Patents by Inventor Injo Ok

Injo Ok has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11980111
    Abstract: A phase change memory bridge cell comprising a dielectric layer located on top of a at least one electrode, wherein a trench is located in the dielectric layer. A first liner located at the bottom of the trench in the dielectric layer and the first liner is located on the sidewalls of the dielectric layer that forms the sidewalls of the trench. A phase change memory material located on top of the first liner, wherein a top surface of the phase change memory material is aligned with a top surface of the dielectric layer, wherein the dielectric layer is located adjacent to and surrounding the vertical sidewalls of the phase change memory material, wherein a top surface of the phase change memory material is flush with a top surface of the dielectric layer.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: May 7, 2024
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Andrew Herbert Simon, Kevin W. Brew, Muthumanickam Sankarapandian, Steven Michael McDermott, Nicole Saulnier
  • Publication number: 20240130243
    Abstract: Embodiments of present invention provide a magnetic tunnel junction (MTJ) structure. The MTJ structure includes a MTJ stack, the MTJ stack including a tunnel barrier layer on a reference layer and a free layer on the tunnel barrier layer, wherein the free layer includes multiple sub free layers, the multiple sub free layers being multiple ferromagnetic strips placed parallel to each other on the tunnel barrier layer, the multiple ferromagnetic strips having respective first ends connected to a first electrode and respective second ends connected to a second electrode. A method of forming the MTJ structure is also provided.
    Type: Application
    Filed: October 17, 2022
    Publication date: April 18, 2024
    Inventors: Timothy Mathew Philip, Ching-Tzu Chen, Kevin W. Brew, JIN PING HAN, Injo Ok
  • Patent number: 11957069
    Abstract: An approach to provide a semiconductor structure for a phase change memory cell with a first liner material surrounding a sidewall of a hole in a dielectric material where the hole in the dielectric is on a bottom electrode in the dielectric material. The semiconductor structure includes a layer of a second liner material on the first liner material, where the second liner material has an improved contact resistance to a phase change material. The semiconductor structure includes the phase change material abutting the layer of the second liner material on the first liner material. The phase change material fills the hole in the dielectric material. The second liner material that is between the phase change material and the first liner material provides a lower contact resistivity with the phase change material in the crystalline phase than the first liner material.
    Type: Grant
    Filed: October 22, 2021
    Date of Patent: April 9, 2024
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Oleg Gluschenkov, Alexander Reznicek, Soon-Cheon Seo
  • Publication number: 20240114807
    Abstract: An integrated circuit includes a field effect transistor (FET) and a phase change memory (PCM) cell. The PCM cell includes a heater, wherein a bottom surface of the heater is at or below a top surface of the FET.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Inventors: Victor W.C. Chan, JIN PING HAN, Samuel Sung Shik Choi, Injo Ok
  • Patent number: 11930724
    Abstract: A phase change memory (PCM) cell includes an electrode, a heater electrically connected to the electrode, a PCM material electrically connected to the heater, a second electrode electrically connected to the PCM material, an electrical insulator surrounding the PCM material, and a shield positioned between the PCM material and the electrical insulator, the shield comprising a reactive-ion-etching-resistant material.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: March 12, 2024
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Nicole Saulnier, Muthumanickam Sankarapandian, Andrew Herbert Simon, Steven Michael McDermott, Iqbal Rashid Saraf
  • Publication number: 20240081159
    Abstract: A structure including alternating layers of phase change material layers and dielectric encapsulated heater element layers, the alternating layers of phase change material layers and the dielectric encapsulated heater element layers are sandwiched between a first electrode and a second electrode. A structure including horizontally aligned alternating layers of phase change material layers and dielectric encapsulated heater element layers, the alternating layers of phase change material layers and the dielectric encapsulated heater element layers are sandwiched between a first electrode and a second electrode. A method including forming alternating layers of phase change material layers and dielectric encapsulated heater element layers, the alternating layers of phase change material layers and the dielectric encapsulated heater element layers are sandwiched between a first electrode and a second electrode.
    Type: Application
    Filed: September 2, 2022
    Publication date: March 7, 2024
    Inventors: Ching-Tzu Chen, Kevin W. Brew, JIN PING HAN, Timothy Mathew Philip, Injo Ok
  • Publication number: 20240074336
    Abstract: A memory device and method of forming a projection liner under a mushroom phase change memory device with sidewall electrode process scheme to provide self-aligned patterning of resistive projection liner during sidewall electrode formation.
