Abstract: The invention relates to a process for the production of a final gaseous mixture containing a carrier gas, an oxidizing gas and a silane, with a predetermined content of each of the three gaseous components, comprising the preparation of a primary gaseous mixture containing a neutral gas and the said silane, the silane content of the primary gaseous mixture being below the self-ignition limit of that particular silane in air, and the preparation of a mixture between the primary gaseous mixture and a stream of the said carrier gas and, if appropriate, of [sic] a stream of the said oxidizing gas, in proportions which make it possible to obtain the required final mixture, the mixing being carried out under dynamic conditions.