Abstract: The present invention provides an exhaust gas abatement system for use in semiconductor processing. The system comprising a vacuum pump having an exhaust outlet, a water eductor coupled to the exhaust outlet of the vacuum pump, and a separator coupled to the water eductor. The system further comprises an exhaust gas abatement apparatus coupled to a gaseous exhaust outlet of the separator. Wherein the system is configured such that, in use, an exhaust flow from the exhaust outlet of the vacuum pump is conveyed to the separator via the water eductor, and wherein the separator is configured, in use, to separate a gaseous component of the exhaust flow from the non-gaseous component of the exhaust flow.

Abstract: A semiconductor waste abatement system for a semiconductor processing system includes a vacuum pump, an abatement apparatus having an abatement chamber in fluid communication with a source of semiconductor waste gas from the semiconductor processing chamber, and with the abatement chamber configured to ionize the waste gas and to exhaust ionized gas. The abatement system further includes a filter apparatus with a filter chamber, which forms a liquid reservoir. The inlet of the filter apparatus is in fluid communication with the outlet of the abatement chamber and the liquid reservoir, and the outlet of the filter apparatus is in communication with the inlet of the vacuum pump, wherein the filter chamber is under a vacuum, and wherein semiconductor waste gas is ionized in the abatement chamber and then filtered by the filter apparatus prior to input to the vacuum pump.

Abstract: A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid reservoir for delivering and removing filter fluid, respectively, to and from the liquid reservoir.

Abstract: A semiconductor processing system includes a semiconductor processing chamber, a pump, an exhaust line in fluid communication with the chamber through the pump, and a steam generator and reactor. The steam generator and reactor has a process conduit with an inlet in line in the exhaust line for generating superheated steam and effecting transformations of chemicals in the exhaust fluid flowing in exhaust line into the inlet.

Abstract: A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid reservoir for delivering and removing filter fluid, respectively, to and from the liquid reservoir.

Abstract: A semiconductor waste abatement system for a semiconductor processing system includes a vacuum pump, an abatement apparatus having an abatement chamber in fluid communication with a source of semiconductor waste gas from the semiconductor processing chamber, and with the abatement chamber configured to ionize the waste gas and to exhaust ionized gas. The abatement system further includes a filter apparatus with a filter chamber, which forms a liquid reservoir. The inlet of the filter apparatus is in fluid communication with the outlet of the abatement chamber and the liquid reservoir, and the outlet of the filter apparatus is in communication with the inlet of the vacuum pump, wherein the filter chamber is under a vacuum, and wherein semiconductor waste gas is ionized in the abatement chamber and then filtered by the filter apparatus prior to input to the vacuum pump.

Abstract: A semiconductor processing system includes a semiconductor processing chamber, a pump, an exhaust line in fluid communication with the chamber through the pump, and a steam generator and reactor. The steam generator and reactor has a process conduit with an inlet in line in the exhaust line for generating superheated steam and effecting transformations of chemicals in the exhaust fluid flowing in exhaust line into the inlet.

Abstract: A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid reservoir for delivering and removing filter fluid, respectively, to and from the liquid reservoir.

Abstract: A semiconductor processing system includes a semiconductor processing chamber, a scrubber, an exhaust line in fluid communication with the chamber and the scrubber for delivering exhaust from the chamber to the scrubber, and a steam generation device in fluid communication with the exhaust line for injecting steam into the exhaust line.

Abstract: A method of producing an active chemical species, steam or superheated steam includes flowing one or more fluids through a conduit, locating one or more incandescent lights in close proximity to the conduit, and using at least a portion of the heat emitted from the one or more incandescent lights to heat the one or more fluids flowing through the conduit so that the fluid or fluids are disassociated into chemical components, associated into a new compound, or converted into steam.

Abstract: An energy generation system comprises a fluid tube, a linear actuator configured to be driven by the change in fluid pressure in the fluid tube, and a generator driven by the linear actuator. A method of generating energy includes providing a fluid tube filled with a fluid, applying compression to the tube using a moving object, such as a person or a vehicle, and converting the change in pressure in the tube resulting from the compression into electricity.

