Patents by Inventor Ion Hong Chao

Ion Hong Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH PERFORMANCE SUSCEPTOR APPARATUS
    Publication number: 20220181193
    Abstract: A substrate support and lift assembly configured to support and lift a substrate from a susceptor is disclosed. The substrate support and lift assembly can include a susceptor support and a lift pin. The susceptor support can be configured to support the susceptor thereon. The susceptor support includes a plurality of support arms each extending radially from a central portion of the susceptor support to a terminus. Each of the plurality of support arms includes an aperture extending therethrough. The lift pin can be configured to fit through the aperture of a corresponding support arm to lift a substrate on the susceptor.
    Type: Application
    Filed: December 3, 2021
    Publication date: June 9, 2022
    Inventors: Peipei Gao, Wentao Wang, Xing Lin, Han Ye, Ion Hong Chao, Siyao Luan, Alexandros Demos, Fan Gao
  • REACTOR SYSTEM INCLUDING A GAS DISTRIBUTION ASSEMBLY FOR USE WITH ACTIVATED SPECIES AND METHOD OF USING SAME
    Publication number: 20210102292
    Abstract: A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area.
    Type: Application
    Filed: October 1, 2020
    Publication date: April 8, 2021
    Inventors: Xing Lin, Peipei Gao, Prajwal Nagaraj, Mingyang Ma, Wentao Wang, Ion Hong Chao, Alexandros Demos, Paul Ma, Hichem M'Saad