible to perform all steps in-situ without breaking vacuum.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 18, 2020
    Applicant: FEI Company
    Inventors: James Bishop, Toan Trong Tran, Igor Aharonovich, Charlene Lobo, Milos Toth
  • Patent number: 10538844
    Abstract: Methods and systems for direct lithographic pattern definition based upon electron beam induced alteration of the surface chemistry of a substrate are described. The methods involve an initial chemical treatment for global definition of a specified surface chemistry (SC). Electron beam induced surface reactions between a gaseous precursor and the surface are then used to locally alter the SC. High resolution patterning of stable, specified surface chemistries upon a substrate can thus be achieved. The defined patterns can then be utilized for selective material deposition via methods which exploit the specificity of certain SC combinations or by differences in surface energy. It is possible to perform all steps in-situ without breaking vacuum.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: January 21, 2020
    Assignee: FEI Company
    Inventors: James Bishop, Toan Trong Tran, Igor Aharonovich, Charlene Lobo, Milos Toth
  • Patent number: 10501851
    Abstract: Beam-induced deposition decomposes a precursor at precise positions on a surface. The surface is processed to provide linker groups on the surface of the deposit, and the sample is processed to attach nano-objects to the linker groups. The nano-objects are used in a variety of application. When a charged particle beam is used to decompose the precursor, the charged particle beam can be used to form an image of the surface with the nano-objects attached.
    Type: Grant
    Filed: June 21, 2016
    Date of Patent: December 10, 2019
    Assignee: FEI Company
    Inventors: Mehran Kianinia, Olga Shimoni, Igor Aharonovich, Charlene Lobo, Milos Toth, Steven Randolph, Clive D. Chandler
  • Publication number: 20170327951
    Abstract: Beam-induced deposition decomposes a precursor at precise positions on a surface. The surface is processed to provide linker groups on the surface of the deposit, and the sample is processed to attach nano-objects to the linker groups. The nano-objects are used in a variety of application. When a charged particle beam is used to decompose the precursor, the charged particle beam can be used to form an image of the surface with the nano-objects attached.
    Type: Application
    Filed: June 21, 2016
    Publication date: November 16, 2017
    Applicant: FEI Company
    Inventors: Mehran Kianinia, Olga Shimoni, Igor Aharonovich, Charlene Lobo, Milos Toth, Steven Randolph, Clive D. Chandler
  • Publication number: 20170073814
    Abstract: Methods and systems for direct lithographic pattern definition based upon electron beam induced alteration of the surface chemistry of a substrate are described. The methods involve an initial chemical treatment for global definition of a specified surface chemistry (SC). Electron beam induced surface reactions between a gaseous precursor and the surface are then used to locally alter the SC. High resolution patterning of stable, specified surface chemistries upon a substrate can thus be achieved. The defined patterns can then be utilized for selective material deposition via methods which exploit the specificity of certain SC combinations or by differences in surface energy. It is possible to perform all steps in-situ without breaking vacuum.
    Type: Application
    Filed: September 11, 2015
    Publication date: March 16, 2017
    Applicant: FEI Company
    Inventors: James Bishop, Toan Trong Tran, Igor Aharonovich, Charlene Lobo, Milos Toth
  • Patent number: 9381341
    Abstract: The present disclosure provides an electrode and an feedthrough for an implantable medical device. In one embodiment, the implantable electrode and the implantable feedthrough both comprise electrically insulating diamond material and electrically conductive diamond material that form an interface. Further, the present disclosure provides method for fabricating the implantable electrode and the feedthrough.
    Type: Grant
    Filed: December 3, 2013
    Date of Patent: July 5, 2016
    Assignees: The University of Melbourne, National ICT Australia Limited
    Inventors: Hamish Meffin, Kate Fox, David Garrett, Kumaravelu Ganesan, Steven Prawer, Samantha Lichter, Igor Aharonovich
  • Publication number: 20140094885
    Abstract: The present disclosure provides an electrode and an feedthrough for an implantable medical device. In one embodiment, the implantable electrode and the implantable feedthrough both comprise electrically insulating diamond material and electrically conductive diamond material that form an interface. Further, the present disclosure provides method for fabricating the implantable electrode and the feedthrough.
    Type: Application
    Filed: December 3, 2013
    Publication date: April 3, 2014
    Applicants: National ICT Australia Limited, The University of Melbourne
    Inventors: Hamish Meffin, Kate Fox, David Garrett, Kumaravelu Ganesan, Steven Prawer, Samantha Lichter, Igor Aharonovich