Abstract: A method for inspecting a reticle including a reflective layer on a reticle substrate is provided. The method may include loading the reticle on a stage, cooling the reticle substrate to a temperature lower than a room temperature, irradiating a laser beam to the reflective layer on the reticle substrate, receiving the laser beam using a photodetector to obtain an image of the reflective layer, and detect a particle defect on the reflective layer or a void defect in the reflective layer based on the image of the reflective layer.

Abstract: A method for inspecting a reticle including a reflective layer on a reticle substrate is provided. The method may include loading the reticle on a stage, cooling the reticle substrate to a temperature lower than a room temperature, irradiating a laser beam to the reflective layer on the reticle substrate, receiving the laser beam using a photodetector to obtain an image of the reflective layer, and detect a particle defect on the reflective layer or a void defect in the reflective layer based on the image of the reflective layer.

Abstract: A method for inspecting a reticle including a reflective layer on a reticle substrate is provided. The method may include loading the reticle on a stage, cooling the reticle substrate to a temperature lower than a room temperature, irradiating a laser beam to the reflective layer on the reticle substrate, receiving the laser beam using a photodetector to obtain an image of the reflective layer, and detect a particle defect on the reflective layer or a void defect in the reflective layer based on the image of the reflective layer.

Abstract: Solid oxide fuel cell stacks and methods of sealing a planar solid oxide fuel cell. Unit cells within the stack each include a metal frame with a periphery that can both provide a support surface for a membrane electrode assembly, as well as form a fluid-tight seal with a bonded separator plate. The separator plate includes a peripheral lip that bounds a cell-receiving cavity such that a volumetric region is formed within the separator plate to receive at least a portion of the membrane electrode assembly to create a fluid-tight pathway for at least one of the reactants that is being introduced to a corresponding anode layer or cathode layer of the membrane electrode assembly.

Abstract: Solid oxide fuel cell stacks and methods of sealing a planar solid oxide fuel cell. Unit cells within the stack each include a metal frame with a periphery that can both provide a support surface for a membrane electrode assembly, as well as form a fluid-tight seal with a bonded separator plate. The separator plate includes a peripheral lip that bounds a cell-receiving cavity such that a volumetric region is formed within the separator plate to receive at least a portion of the membrane electrode assembly to create a fluid-tight pathway for at least one of the reactants that is being introduced to a corresponding anode layer or cathode layer of the membrane electrode assembly.

Abstract: The present invention relates to a fuel reformer, a sprayer for the fuel reformer and a fuel reforming method, wherein the fuel reformer is characterized by comprising a spraying device for atomizing liquid fuel; and a reactor which reforms the fuel via a catalytic reaction of the fuel atomized by the spraying device. According to the invention, the reforming performance of a fuel reformer can be enhanced, and the reforming can be easily carried out when it is applied to the fuel comprising improper features for fuel reforming.