    Type: Application
    Filed: August 24, 2022
    Publication date: February 29, 2024
    Inventors: Injo Ok, Timothy Mathew Philip, Jin Ping Han, Ching-Tzu Chen, Kevin W. Brew, Lili Cheng
  • Patent number: 11889773
    Abstract: A phase change memory (PCM) cell comprises a first electrode comprised of a first electrically conductive material, a second electrode comprised of a second electrically conductive material, a first phase change layer positioned between the first electrode and the second electrode and being comprised of a first phase change material, and a second phase change layer positioned between the first electrode and the second electrode and being comprised of a second phase change material. The first phase change material has a first resistivity, the second phase change material has a second resistivity, and wherein the first resistivity is at least two times the second resistivity.
    Type: Grant
    Filed: February 22, 2023
    Date of Patent: January 30, 2024
    Assignee: International Business Machines Corporation
    Inventors: Kevin W. Brew, Injo Ok, Jin Ping Han, Timothy Mathew Philip, Matthew Joseph BrightSky, Nicole Saulnier
  • Publication number: 20240008374
    Abstract: Memory cells and methods of forming the same include forming a hole in an interlayer dielectric to expose an end of a conductive top electrode. A phase change material is conformally deposited on surfaces of the hole. A remaining portion of the hole is filled with a dielectric material after conformally depositing the phase change material.
    Type: Application
    Filed: June 30, 2022
    Publication date: January 4, 2024
    Inventors: Kevin W. Brew, Timothy Mathew Philip, JIN PING HAN, Ching-Tzu Chen, Injo Ok
  • Patent number: 11800817
    Abstract: A method for forming a phase-change memory cell includes depositing a metal layer over a wafer such that the metal layer covers connection structures of the wafer. The method further includes removing a portion of the metal layer such that the connection structures of the wafer remain covered by a remaining portion of the metal layer. The method further includes forming a phase-change memory stack on a stack area of the remaining portion of the metal layer. The method further includes removing the remaining portion of the metal layer except in the stack area.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: October 24, 2023
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Nicole Saulnier, Kevin W. Brew, Steven Michael McDermott, Lawrence A. Clevenger, Hari Prasad Amanapu, Adra Carr, Prasad Bhosale
  • Publication number: 20230309421
    Abstract: A memory structure comprises a ReRAM module embedded in a substrate. An insulative layer is formed on the substrate. A first electrode is located on the insulative layer. The first electrode is proximately connected to a first end of the ReRAM module and comprises a first surface area. A second electrode is located on the insulative layer. The second electrode is proximately connected to a second end of the ReRAM module. The second electrode comprises a second surface area, a plasma-interacting component, and a resistive component. The resistive component is located between the plasma-interacting component and the ReRAM module. A ratio of the first surface area to the second surface area creates a voltage between the first electrode and second electrode when the first surface area and second surfaces area are exposed to an application of plasma. The voltage forms a conductive filament in the ReRAM module.
    Type: Application
    Filed: June 2, 2023
    Publication date: September 28, 2023
    Inventors: Youngseok Kim, Soon-Cheon Seo, Injo Ok, Alexander Reznicek
  • Publication number: 20230309425
    Abstract: A structure including an inner electrode and an outer electrode on a substrate and a phase change material layer, the phase change material layer vertically aligned above both the inner electrode and the outer electrode. A structure including an inner electrode and an outer electrode on a substrate and a phase change material layer, the phase change material layer vertically aligned above both the inner electrode and the outer electrode, where the inner electrode and the outer electrode are on the same horizontal plane. A method including forming an inner electrode and an outer electrode simultaneously on a substrate, forming a phase change material layer above both the inner electrode and the outer electrode.
    Type: Application
    Filed: March 25, 2022
    Publication date: September 28, 2023
    Inventors: Timothy Mathew Philip, JIN PING HAN, Ching-Tzu Chen, Kevin W. Brew, Injo Ok
  • Publication number: 20230299134
    Abstract: A method of forming a semiconductor structure includes forming a first middle-of-line (MOL) oxide layer and a second MOL oxide layer in the semiconductor structure. The first MOL oxide layer including multiple gate stacks formed on a substrate, and each gate stack of the gate stacks including a source/drain junction. A first nitride layer is formed over a silicide in the first MOL oxide layer. A second nitride layer is formed. Trenches are formed through the second nitride layer down to the source/drain junctions. A nitride cap of the plurality of gate stacks is selectively recessed. At least one self-aligned contact area (CA) element is formed within the first nitride layer. The first MOL oxide layer is selectively recessed. An air-gap oxide layer is deposited. The air gap oxide layer is reduced to the at least one self-aligned CA element and the first nitride layer.
