Abstract: An apparatus for deflecting laser radiation comprises: a first lens array comprising a plurality of first lenses arranged next to one another to permit the laser radiation to at least partially pass through the first lens array; a second lens array comprising a plurality of second lenses arranged next to one another to at least partially pass through the second lens array laser radiation that has passed through the first lens array; a rotatable or pivotable first mirror arranged between the first and second lens arrays to deflect in a direction of the second lens array the laser radiation that has passed through the first lens array; and an objective lens to focus laser radiation that has passed through the second lens array into a working plane.

Abstract: An apparatus for deflecting and/or modulating a laser radiation, wherein the laser radiation is a plurality of laser beams. The apparatus comprises a plurality of deflecting elements configured as mirror elements or transparent components, and movement apparatus that is capable of moving the plurality of deflecting elements individually or in groups. The movement apparatus comprises a plurality of piezo actuators which are capable of performing a translatory motion.

Abstract: An apparatus for deflecting and/or modulating a laser radiation, wherein the laser radiation is a plurality of laser beams. The apparatus comprises a plurality of deflecting elements configured as mirror elements or transparent components, and movement apparatus that is capable of moving the plurality of deflecting elements individually or in groups. The movement apparatus comprises a plurality of piezo actuators which are capable of performing a translatory motion.

Abstract: An apparatus for deflecting laser radiation comprises: a first lens array comprising a plurality of first lenses arranged next to one another to permit the laser radiation to at least partially pass through the first lens array; a second lens array comprising a plurality of second lenses arranged next to one another to at least partially pass through the second lens array laser radiation that has passed through the first lens array; a rotatable or pivotable first mirror arranged between the first and second lens arrays to deflect in a direction of the second lens array the laser radiation that has passed through the first lens array; and an objective lens to focus laser radiation that has passed through the second lens array into a working plane.

Abstract: The invention relates to a device for transforming the profile of a laser beam (5) into a laser beam (5) with a rotationally symmetrical intensity distribution such as an M-profile or a rotationally symmetrical top-hat profile, said device comprising at least one lens array (1) with at least two lenses (5) through which the laser beam (5) that is to be transformed can pass, and optical means which can direct the laser beam (5) that has passed through the at least one lens array (1) onto a working plane (3) and/or superimpose at least some sections of said laser beam on the working plane (3), the lenses (7) of the at least one lens array (1) being arranged coaxially or concentrically with respect to one another.

Abstract: A beam forming device produces a linear intensity distribution on a work plane. The device contains a laser light source that can emit laser radiation, an optical device that can transfer the laser radiation in a linear intensity distribution on the work plane, and lens that are used to influence the linear intensity distribution on the work plane and that can be displaced in the direction of diffusion of the laser radiation. The intensity profile can be modified perpendicular to the extension of the linear intensity distribution by modifying the position of the lens in the direction of diffusion of the laser radiation.

Abstract: A beam forming device produces a linear intensity distribution on a work plane. The device contains a laser light source that can emit laser radiation, an optical device that can transfer the laser radiation in a linear intensity distribution on the work plane, and lens that are used to influence the linear intensity distribution on the work plane and that can be displaced in the direction of diffusion of the laser radiation. The intensity profile can be modified perpendicular to the extension of the linear intensity distribution by modifying the position of the lens in the direction of diffusion of the laser radiation.

Abstract: A device for beam shaping is particularly suited for producing a linear intensity distribution in a working plane. The device includes a laser light source, which can emit a multi-mode laser radiation. The beam quality factor of the radiation with regard to a first direction perpendicular to the propagation direction of the laser radiation is greater than 1 and also the beam quality factor with regard to a second direction perpendicular to the propagation direction is greater than 1. The device further includes a beam transformation assembly, which are arranged in the device in such a way that they can transform the laser radiation or partial beams of the laser radiation in such a way that the beam quality factor with regard to the first direction is increased and that the beam quality factor with regard to the second direction is reduced.

Abstract: A device for homogenizing light contains at least one optically functional surface through which light to be homogenized can pass and a plurality of concave and convex cylindrical lenses which are disposed in an alternating fashion one next to the other on the at least one optically functional surface. The device further has at least one first embodiment and at least one second embodiment, different from the at least one first embodiment, of transitions between the concave and the convex cylindrical lenses. Wherein the transitions between the concave and the convex cylindrical lenses are configured such that partial beams of the light to be homogenized, which have passed through different embodiments of the transitions between the concave and the convex cylindrical lenses, have an optical path difference with respect to one another, which contributes to the reduction of interference effects in the homogenized light.

