Patents by Inventor IREH SEO

IREH SEO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESS SYSTEM AND METHOD OF CLEANING THE SAME
    Publication number: 20240141481
    Abstract: A method of cleaning a semiconductor processing system may include applying a vacuum pressure to a supply pipeline through which a process fluid is transferred to a process chamber and purging the supply pipeline with a cleaning gas, wherein the purging the supply pipeline with the cleaning gas includes by supplying the cleaning gas to a front end of the supply pipeline and discharging the cleaning gas supplied to the supply pipeline by applying an atmospheric pressure from a back end of the supply pipeline.
    Type: Application
    Filed: May 25, 2023
    Publication date: May 2, 2024
    Applicants: SAMSUNG ELECTRONICS CO., LTD., UIF (University Industry Foundation), Yonsei University
    Inventors: IREH SEO, CHANG-HA LEE, TAEUNG YOON, RAK-YOUNG JEON