    Type: Application
    Filed: November 4, 2022
    Publication date: September 21, 2023
    Inventors: Injo Ok, Balasubramanian Pranatharthiharan, Soon-Cheon Seo, Charan V. Surisetty
  • Publication number: 20230284541
    Abstract: A first phase change material layer vertically aligned above a bottom electrode, a dielectric layer vertically aligned above the first phase change material layer, a second phase change material layer vertically aligned above the dielectric layer, an inner electrode physically and electrically connected to the first phase change material layer and the second phase change material layer, the inner electrode surrounded by the dielectric layer, a top electrode vertically aligned above the second phase change material layer. A first phase change material layer vertically aligned above a bottom electrode, a filament layer vertically aligned above the first phase change material layer, a second phase change material layer vertically aligned above the filament layer, an inner break in the filament layer connecting the first phase change material layer and the second phase change material layer, a top electrode vertically aligned above the second phase change material layer.
    Type: Application
    Filed: March 2, 2022
    Publication date: September 7, 2023
    Inventors: Timothy Mathew Philip, JIN PING HAN, Kevin W. Brew, Ching-Tzu Chen, Injo Ok
  • Patent number: 11737379
    Abstract: A memory structure comprises a ReRAM module embedded in a substrate. An insulative layer is formed on the substrate. A first electrode is located on the insulative layer. The first electrode is proximately connected to a first end of the ReRAM module and comprises a first surface area. A second electrode is located on the insulative layer. The second electrode is proximately connected to a second end of the ReRAM module. The second electrode comprises a second surface area, a plasma-interacting component, and a resistive component. The resistive component is located between the plasma-interacting component and the ReRAM module. A ratio of the first surface area to the second surface area creates a voltage between the first electrode and second electrode when the first surface area and second surfaces area are exposed to an application of plasma. The voltage forms a conductive filament in the ReRAM module.
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: August 22, 2023
    Assignee: International Business Machines Corporation
    Inventors: Youngseok Kim, Soon-Cheon Seo, Injo Ok, Alexander Reznicek
  • Patent number: 11711989
    Abstract: An embodiment of the invention may include a semiconductor structure. The semiconductor structure may include a phase change element located above a heater. The heater may include a conductive element surrounding a dielectric element. The dielectric element may include an air gap.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: July 25, 2023
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Alexander Reznicek, Soon-Cheon Seo, Youngseok Kim, Timothy Mathew Philip
  • Publication number: 20230200267
    Abstract: A phase change memory (PCM) cell comprises a first electrode comprised of a first electrically conductive material, a second electrode comprised of a second electrically conductive material, a first phase change layer positioned between the first electrode and the second electrode and being comprised of a first phase change material, and a second phase change layer positioned between the first electrode and the second electrode and being comprised of a second phase change material. The first phase change material has a first resistivity, the second phase change material has a second resistivity, and wherein the first resistivity is at least two times the second resistivity.
    Type: Application
    Filed: February 22, 2023
    Publication date: June 22, 2023
    Inventors: Kevin W. Brew, Injo Ok, Jin Ping Han, Timothy Mathew Philip, Matthew Joseph BrightSky, Nicole Saulnier
  • Publication number: 20230200265
    Abstract: A phase change memory structure including a bottom electrode; a top electrode; a first phase change material between the bottom electrode and the top electrode; a first dielectric surrounding the first phase change material; a second dielectric surrounding the top electrode, the second dielectric having selective adhesion to a metal as compared to the first phase change material; a first metal feature contacting the bottom electrode; and a second metal feature contacting the top electrode.
    Type: Application
    Filed: December 16, 2021
    Publication date: June 22, 2023
    Inventors: Kevin W. Brew, Injo Ok, Sanjay C. Mehta, Matthew T. Shoudy, Nicole Saulnier, Iqbal Rashid Saraf
  • Publication number: 20230189536
    Abstract: Techniques for controlling the programming current of a PCM-based AI device using an external resistor are provided. In one aspect, a PCM cell includes: a PCM stack, that has a bottom electrode; a heater disposed directly on the bottom electrode; a PCM unit including a first material disposed on the heater; a top electrode including a second material disposed on the PCM unit; and a resistor adjacent to the PCM stack, wherein the resistor includes a combination of the first material and the second material. A PCM device that includes at least one of the PCM cells, and a method of forming the PCM cell are also provided.
    Type: Application
    Filed: December 15, 2021
    Publication date: June 15, 2023
    Inventors: Injo Ok, Soon-Cheon Seo, Youngseok Kim, Timothy Mathew Philip, Alexander Reznicek
  • Publication number: 20230180485
    Abstract: A two-terminal device comprises a bottom electrode. A device element is formed upon the bottom electrode. The two-terminal device also comprises a top electrode that is formed upon the device element. The bottom electrode and the top electrode are aligned. The bottom electrode and top electrode also have a same width and depth.
    Type: Application
    Filed: December 2, 2021
    Publication date: June 8, 2023
    Inventors: Kevin W. Brew, Steven Michael McDermott, Nicole Saulnier, Muthumanickam Sankarapandian, Injo Ok