Abstract: A method and device for influencing light, include a first array of lens systems through which the light to be influenced can at least partially pass. A first phase-modifying array modulates the phases of the light which has passed through the individual lens systems of the first array. A second array of lens systems is provided through which the light phase-modified by the phase modifiers can at least partially pass. The second array of lens systems causes a plurality of local intensity maxima of the light to be created in the propagation direction of the light in the region of the second array of lens systems. A first lens system is disposed between the first array of lens systems and the second array of lens systems and a second lens system is disposed between the first lens system and the second array of lens systems. The first phase-modifying array is disposed between the first and second lens systems.

Abstract: The invention relates to microscopy, in particular to a method for obtaining a high resolution image and can be used for observing biological objects, micro and nano-structures and for the micro-lithography quality inspection. The aim of said invention is to increase the rate of the image producing process, to reduce the cost thereof and to simplify said process. The inventive method for obtaining a high resolution image consists in carrying out the object examination by means of an optical far field microscope and in processing data. Particles are applied to the object under examination and said object is placed in a particle suspension-containing liquid, wherein a particle redistribution along the surface of the object under examination is carried out. The capturing or scattering or luminescent particles are used. The aim is also attained by the use of a light reflected from the object surface or by means of a light passing therethrough.

Abstract: A device for homogenizing light contains at least one optically functional surface through which light to be homogenized can pass and a plurality of concave and convex cylindrical lenses which are disposed in an alternating fashion one next to the other on the at least one optically functional surface. The device further has at least one first embodiment and at least one second embodiment, different from the at least one first embodiment, of transitions between the concave and the convex cylindrical lenses. Wherein the transitions between the concave and the convex cylindrical lenses are configured such that partial beams of the light to be homogenized, which have passed through different embodiments of the transitions between the concave and the convex cylindrical lenses, have an optical path difference with respect to one another, which contributes to the reduction of interference effects in the homogenized light.

Abstract: The invention relates to a method for producing a large variety of photoresist structures, wherein a volume of photosensitive material (5) is exposed at least once by means of at least two light beams (1, 2), which are superposed inside the photosensitive material (5), and is subsequently subjected to a developing process, wherein the light beams (1, 2) penetrate at least one transparent optical element (3). The optical element (3) is a polyhedron with planar or curved surfaces which largely prevents refraction of the light beams on the surface of the volume of photosensitive material (5) when the beams are fed-in and/or fed-out of the volume of photosensitive material (5), so that the angle of refraction for the light beams (1, 2) can be greater in the volume of photosensitive material (5) than the critical angle of the total reflection, which has a limiting effect without optical element (3).

Abstract: A device for beam shaping is particularly suited for producing a linear intensity distribution in a working plane. The device includes a laser light source, which can emit a multi-mode laser radiation. The beam quality factor of the radiation with regard to a first direction perpendicular to the propagation direction of the laser radiation is greater than 1 and also the beam quality factor with regard to a second direction perpendicular to the propagation direction is greater than 1. The device further includes a beam transformation assembly, which are arranged in the device in such a way that they can transform the laser radiation or partial beams of the laser radiation in such a way that the beam quality factor with regard to the first direction is increased and that the beam quality factor with regard to the second direction is reduced.

Abstract: A method and device for influencing light, include a first array of lens systems through which the light to be influenced can at least partially pass. A first phase-modifying array modulates the phases of the light which has passed through the individual lens systems of the first array. A second array of lens systems is provided through which the light phase-modified by the phase modifiers can at least partially pass. The second array of lens systems causes a plurality of local intensity maxima of the light to be created in the propagation direction of the light in the region of the second array of lens systems. A first lens system is disposed between the first array of lens systems and the second array of lens systems and a second lens system is disposed between the first lens system and the second array of lens systems. The first phase-modifying array is disposed between the first and second lens systems.

Abstract: A device for homogenizing optical beams contains at least one optically functional boundary surface through which a beam to be homogenized can pass or at which a beam to be homogenized can be reflected. A plurality of lens elements or mirror elements are disposed on the at least one optically functional boundary surface. The lens elements or the mirror elements each have such a curvature in their edge regions that diffraction-related effects are reduced as a result.