Patents by Inventor Iraj Sadighi

Iraj Sadighi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vision system
    Patent number: 7627395
    Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: December 1, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
  • Vision system
    Patent number: 7233841
    Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
    Type: Grant
    Filed: March 11, 2003
    Date of Patent: June 19, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
  • VISION SYSTEM
    Publication number: 20070112465
    Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
    Type: Application
    Filed: December 28, 2006
    Publication date: May 17, 2007
    Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
  • Vision system
    Patent number: 7085622
    Abstract: Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: August 1, 2006
    Assignee: Applied Material, Inc.
    Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
  • Vision system
    Publication number: 20030202092
    Abstract: A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
    Type: Application
    Filed: March 11, 2003
    Publication date: October 30, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka
  • Vision system
    Publication number: 20030198376
    Abstract: Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.
    Type: Application
    Filed: April 19, 2002
    Publication date: October 23, 2003
    Inventors: Iraj Sadighi, Jeff Hudgens, Michael Rice, Gary Wyka