Abstract: An energy recovery system includes a fan and a wind turbine adapted to mount adjacent the fan to recover energy from the air flow generated by the fan.

Abstract: A wind turbine includes a rotary shaft having an axis of rotation, a plurality of turbine blades supported for rotary motion by the shaft, and a plurality of magnets supported by and spaced outwardly from the rotary shaft. The blades are mounted to the shaft by a mount that is radially inward of the magnets wherein the magnets have an annular velocity of at least the annular velocity of the blades. The turbine also includes a conductive coil, which is located outwardly from the magnets and the blades, wherein the coil surrounds the magnets and the blades and which is sufficiently close to the magnets such that rotary movement of the magnets induces current flow in the coil.

Abstract: An energy recovery system including a device that produces a magnetic field adapted for mounting to a vehicle and a stationary conductor adapted for placing in or adjacent the path of the vehicle wherein the magnetic field induces current to flow through the conductor when the vehicle moves past the conductor. The vehicle may be an automobile, a truck, a train, or other type of vehicle. When used in conjunction with a train, the energy recovery system may be designed to recover energy from non-locomotive train cars in addition to, or in lieu of, the train locomotive. Kinetic energy that would otherwise be lost to heat energy through the application of brakes to the non-locomotive cars can thereby be recovered and re-used.

Abstract: A power generating turbine includes a rotary shaft having an axis of rotation, a magnet supported by and spaced outwardly from the rotary shaft and a conductive coil. The coil located outwardly from the magnet and surrounds the magnet and the shaft, but is sufficiently close to the magnet such that rotary movement of said magnet induces current flow in the coil.

Abstract: A wind turbine system for generating electricity includes a turbine and a control system for managing the electricity generated by the turbine. The control system may include sensors for determining wind direction and wind speed and a controller that rotates the turbine into the wind if the wind speed is less than a threshold and out of the wind if the wind speed exceeds a threshold. The control system may also be adapted to supply electricity to one or more circuits within a home or residence. The electricity harvested from the turbine may be transferred by the control system to one or more batteries, or it may be transferred to the circuits within the residence. The electrical power extracted from the wind turbine may be harvested in a continuous manner, a pulsed manner, or a hybrid manner based upon control of the input impedances into the control circuit of subsystem.

Abstract: A wind turbine includes a rotary shaft having an axis of rotation, a plurality of turbine blades supported for rotary motion by the shaft, and a plurality of magnets supported by and spaced outwardly from the rotary shaft. The blades are mounted to the shaft by a mount that is radially inward of the magnets wherein the magnets have an annular velocity of at least the annular velocity of the blades. The turbine also includes a conductive coil, which is located outwardly from the magnets and the blades, wherein the coil surrounds the magnets and the blades and which is sufficiently close to the magnets such that rotary movement of the magnets induces current flow in the coil.

Abstract: A turbine energy generating system includes a combustion chamber for converting fuel into energy by igniting an air and fuel mixture, a turbine for converting energy produced by the combustion chamber into mechanical energy, and a generator for converting mechanical energy produced by the turbine into electrical energy in the range of 1 to 15 kilowatts.

Abstract: A power generating turbine includes a rotary shaft having an axis of rotation, a magnet supported by and spaced outwardly from the rotary shaft and a conductive coil. The coil is located outwardly from the magnet and surrounds the magnet and the shaft, but is sufficiently close to the magnet such that rotary movement of said magnet induces current flow in the coil.

Abstract: A system and method for recovering heat energy from a vehicle, such as a car, truck, railroad, or airplane, is disclosed. The system and method include mounting a thermoelectric unit to the vehicle at one or more locations where a temperature gradient is expected. Due to the Seebeck effect, the thermoelectric unit generates a voltage and current, which may then be temporarily stored on the vehicle and/or transferred inductively to an off-vehicle location.